Latest revision as of 13:15, 30 October 2023

Feedback to this page: click here

Unless otherwise stated, the content of this page was created by the dry etch group at DTU Nanolab

XPS Data processing with Avantage

How to analyze data

In this section, all steps (import data, add peaks and backgrounds etc.) of the analysis are described.

XPS Simplified

The web page XPS Simplified is a ThermoScientific page where you can find a lot of information about the techniques, the hardware, data analysis etc.

XPS Knowledge View

A knowledge database providing specific information on every element is included in the software. It provides very useful information about the XPS characteristics of every detectable element and it may even be a very good idea to consult it before the data is acquired. Click HERE to get information on how to access XPS Knowledge View in Avantage.

Basic instructions

Click HERE to have a complete walk-through of an example. This includes

Open data file
Open and analyze survey spectrum
Analyze high resolution spectra of the individual spectra:
- Add background
- Add peaks
- Quantify
Analyze depth profiles

Guidelines on data processing

Click HERE to see some general guidelines on data processing in Avantage.

Introduction to data analysis with Avantage by Thermofisher

In the Youtube video below, the application specialist from Thermorfisher Paul Mack walks you through Avantage...somewhat slowly..

Click here

Examples of data analysis

Depth profile of ALD layers: Silicon wafer with 15 nm Al₂O₃, 15 nm of TiO₂ and 16 nm of HfO₂

Depth profile of a silicon wafer with nitride, polysilicon and oxide layer

Periodic table with binding energies of all elements

Specific Process Knowledge/Characterization/XPS/Processing/PeriodicTable

XPS data analysis with CasaXPS

CasaXPS has its own Youtube channel with more than 250 videos so it would be a complete waste of time to make any instructions here. Instead, this is where you as a CasaXPS user could contribute to this database: In case you found any Youtube video that was particularly good, please notify us and we will post a link.

In order to use CasaXPS, you will need to export the data from Avantage and convert it into the Vamas format. Click this link to find more information.

@@ Line 2: / Line 2: @@
 '''Feedback to this page''': '''[mailto:labadviser@danchip.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.danchip.dtu.dk/index.php?title=Specific_Process_Knowledge/Characterization/XPS/Processing click here]'''
-= XPS data processing =
+<!-- Page reviewed 8/5-2023 jmli -->
+<!--Checked for updates on 9/5-2023 - ok/jmli -->
+{{Contentbydryetch}}
-You will need some kind of dedicated software in order to analyze and interpret XPS spectra. You can find many online but here we will only use the Avantage for obvious reasons. Installing it on your own PC is strongly adviced as the analysis may be time consuming.
+= XPS Data processing with Avantage =
-== Install Avantage ==
+== How to analyze data==
-To install Avantage, please download the latest version (currently a 175 Mb zip file and therefore above the 100 Mb limit of LabAdviser) from the network drive
+In this section, all steps (import data, add peaks and backgrounds etc.) of the analysis are described.
-* O:\CleanroomDrive\jml\XPS Avantage 5.948\
-* U:\DCH\CleanroomDrive\jml\XPS Avantage 5.948\
-and run the install file. At some point a nine digit computer number (for your installation) will be given and you will be prompted for a processing licence. To get a license, write an email to Thermo ( Click [mailto:support.service.ukegr@thermofisher.com?Subject=Standard%20processing%20license%20for%20computer%20number%20xxx%20-%20xxx%20-%20xxx here]) requsting a standard processing license. Usually you will have an answer within a day or two. Use the license to activate Avantage and you are ready to analyze your data.
-== How to analyze data ==
+=== XPS Simplified ===
+The web page [https://xpssimplified.com/index.php XPS Simplified] is a ThermoScientific page where you can find a lot of information about the techniques, the hardware, data analysis etc.
-In this section, all steps (import data, add peaks and backgrounds etc.) of the analysis are described.
-=== [[Specific Process Knowledge/Characterization/XPS/Processing/XPSknowledgeview|XPS Knowledge View]] ===
+=== XPS Knowledge View ===
-A knowledge database providing specific information on every element is included in the software. It provides very useful information about the XPS characteristics of every detectable element and it may even be a very good idea to consult it before the data is acquired. Click [[Specific Process Knowledge/Characterization/XPS/Processing/XPSknowledgeview|HERE]] to get information on how to access XPS Knowledge View in Avantage.
+A knowledge database providing specific information on every element is included in the software. It provides very useful information about the XPS characteristics of every detectable element and it may even be a very good idea to consult it before the data is acquired. Click [[Specific Process Knowledge/Characterization/XPS/Processing/XPSknowledgeview|'''HERE''']] to get information on how to access XPS Knowledge View in Avantage.
-=== [[Specific Process Knowledge/Characterization/XPS/Processing/Basics|Basic instructions ]]===
+=== Basic instructions ===
-Click [[Specific Process Knowledge/Characterization/XPS/Processing/Basics|HERE]] to have a complete walk-through of an example. This includes
+Click [[Specific Process Knowledge/Characterization/XPS/Processing/Basics|'''HERE''']] to have a complete walk-through of an example. This includes
 * Open data file
 * Open and analyze survey spectrum
@@ Line 31: / Line 29: @@
 ** Quantify
 * Analyze depth profiles
+=== Guidelines on data processing ===
+Click [[Specific Process Knowledge/Characterization/XPS/Processing/Guidelines|'''HERE''']] to see some general guidelines on data processing in Avantage.
+== Introduction to data analysis with Avantage by Thermofisher ==
+In the Youtube video below, the application specialist from Thermorfisher Paul Mack walks you through Avantage...somewhat slowly..
+[https://www.youtube.com/watch?v=gVzYThRKjYQ '''Click here ''']
 == Examples of data analysis ==
-*[[Specific Process Knowledge/Characterization/XPS/Processing/SiliconSandwich|Depth profile of a silicon wafer with nitride, polysilicon and oxide layer]]
+*[[Specific Process Knowledge/Characterization/XPS/Processing/ALDSandwich1|Depth profile of ALD layers: Silicon wafer with 15 nm Al<sub>2</sub>O<sub>3</sub>, 15 nm of TiO<sub>2</sub> and 16 nm of HfO<sub>2</sub> ]]
+*[[Specific_Process_Knowledge/Characterization/XPS/XPS_Depth_profiling|Depth profile of a silicon wafer with nitride, polysilicon and oxide layer]]
 == Periodic table with binding energies of all elements==
 *[[Specific Process Knowledge/Characterization/XPS/Processing/PeriodicTable]]
+= XPS data analysis with CasaXPS =
+CasaXPS has its own [https://www.youtube.com/channel/UCUqLBeW-UAjXC55HbRYOabQ Youtube channel] with more than 250 videos so it would be a complete waste of time to make any instructions here. Instead, this is where you as a CasaXPS user could contribute to this database: In case you found any Youtube video that was particularly good, please notify us and we will post a link.
+In order to use CasaXPS, you will need to export the data from Avantage and convert it into the Vamas format. Click [[Specific Process Knowledge/Characterization/XPS/Export2CasaXPS | ''this link'']] to find more information.