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Specific Process Knowledge/Etch/ICP Metal Etcher/silicon oxide/By Peixiong: Difference between revisions

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'''Feedback to this page''': '''[mailto:labadviser@danchip.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowledge/Etch/ICP_Metal_Etcher/silicon_oxide/By_Peixiong click here]'''
'''Feedback to this page''': '''[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php/Specific_Process_Knowledge/Etch/ICP_Metal_Etcher/silicon_oxide/By_Peixiong click here]'''
<br> {{CC-bghe1}} <br>
=With C4F8 and H2 chemistry (all tests done by Peixiong Shi, DTU Nanolab)=
APOX refers to a thick SiO2 grown on a silicon wafer in a wet thermal process at high temperature.


=<span style="background:#FF2800">THIS PAGE IS UNDER CONSTRUCTION</span>[[image:Under_construction.png|200px]]=
==Part 1==
{|  class=MsoNormalTable border=0 cellspacing=0 cellpadding=0 width=855 style='width:641.0pt;border-collapse:collapse'  style='height:36.0pt'
|  width=83 valign=top style='width:62.0pt;border:solid white 1.0pt;  border-bottom:solid white 3.0pt;background:#4F81BD;padding:3.6pt 7.2pt 3.6pt 7.2pt;  height:36.0pt' |
|  width=68 valign=top style='width:51.0pt;border-top:solid white 1.0pt;  border-left:none;border-bottom:solid white 3.0pt;border-right:solid white 1.0pt;  background:#4F81BD;padding:3.6pt 7.2pt 3.6pt 7.2pt;height:36.0pt' |
|  width=81 valign=top style='width:61.0pt;border-top:solid white 1.0pt;  border-left:none;border-bottom:solid white 3.0pt;border-right:solid white 1.0pt;  background:#4F81BD;padding:3.6pt 7.2pt 3.6pt 7.2pt;height:36.0pt' | <p class=MsoNormal><span lang=DA>Very good</span></p>
|  width=72 valign=top style='width:54.0pt;border-top:solid white 1.0pt;  border-left:none;border-bottom:solid white 3.0pt;border-right:solid white 1.0pt;  background:#4F81BD;padding:3.6pt 7.2pt 3.6pt 7.2pt;height:36.0pt' | <p class=MsoNormal><span lang=DA>Very good</span></p>
|  width=79 valign=top style='width:59.0pt;border-top:solid white 1.0pt;  border-left:none;border-bottom:solid white 3.0pt;border-right:solid white 1.0pt;  background:#4F81BD;padding:3.6pt 7.2pt 3.6pt 7.2pt;height:36.0pt' | <p class=MsoNormal><span lang=DA>Very good</span></p>
|  width=79 valign=top style='width:59.0pt;border-top:solid white 1.0pt;  border-left:none;border-bottom:solid white 3.0pt;border-right:solid white 1.0pt;  background:#4F81BD;padding:3.6pt 7.2pt 3.6pt 7.2pt;height:36.0pt' | <p class=MsoNormal><span lang=DA>Very good</span></p>
|  width=79 valign=top style='width:59.0pt;border-top:solid white 1.0pt;  border-left:none;border-bottom:solid white 3.0pt;border-right:solid white 1.0pt;  background:#4F81BD;padding:3.6pt 7.2pt 3.6pt 7.2pt;height:36.0pt' | <p class=MsoNormal><span lang=DA>Very good</span></p>
|  width=79 valign=top style='width:59.0pt;border-top:solid white 1.0pt;  border-left:none;border-bottom:solid white 3.0pt;border-right:solid white 1.0pt;  background:#4F81BD;padding:3.6pt 7.2pt 3.6pt 7.2pt;height:36.0pt' | <p class=MsoNormal><span lang=DA>Very good</span></p>
|  width=79 valign=top style='width:59.0pt;border-top:solid white 1.0pt;  border-left:none;border-bottom:solid white 3.0pt;border-right:solid white 1.0pt;  background:#4F81BD;padding:3.6pt 7.2pt 3.6pt 7.2pt;height:36.0pt' | <p class=MsoNormal><span lang=DA>Unstable plasma at 2mtorr</span></p>
|  width=79 valign=top style='width:59.0pt;border-top:solid white 1.0pt;  border-left:none;border-bottom:solid white 3.0pt;border-right:solid white 1.0pt;  background:#4F81BD;padding:3.6pt 7.2pt 3.6pt 7.2pt;height:36.0pt' | <p class=MsoNormal><span lang=DA>stable plasma at 2.5mtorr</span></p>
