Specific Process Knowledge/Etch/DRIE-Pegasus/Isotropic: Difference between revisions

Latest revision as of 11:30, 28 June 2023

Feedback to this page: click here

**Mediumiso**
Recipe	Step	Temperature	Pressure	C₄F₈	SF₆	O₂	Ar	Coil	Platen	Runs	Key words
Mediumiso1	-	20	25	0	150	0	0	600	3	1	Works great. Used extensively for Ph.D. thesis of Peter Emil Larsen
Isoslow7	-	10	10	0	80	0	0	150	3	1
-

@@ Line 1: / Line 1: @@
+'''Feedback to this page''': '''[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php/Specific_Process_Knowledge/Etch/DRIE-Pegasus/Isotropic click here]'''
+<!--Checked for updates on 2/10-2020 - ok/jmli -->
+<!--Checked for updates on 14/5-2018 - ok/jmli -->
 {| border="1" cellpadding="1" cellspacing="0" style="text-align:center;"
@@ Line 17: / Line 21: @@
 ! width="100" | Key words
 |-
-! mediumiso1    <!-- recipe name -->
+! Mediumiso1    <!-- recipe name -->
 | -        <!-- step -->
 | 20       <!-- chiller temp -->
@@ Line 28: / Line 32: @@
 | 3      <!-- platen power -->
 |[[Specific Process Knowledge/Etch/DRIE-Pegasus/Isotropic/mediumiso1|1]]     <!-- link processes -->
-| NA     <!-- keywords -->
+|  Works great. Used extensively for Ph.D. thesis of Peter Emil Larsen     <!-- keywords -->
+|-
+! Isoslow7       <!-- recipe name -->
+| -       <!-- step -->
+| 10        <!-- chiller temp -->
+| 10       <!-- pressure -->
+| 0       <!-- C4F8 flow -->
+| 80       <!-- SF6 flow -->
+| 0       <!-- O2 flow -->
+| 0       <!-- Ar flow -->
+| 150       <!-- coil power -->
+| 3       <!-- platen power -->
+|[[Specific Process Knowledge/Etch/DRIE-Pegasus/Isotropic/Isoslow7|1]]         <!-- link processes -->
+|        <!-- keywords -->
 |-
 ! -       <!-- recipe name -->
@@ Line 37: / Line 54: @@
 |        <!-- SF6 flow -->
 |        <!-- O2 flow -->
+|       <!-- Ar flow -->
 |        <!-- coil power -->
 |        <!-- platen power -->
@@ Line 42: / Line 60: @@
 |        <!-- keywords -->
 |-
 |}