Specific Process Knowledge/Etch/DRIE-Pegasus/Isotropic: Difference between revisions

Latest revision as of 11:30, 28 June 2023

Feedback to this page: click here

**Mediumiso**
Recipe	Step	Temperature	Pressure	C₄F₈	SF₆	O₂	Ar	Coil	Platen	Runs	Key words
Mediumiso1	-	20	25	0	150	0	0	600	3	1	Works great. Used extensively for Ph.D. thesis of Peter Emil Larsen
Isoslow7	-	10	10	0	80	0	0	150	3	1
-

@@ Line 1: / Line 1: @@
+'''Feedback to this page''': '''[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php/Specific_Process_Knowledge/Etch/DRIE-Pegasus/Isotropic click here]'''
+<!--Checked for updates on 2/10-2020 - ok/jmli -->
+<!--Checked for updates on 14/5-2018 - ok/jmli -->
 {| border="1" cellpadding="1" cellspacing="0" style="text-align:center;"
 |+ '''Mediumiso'''
 |-
-! rowspan="2" width="100"| Recipe
+! width="50"| Recipe
-! rowspan="2" width="20"| Step
+! width="50"| Step
-! rowspan="2" width="20"| Temp.
+! width="50"| Temperature
-! colspan="6" | Deposition step
+! width="50"| Pressure
-! colspan="7" | Etch step
+! width="50"| C<sub>4</sub>F<sub>8</sub>
-! colspan="3" | Process observations
+! width="50"| SF<sub>6</sub>
-|-
+! width="50"| O<sub>2</sub>
-! Time
+! width="50"| Ar
-! Pres.
+! width="50"| Coil
-! C<sub>4</sub>F<sub>8</sub>
+! width="50"| Platen
-! SF<sub>6</sub>
+! width="50"| Runs
-! O<sub>2</sub>
-! Coil
-! Time
-! Pres.
-! C<sub>4</sub>F<sub>8</sub>
-! SF<sub>6</sub>
-! O<sub>2</sub>
-! Coil
-| [[Main Page/Process Logs/jmli/Parameters#Platen power|Platen]]
-| [[Main Page/Process Logs/jmli/Parameters#Hardware | HW]]
-! Runs
 ! width="100" | Key words
 |-
-! mediumiso1    <!-- recipe name -->
+! Mediumiso1    <!-- recipe name -->
-| -       <!-- step -->
+| -        <!-- step -->
 | 20       <!-- chiller temp -->
-| NA       <!-- dep time -->
+| 25       <!-- pressure -->
-| NA       <!-- dep pressure -->
+| 0        <!-- C4F8 flow -->
-| NA       <!-- C4F8 flow -->
+| 150      <!-- SF6 flow -->
-| NA      <!-- SF6 flow -->
+| 0        <!-- O2 flow -->
-| NA     <!-- O2 flow -->
+| 0        <!-- Ar flow -->
-| NA       <!-- coil power -->
-| NA      <!-- etch time -->
-| 25       <!-- etch pressure -->
-| 0       <!-- C4F8 flow -->
-| 150       <!-- SF6 flow -->
-| 0      <!-- O2 flow -->
 | 600       <!-- coil power -->
 | 3      <!-- platen power -->
-| -       <!-- hardware setting -->
+|[[Specific Process Knowledge/Etch/DRIE-Pegasus/Isotropic/mediumiso1|1]]     <!-- link processes -->
-| [[Main Page/Process Logs/jmli/Pegasus/isotropic/mediumiso1 | 1]]       <!-- link processes -->
+|  Works great. Used extensively for Ph.D. thesis of Peter Emil Larsen     <!-- keywords -->
-| NA     <!-- keywords -->
+|-
+! Isoslow7       <!-- recipe name -->
+| -       <!-- step -->
+| 10        <!-- chiller temp -->
+| 10       <!-- pressure -->
+| 0       <!-- C4F8 flow -->
+| 80       <!-- SF6 flow -->
+| 0       <!-- O2 flow -->
+| 0       <!-- Ar flow -->
+| 150       <!-- coil power -->
+| 3       <!-- platen power -->
+|[[Specific Process Knowledge/Etch/DRIE-Pegasus/Isotropic/Isoslow7|1]]         <!-- link processes -->
+|        <!-- keywords -->
 |-
-! -   <!-- recipe name -->
+! -       <!-- recipe name -->
 |        <!-- step -->
 |        <!-- chiller temp -->
-|        <!-- dep time -->
+|        <!-- pressure -->
-|        <!-- dep pressure -->
-|        <!-- C4F8 flow -->
-|        <!-- SF6 flow -->
-|        <!-- O2 flow -->
-|        <!-- coil power -->
-|        <!-- etch time -->
-|        <!-- etch pressure -->
 |        <!-- C4F8 flow -->
 |        <!-- SF6 flow -->
 |        <!-- O2 flow -->
+|       <!-- Ar flow -->
 |        <!-- coil power -->
 |        <!-- platen power -->
-|        <!-- hardware setting -->
+|        <!-- link processes -->
-|      <!-- link processes -->
+|        <!-- keywords -->
-|      <!-- keywords -->
 |-
 |}