|  width=79 valign=top style='width:59.0pt;border-top:solid white 1.0pt;  border-left:none;border-bottom:solid white 3.0pt;border-right:solid white 1.0pt;  background:#4F81BD;padding:3.6pt 7.2pt 3.6pt 7.2pt;height:36.0pt' | <p class=MsoNormal><span lang=DA>stable plasma at 2.5mtorr</span></p>
|-  style='height:36.0pt'
|  width=83 valign=top style='width:62.0pt;border-top:none;border-left:solid white 1.0pt;  border-bottom:solid white 3.0pt;border-right:solid white 1.0pt;background:  #4F81BD;padding:3.6pt 7.2pt 3.6pt 7.2pt;height:36.0pt' | <p class=MsoNormal>ICP metal etch SiO2 by reist mask try</p>
|  width=68 valign=top style='width:51.0pt;border-top:none;border-left:none;  border-bottom:solid white 3.0pt;border-right:solid white 1.0pt;background:  #4F81BD;padding:3.6pt 7.2pt 3.6pt 7.2pt;height:36.0pt' | <p class=MsoNormal><span lang=DA>Date</span></p>
|  width=81 valign=top style='width:61.0pt;border-top:none;border-left:none;  border-bottom:solid white 3.0pt;border-right:solid white 1.0pt;background:  #4F81BD;padding:3.6pt 7.2pt 3.6pt 7.2pt;height:36.0pt' | <p class=MsoNormal><span lang=DA>Feb262013</span></p>
|  width=72 valign=top style='width:54.0pt;border-top:none;border-left:none;  border-bottom:solid white 3.0pt;border-right:solid white 1.0pt;background:  #4F81BD;padding:3.6pt 7.2pt 3.6pt 7.2pt;height:36.0pt' | <p class=MsoNormal><span lang=DA>Feb272013</span></p>
|  width=79 valign=top style='width:59.0pt;border-top:none;border-left:none;  border-bottom:solid white 3.0pt;border-right:solid white 1.0pt;background:  #4F81BD;padding:3.6pt 7.2pt 3.6pt 7.2pt;height:36.0pt' | <p class=MsoNormal><span lang=DA>Feb272013 20:00</span></p>
|  width=79 valign=top style='width:59.0pt;border-top:none;border-left:none;  border-bottom:solid white 3.0pt;border-right:solid white 1.0pt;background:  #4F81BD;padding:3.6pt 7.2pt 3.6pt 7.2pt;height:36.0pt' | <p class=MsoNormal><span lang=DA>Feb272013 23:00</span></p>
|  width=79 valign=top style='width:59.0pt;border-top:none;border-left:none;  border-bottom:solid white 3.0pt;border-right:solid white 1.0pt;background:  #4F81BD;padding:3.6pt 7.2pt 3.6pt 7.2pt;height:36.0pt' | <p class=MsoNormal><span lang=DA>Feb282013 1am</span></p>
|  width=79 valign=top style='width:59.0pt;border-top:none;border-left:none;  border-bottom:solid white 3.0pt;border-right:solid white 1.0pt;background:  #4F81BD;padding:3.6pt 7.2pt 3.6pt 7.2pt;height:36.0pt' | <p class=MsoNormal><span lang=DA>Feb282013 2am</span></p>
|  width=79 valign=top style='width:59.0pt;border-top:none;border-left:none;  border-bottom:solid white 3.0pt;border-right:solid white 1.0pt;background:  #4F81BD;padding:3.6pt 7.2pt 3.6pt 7.2pt;height:36.0pt' | <p class=MsoNormal><span lang=DA>Feb282013 2am</span></p>
|  width=79 valign=top style='width:59.0pt;border-top:none;border-left:none;  border-bottom:solid white 3.0pt;border-right:solid white 1.0pt;background:  #4F81BD;padding:3.6pt 7.2pt 3.6pt 7.2pt;height:36.0pt' | <p class=MsoNormal><span lang=DA>Feb282013 2am</span></p>
|  width=79 valign=top style='width:59.0pt;border-top:none;border-left:none;  border-bottom:solid white 3.0pt;border-right:solid white 1.0pt;background:  #4F81BD;padding:3.6pt 7.2pt 3.6pt 7.2pt;height:36.0pt' | <p class=MsoNormal><span lang=DA>Feb2820134am</span></p>
|-  style='height:30.15pt'
|  width=83 valign=top style='width:62.0pt;border-top:none;border-left:solid white 1.0pt;  border-bottom:solid white 3.0pt;border-right:solid white 1.0pt;background:  #4F81BD;padding:3.6pt 7.2pt 3.6pt 7.2pt;height:30.15pt' |
