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'''Feedback to this page''':
'''[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php/Specific_Process_Knowledge/Etch/DRIE-Pegasus/processA/PrA-1 click here]'''


<!--Checked for updates on 30/7-2018 - ok/jmli -->
<!--Checked for updates on 5/10-2020 - ok/jmli -->
<!--Checked for updates on 28/6-2023 - ok/jmli -->
<!--Checked for updates on 5/2-2026 - ok/jmli -->
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! colspan="2" width="120"| Substrate Information
! colspan="2" width="120"| Substrate Information
! colspan="3" | Process Information
! colspan="3" | Process Information
! rowspan="2" width="500" |SEM Images
! rowspan="2" |SEM Images
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