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Specific Process Knowledge/Etch/DRIE-Pegasus/ProcessA/ProcessLog: Difference between revisions

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DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers
4,565 edits
Created page with "{| {{table}} | align="center" style="background:#f0f0f0;"|'''End date''' | align="center" style="background:#f0f0f0;"|'''User''' | align="center" style="background:#f0f0f0;"|'..."
 
Jmli (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers
4,565 edits
Replaced content with "'''Feedback to this page''': '''[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php/Specific_Process_Knowledge/Etch/DRIE-Pegasus/ProcessA/ProcessLog click here]''' <!--Checked for updates on 30/7-2018 - ok/jmli --> <!--Checked for updates on 5/10-2020 - ok/jmli --> <!--Checked for updates on 21/10-2025. ok/ jmli-->"
Tag: Replaced
 
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{| {{table}}
'''Feedback to this page''': '''[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php/Specific_Process_Knowledge/Etch/DRIE-Pegasus/ProcessA/ProcessLog click here]'''
| align="center" style="background:#f0f0f0;"|'''End date'''
<!--Checked for updates on 30/7-2018 - ok/jmli -->
| align="center" style="background:#f0f0f0;"|'''User'''
<!--Checked for updates on 5/10-2020 - ok/jmli -->
| align="center" style="background:#f0f0f0;"|'''line'''
<!--Checked for updates on 21/10-2025. ok/ jmli-->
| align="center" style="background:#f0f0f0;"|'''noProcessingDone [text]'''
| align="center" style="background:#f0f0f0;"|'''Etched material [list+]'''
| align="center" style="background:#f0f0f0;"|'''Mask material [list+]'''
| align="center" style="background:#f0f0f0;"|'''Recipe [text]'''
| align="center" style="background:#f0f0f0;"|'''Wafer ID [text]'''
| align="center" style="background:#f0f0f0;"|'''Process time [m]'''
| align="center" style="background:#f0f0f0;"|'''Process time [s]'''
| align="center" style="background:#f0f0f0;"|'''Process time [hh:mm:ss calc]'''
| align="center" style="background:#f0f0f0;"|'''Chiller temperature [°C]'''
| align="center" style="background:#f0f0f0;"|'''Comments [text]'''
|-
| 02-05-2016 14:50||jmli||1||||None||None||HiLi10mins||none||10||0||00:10:00||0||
|-
| 02-05-2016 14:50||jmli||2||||4" Si||Az 4562||PrA-0||C03991.01||14||40||00:14:40||20||Travka20 wafer, 80cyc step2;
|-
| 02-05-2016 14:50||jmli||3||||None||None||3min TDESC clean||none||3||0||00:03:00||0||
|-
| 02-05-2016 14:50||jmli||4||||4" Si||Az 4562||PrA-1||C03991.02||14||0||00:14:00||20||Travka20 wafer, 80cyc step2;
|-
| 02-05-2016 14:50||jmli||5||||None||None||HiLi10mins||none||10||0||00:10:00||0||
|-
| 02-05-2016 14:50||jmli||6||||4" Si||Az 4562||PrA-2||C03991.03||14||40||00:14:40||20||Travka20 wafer, 80cyc step2;
|-
| 02-05-2016 14:50||jmli||7||||None||None||3min TDESC clean||none||3||0||00:03:00||0||
|-
| 02-05-2016 14:50||jmli||8||||4" Si||Az 4562||PrA-0||C03991.04||14||40||00:14:40||20||Travka20 wafer, 80cyc step2;
|-
| 02-05-2016 14:50||jmli||9||||None||None||3min TDESC clean||none||3||0||00:03:00||0||
|-
| 02-05-2016 14:50||jmli||10||||4" Si||Az 4562||PrA-1||C03991.05||14||0||00:14:00||20||Travka20 wafer, 80cyc step2;
|-
| 02-05-2016 14:50||jmli||11||||None||None||3min TDESC clean||none||3||0||00:03:00||0||
|-
| 02-05-2016 14:50||jmli||12||||4" Si||Az 4562||PrA-2||C03991.06||14||40||00:14:40||20||Travka20 wafer, 80cyc step2;
|-
| 02-05-2016 14:50||jmli||13||||None||None||HiLi10mins||none||10||0||00:10:00||0||
|-
| 03-06-2016 14:47||jmli||1||||None||None||3min TDESC clean||none||3||0||00:03:00||20||
|-
| 03-06-2016 14:47||jmli||2||||Si||Az Mir 701||PrA-0||C04047.01||14||40||00:14:40||20||travka20 wafer
|-
| 03-06-2016 14:47||jmli||3||||None||None||3min TDESC clean||none||3||0||00:03:00||20||
|-
| 03-06-2016 14:47||jmli||4||||Si||Az Mir 701||PrA-1||C04047.02||14||40||00:14:40||20||travka20 wafer
|-
| 03-06-2016 14:47||jmli||5||||None||None||3min TDESC clean||none||3||0||00:03:00||20||
|-
| 03-06-2016 14:47||jmli||6||||Si||Az Mir 701||PrA-2||C04047.03||14||40||00:14:40||20||travka20 wafer
|-
| 03-06-2016 14:47||jmli||7||||None||None||3min TDESC clean||none||3||0||00:03:00||20||
|-
| 03-06-2016 14:47||jmli||8||||Si||Az Mir 701||PrA-0||C04047.04||14||40||00:14:40||20||travka20 wafer
|-
| 03-06-2016 14:47||jmli||9||||None||None||3min TDESC clean||none||3||0||00:03:00||20||
|-
| 03-06-2016 14:47||jmli||10||||Si||Az Mir 701||PrA-1||C04047.05||14||40||00:14:40||20||travka20 wafer
|-
| 03-06-2016 14:47||jmli||11||||None||None||3min TDESC clean||none||3||0||00:03:00||20||
|-
| 03-06-2016 14:47||jmli||12||||Si||Az Mir 701||PrA-2||C04047.06||14||40||00:14:40||20||travka20 wafer
|-
| 03-06-2016 14:47||jmli||13||||None||None||3min TDESC clean||none||3||0||00:03:00||20||
|-
|
|}

Latest revision as of 10:39, 21 October 2025

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