|  width=68 valign=top style='width:51.0pt;border-top:none;border-left:none;  border-bottom:solid white 3.0pt;border-right:solid white 1.0pt;background:  #4F81BD;padding:3.6pt 7.2pt 3.6pt 7.2pt;height:30.15pt' | <p class=MsoNormal><span lang=DA>Metal ICP  recipe</span></p>
|  width=81 valign=top style='width:61.0pt;border-top:none;border-left:none;  border-bottom:solid white 3.0pt;border-right:solid white 1.0pt;background:  #4F81BD;padding:3.6pt 7.2pt 3.6pt 7.2pt;height:30.15pt' | <p class=MsoNormal><span lang=DA>pxSiO2try5</span></p>
|  width=72 valign=top style='width:54.0pt;border-top:none;border-left:none;  border-bottom:solid white 3.0pt;border-right:solid white 1.0pt;background:  #4F81BD;padding:3.6pt 7.2pt 3.6pt 7.2pt;height:30.15pt' | <p class=MsoNormal><span lang=DA>pxSiO2try6</span></p>
|  width=79 valign=top style='width:59.0pt;border-top:none;border-left:none;  border-bottom:solid white 3.0pt;border-right:solid white 1.0pt;background:  #4F81BD;padding:3.6pt 7.2pt 3.6pt 7.2pt;height:30.15pt' | <p class=MsoNormal><span lang=DA>pxSiO2try7</span></p>
|  width=79 valign=top style='width:59.0pt;border-top:none;border-left:none;  border-bottom:solid white 3.0pt;border-right:solid white 1.0pt;background:  #4F81BD;padding:3.6pt 7.2pt 3.6pt 7.2pt;height:30.15pt' | <p class=MsoNormal><span lang=DA>pxSiO2try8</span></p>
|  width=79 valign=top style='width:59.0pt;border-top:none;border-left:none;  border-bottom:solid white 3.0pt;border-right:solid white 1.0pt;background:  #4F81BD;padding:3.6pt 7.2pt 3.6pt 7.2pt;height:30.15pt' | <p class=MsoNormal><span lang=DA>pxSiO2try8</span></p>
|  width=79 valign=top style='width:59.0pt;border-top:none;border-left:none;  border-bottom:solid white 3.0pt;border-right:solid white 1.0pt;background:  #4F81BD;padding:3.6pt 7.2pt 3.6pt 7.2pt;height:30.15pt' | <p class=MsoNormal><span lang=DA>pxSiO2try8</span></p>
|  width=79 valign=top style='width:59.0pt;border-top:none;border-left:none;  border-bottom:solid white 3.0pt;border-right:solid white 1.0pt;background:  #4F81BD;padding:3.6pt 7.2pt 3.6pt 7.2pt;height:30.15pt' | <p class=MsoNormal><span lang=DA>pxSiO2try9</span></p>
|  width=79 valign=top style='width:59.0pt;border-top:none;border-left:none;  border-bottom:solid white 3.0pt;border-right:solid white 1.0pt;background:  #4F81BD;padding:3.6pt 7.2pt 3.6pt 7.2pt;height:30.15pt' | <p class=MsoNormal><span lang=DA>pxSiO2try9</span></p>
|  width=79 valign=top style='width:59.0pt;border-top:none;border-left:none;  border-bottom:solid white 3.0pt;border-right:solid white 1.0pt;background:  #4F81BD;padding:3.6pt 7.2pt 3.6pt 7.2pt;height:30.15pt' | <p class=MsoNormal><span lang=DA>pxSiO2try9</span></p>
|-  style='height:33.3pt'
|  width=83 style='width:62.0pt;border-top:none;border-left:solid white 1.0pt;  border-bottom:solid white 3.0pt;border-right:solid white 1.0pt;background:  #D0D8E8;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:33.3pt' |
|  width=68 style='width:51.0pt;border-top:none;border-left:none;border-bottom:  solid white 3.0pt;border-right:solid white 1.0pt;background:#D0D8E8;  padding:2.25pt 2.25pt 2.25pt 2.25pt;height:33.3pt' | <p class=MsoNormal><span lang=DA>Wafer size and ID</span></p>
|  width=81 style='width:61.0pt;border-top:none;border-left:none;border-bottom:  solid white 3.0pt;border-right:solid white 1.0pt;background:#D0D8E8;  padding:2.25pt 2.25pt 2.25pt 2.25pt;height:33.3pt' | <p class=MsoNormal><span lang=DA>6 inch,</span></p><p class=MsoNormal><span lang=DA>6A1_feb252013</span></p>
|  width=72 style='width:54.0pt;border-top:none;border-left:none;border-bottom:  solid white 3.0pt;border-right:solid white 1.0pt;background:#D0D8E8;  padding:2.25pt 2.25pt 2.25pt 2.25pt;height:33.3pt' | <p class=MsoNormal><span lang=DA>6 inch,</span></p><p class=MsoNormal><span lang=DA>6A4_feb262013</span></p>
|  width=79 style='width:59.0pt;border-top:none;border-left:none;border-bottom:  solid white 3.0pt;border-right:solid white 1.0pt;background:#D0D8E8;  padding:2.25pt 2.25pt 2.25pt 2.25pt;height:33.3pt' | <p class=MsoNormal><span lang=DA>6 inch,</span></p><p class=MsoNormal><span lang=DA>6A6_feb262013</span></p>
|  width=79 style='width:59.0pt;border-top:none;border-left:none;border-bottom:  solid white 3.0pt;border-right:solid white 1.0pt;background:#D0D8E8;  padding:2.25pt 2.25pt 2.25pt 2.25pt;height:33.3pt' | <p class=MsoNormal><span lang=DA>6 inch,</span></p><p class=MsoNormal><span lang=DA>6A2_feb272013</span></p>
|  width=79 style='width:59.0pt;border-top:none;border-left:none;border-bottom:  solid white 3.0pt;border-right:solid white 1.0pt;background:#D0D8E8;  padding:2.25pt 2.25pt 2.25pt 2.25pt;height:33.3pt' | <p class=MsoNormal><span lang=DA>6 inch,</span></p><p class=MsoNormal><span lang=DA>6A3_feb272013</span></p>
|  width=79 style='width:59.0pt;border-top:none;border-left:none;border-bottom:  solid white 3.0pt;border-right:solid white 1.0pt;background:#D0D8E8;  padding:2.25pt 2.25pt 2.25pt 2.25pt;height:33.3pt' | <p class=MsoNormal><span lang=DA>6 inch,</span></p><p class=MsoNormal><span lang=DA>6A4_feb272013</span></p>
|  width=79 style='width:59.0pt;border-top:none;border-left:none;border-bottom:  solid white 3.0pt;border-right:solid white 1.0pt;background:#D0D8E8;  padding:2.25pt 2.25pt 2.25pt 2.25pt;height:33.3pt' | <p class=MsoNormal><span lang=DA>6 inch,</span></p><p class=MsoNormal><span lang=DA>6A5_feb272013</span></p>
|  width=79 style='width:59.0pt;border-top:none;border-left:none;border-bottom:  solid white 3.0pt;border-right:solid white 1.0pt;background:#D0D8E8;  padding:2.25pt 2.25pt 2.25pt 2.25pt;height:33.3pt' | <p class=MsoNormal><span lang=DA>6 inch,</span></p><p class=MsoNormal><span lang=DA>6A5_feb272013</span></p>
|  width=79 style='width:59.0pt;border-top:none;border-left:none;border-bottom:  solid white 3.0pt;border-right:solid white 1.0pt;background:#D0D8E8;  padding:2.25pt 2.25pt 2.25pt 2.25pt;height:33.3pt' | <p class=MsoNormal><span lang=DA>6 inch,</span></p><p class=MsoNormal><span lang=DA>6A6_feb272013</span></p>
|-  style='height:71.7pt'
|  width=83 style='width:62.0pt;border:solid white 1.0pt;border-top:none;  background:#D0D8E8;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:71.7pt' |
|  width=68 style='width:51.0pt;border-top:none;border-left:none;border-bottom:  solid white 1.0pt;border-right:solid white 1.0pt;background:#D0D8E8;  padding:2.25pt 2.25pt 2.25pt 2.25pt;height:71.7pt' | <p class=MsoNormal><span lang=DA>Mask</span></p>
|  width=81 style='width:61.0pt;border-top:none;border-left:none;border-bottom:  solid white 1.0pt;border-right:solid white 1.0pt;background:#D0D8E8;  padding:2.25pt 2.25pt 2.25pt 2.25pt;height:71.7pt' | <p class=MsoNormal>440 nm resist on 62 nm Barc on 1800 nm apox, first etch barc
20 sec by Ox plasma</p>
|  width=72 style='width:54.0pt;border-top:none;border-left:none;border-bottom:  solid white 1.0pt;border-right:solid white 1.0pt;background:#D0D8E8;  padding:2.25pt 2.25pt 2.25pt 2.25pt;height:71.7pt' | <p class=MsoNormal>440 nm resist on 62 nm Barc on 1800 nm apox, first etch barc
20 sec by Ox plasma</p>
|  width=79 style='width:59.0pt;border-top:none;border-left:none;border-bottom:  solid white 1.0pt;border-right:solid white 1.0pt;background:#D0D8E8;  padding:2.25pt 2.25pt 2.25pt 2.25pt;height:71.7pt' | <p class=MsoNormal>780 nm resist on 62 nm Barc on 1800 nm apox, first etch barc
20 sec by Ox plasma</p>
|  width=79 style='width:59.0pt;border-top:none;border-left:none;border-bottom:  solid white 1.0pt;border-right:solid white 1.0pt;background:#D0D8E8;  padding:2.25pt 2.25pt 2.25pt 2.25pt;height:71.7pt' | <p class=MsoNormal>780nm resist on 62nmBarc on 800nm apox, first etch barc
20sec by Ox plasma</p>
|  width=79 style='width:59.0pt;border-top:none;border-left:none;border-bottom:  solid white 1.0pt;border-right:solid white 1.0pt;background:#D0D8E8;  padding:2.25pt 2.25pt 2.25pt 2.25pt;height:71.7pt' | <p class=MsoNormal>780nm resist on 62nmBarc on 490nm apox, first etch barc
20sec by Ox plasma</p>
|  width=79 style='width:59.0pt;border-top:none;border-left:none;border-bottom:  solid white 1.0pt;border-right:solid white 1.0pt;background:#D0D8E8;  padding:2.25pt 2.25pt 2.25pt 2.25pt;height:71.7pt' | <p class=MsoNormal><span lang=DA>Blank Si</span></p>
|  width=79 style='width:59.0pt;border-top:none;border-left:none;border-bottom:  solid white 1.0pt;border-right:solid white 1.0pt;background:#D0D8E8;  padding:2.25pt 2.25pt 2.25pt 2.25pt;height:71.7pt' | <p class=MsoNormal>780nm resist on 62nmBarc on 490nm apox, first etch barc
20sec by Ox plasma</p>
|  width=79 style='width:59.0pt;border-top:none;border-left:none;border-bottom:  solid white 1.0pt;border-right:solid white 1.0pt;background:#D0D8E8;  padding:2.25pt 2.25pt 2.25pt 2.25pt;height:71.7pt' | <p class=MsoNormal>780nm resist on 62nmBarc on 490nm apox, first etch barc
20sec by Ox plasma</p>
|  width=79 style='width:59.0pt;border-top:none;border-left:none;border-bottom:  solid white 1.0pt;border-right:solid white 1.0pt;background:#D0D8E8;  padding:2.25pt 2.25pt 2.25pt 2.25pt;height:71.7pt' | <p class=MsoNormal>780nm resist on 62nmBarc on 490nm apox, first etch barc
20sec by Ox plasma</p>
|-  style='height:29.25pt'
|  width=83 style='width:62.0pt;border:solid white 1.0pt;border-top:none;  background:#E9EDF4;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' |
|  width=68 style='width:51.0pt;border-top:none;border-left:none;border-bottom:  solid white 1.0pt;border-right:solid white 1.0pt;background:#E9EDF4;  padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>Etch time</span></p>
|  width=81 style='width:61.0pt;border-top:none;border-left:none;border-bottom:  solid white 1.0pt;border-right:solid white 1.0pt;background:#E9EDF4;  padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>2min</span></p>
|  width=72 style='width:54.0pt;border-top:none;border-left:none;border-bottom:  solid white 1.0pt;border-right:solid white 1.0pt;background:#E9EDF4;  padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>4min</span></p>
|  width=79 style='width:59.0pt;border-top:none;border-left:none;border-bottom:  solid white 1.0pt;border-right:solid white 1.0pt;background:#E9EDF4;  padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>4min</span></p>
|  width=79 style='width:59.0pt;border-top:none;border-left:none;border-bottom:  solid white 1.0pt;border-right:solid white 1.0pt;background:#E9EDF4;  padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>4min</span></p>
|  width=79 style='width:59.0pt;border-top:none;border-left:none;border-bottom:  solid white 1.0pt;border-right:solid white 1.0pt;background:#E9EDF4;  padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>5min</span></p>
|  width=79 style='width:59.0pt;border-top:none;border-left:none;border-bottom:  solid white 1.0pt;border-right:solid white 1.0pt;background:#E9EDF4;  padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>4min</span></p>
|  width=79 style='width:59.0pt;border-top:none;border-left:none;border-bottom:  solid white 1.0pt;border-right:solid white 1.0pt;background:#E9EDF4;  padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>1min</span></p>
|  width=79 style='width:59.0pt;border-top:none;border-left:none;border-bottom:  solid white 1.0pt;border-right:solid white 1.0pt;background:#E9EDF4;  padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>4min</span></p>
|  width=79 style='width:59.0pt;border-top:none;border-left:none;border-bottom:  solid white 1.0pt;border-right:solid white 1.0pt;background:#E9EDF4;  padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>5min</span></p>
|-  style='height:29.25pt'
|  width=83 style='width:62.0pt;border:solid white 1.0pt;border-top:none;  background:#E9EDF4;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' |
|  width=68 style='width:51.0pt;border-top:none;border-left:none;border-bottom:  solid white 1.0pt;border-right:solid white 1.0pt;background:#E9EDF4;  padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>Pressure [mTorr] </span></p>
|  width=81 style='width:61.0pt;border-top:none;border-left:none;border-bottom:  solid white 1.0pt;border-right:solid white 1.0pt;background:#E9EDF4;  padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>6</span></p>
|  width=72 style='width:54.0pt;border-top:none;border-left:none;border-bottom:  solid white 1.0pt;border-right:solid white 1.0pt;background:#E9EDF4;  padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>6</span></p>
|  width=79 style='width:59.0pt;border-top:none;border-left:none;border-bottom:  solid white 1.0pt;border-right:solid white 1.0pt;background:#E9EDF4;  padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>4</span></p>
|  width=79 style='width:59.0pt;border-top:none;border-left:none;border-bottom:  solid white 1.0pt;border-right:solid white 1.0pt;background:#E9EDF4;  padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>3</span></p>
|  width=79 style='width:59.0pt;border-top:none;border-left:none;border-bottom:  solid white 1.0pt;border-right:solid white 1.0pt;background:#E9EDF4;  padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>3</span></p>
|  width=79 style='width:59.0pt;border-top:none;border-left:none;border-bottom:  solid white 1.0pt;border-right:solid white 1.0pt;background:#E9EDF4;  padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>2</span></p>
|  width=79 style='width:59.0pt;border-top:none;border-left:none;border-bottom:  solid white 1.0pt;border-right:solid white 1.0pt;background:#E9EDF4;  padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>2</span></p>
|  width=79 style='width:59.0pt;border-top:none;border-left:none;border-bottom:  solid white 1.0pt;border-right:solid white 1.0pt;background:#E9EDF4;  padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>2.5</span></p>
|  width=79 style='width:59.0pt;border-top:none;border-left:none;border-bottom:  solid white 1.0pt;border-right:solid white 1.0pt;background:#E9EDF4;  padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>2.5</span></p>
|-  style='height:29.25pt'
|  width=83 style='width:62.0pt;border:solid white 1.0pt;border-top:none;  background:#E9EDF4;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' |
|  width=68 style='width:51.0pt;border-top:none;border-left:none;border-bottom:  solid white 1.0pt;border-right:solid white 1.0pt;background:#E9EDF4;  padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>C4F8 flow [sccm] </span></p>
|  width=81 style='width:61.0pt;border-top:none;border-left:none;border-bottom:  solid white 1.0pt;border-right:solid white 1.0pt;background:#E9EDF4;  padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>0</span></p>
|  width=72 style='width:54.0pt;border-top:none;border-left:none;border-bottom:  solid white 1.0pt;border-right:solid white 1.0pt;background:#E9EDF4;  padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>20</span></p>
|  width=79 style='width:59.0pt;border-top:none;border-left:none;border-bottom:  solid white 1.0pt;border-right:solid white 1.0pt;background:#E9EDF4;  padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>10</span></p>
|  width=79 style='width:59.0pt;border-top:none;border-left:none;border-bottom:  solid white 1.0pt;border-right:solid white 1.0pt;background:#E9EDF4;  padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>8</span></p>
|  width=79 style='width:59.0pt;border-top:none;border-left:none;border-bottom:  solid white 1.0pt;border-right:solid white 1.0pt;background:#E9EDF4;  padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>8</span></p>
|  width=79 style='width:59.0pt;border-top:none;border-left:none;border-bottom:  solid white 1.0pt;border-right:solid white 1.0pt;background:#E9EDF4;  padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>8</span></p>
|  width=79 style='width:59.0pt;border-top:none;border-left:none;border-bottom:  solid white 1.0pt;border-right:solid white 1.0pt;background:#E9EDF4;  padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>8</span></p>
|  width=79 style='width:59.0pt;border-top:none;border-left:none;border-bottom:  solid white 1.0pt;border-right:solid white 1.0pt;background:#E9EDF4;  padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>8</span></p>
|  width=79 style='width:59.0pt;border-top:none;border-left:none;border-bottom:  solid white 1.0pt;border-right:solid white 1.0pt;background:#E9EDF4;  padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>8</span></p>
|-  style='height:29.25pt'
|  width=83 style='width:62.0pt;border:solid white 1.0pt;border-top:none;  background:#E9EDF4;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' |
|  width=68 style='width:51.0pt;border-top:none;border-left:none;border-bottom:  solid white 1.0pt;border-right:solid white 1.0pt;background:#E9EDF4;  padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>CF4 flow [sccm] </span></p>
|  width=81 style='width:61.0pt;border-top:none;border-left:none;border-bottom:  solid white 1.0pt;border-right:solid white 1.0pt;background:#E9EDF4;  padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>40</span></p>
|  width=72 style='width:54.0pt;border-top:none;border-left:none;border-bottom:  solid white 1.0pt;border-right:solid white 1.0pt;background:#E9EDF4;  padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>0</span></p>
|  width=79 style='width:59.0pt;border-top:none;border-left:none;border-bottom:  solid white 1.0pt;border-right:solid white 1.0pt;background:#E9EDF4;  padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>0</span></p>
|  width=79 style='width:59.0pt;border-top:none;border-left:none;border-bottom:  solid white 1.0pt;border-right:solid white 1.0pt;background:#E9EDF4;  padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>0</span></p>
|  width=79 style='width:59.0pt;border-top:none;border-left:none;border-bottom:  solid white 1.0pt;border-right:solid white 1.0pt;background:#E9EDF4;  padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>0</span></p>
|  width=79 style='width:59.0pt;border-top:none;border-left:none;border-bottom:  solid white 1.0pt;border-right:solid white 1.0pt;background:#E9EDF4;  padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>0</span></p>
|  width=79 style='width:59.0pt;border-top:none;border-left:none;border-bottom:  solid white 1.0pt;border-right:solid white 1.0pt;background:#E9EDF4;  padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>0</span></p>
|  width=79 style='width:59.0pt;border-top:none;border-left:none;border-bottom:  solid white 1.0pt;border-right:solid white 1.0pt;background:#E9EDF4;  padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>0</span></p>
|  width=79 style='width:59.0pt;border-top:none;border-left:none;border-bottom:  solid white 1.0pt;border-right:solid white 1.0pt;background:#E9EDF4;  padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>0</span></p>
|-  style='height:29.25pt'
|  width=83 style='width:62.0pt;border:solid white 1.0pt;border-top:none;  background:#E9EDF4;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' |
|  width=68 style='width:51.0pt;border-top:none;border-left:none;border-bottom:  solid white 1.0pt;border-right:solid white 1.0pt;background:#E9EDF4;  padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>H2 flow [sccm] </span></p>
|  width=81 style='width:61.0pt;border-top:none;border-left:none;border-bottom:  solid white 1.0pt;border-right:solid white 1.0pt;background:#E9EDF4;  padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>30</span></p>
|  width=72 style='width:54.0pt;border-top:none;border-left:none;border-bottom:  solid white 1.0pt;border-right:solid white 1.0pt;background:#E9EDF4;  padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>20</span></p>
|  width=79 style='width:59.0pt;border-top:none;border-left:none;border-bottom:  solid white 1.0pt;border-right:solid white 1.0pt;background:#E9EDF4;  padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>30</span></p>
|  width=79 style='width:59.0pt;border-top:none;border-left:none;border-bottom:  solid white 1.0pt;border-right:solid white 1.0pt;background:#E9EDF4;  padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>30</span></p>
|  width=79 style='width:59.0pt;border-top:none;border-left:none;border-bottom:  solid white 1.0pt;border-right:solid white 1.0pt;background:#E9EDF4;  padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>30</span></p>
|  width=79 style='width:59.0pt;border-top:none;border-left:none;border-bottom:  solid white 1.0pt;border-right:solid white 1.0pt;background:#E9EDF4;  padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>30</span></p>
|  width=79 style='width:59.0pt;border-top:none;border-left:none;border-bottom:  solid white 1.0pt;border-right:solid white 1.0pt;background:#E9EDF4;  padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>30</span></p>
|  width=79 style='width:59.0pt;border-top:none;border-left:none;border-bottom:  solid white 1.0pt;border-right:solid white 1.0pt;background:#E9EDF4;  padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>30</span></p>
|  width=79 style='width:59.0pt;border-top:none;border-left:none;border-bottom:  solid white 1.0pt;border-right:solid white 1.0pt;background:#E9EDF4;  padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>30</span></p>
|-  style='height:29.25pt'
|  width=83 style='width:62.0pt;border:solid white 1.0pt;border-top:none;  background:#E9EDF4;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' |
|  width=68 style='width:51.0pt;border-top:none;border-left:none;border-bottom:  solid white 1.0pt;border-right:solid white 1.0pt;background:#E9EDF4;  padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>CH4 flow [sccm] </span></p>
|  width=81 style='width:61.0pt;border-top:none;border-left:none;border-bottom:  solid white 1.0pt;border-right:solid white 1.0pt;background:#E9EDF4;  padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>0</span></p>
|  width=72 style='width:54.0pt;border-top:none;border-left:none;border-bottom:  solid white 1.0pt;border-right:solid white 1.0pt;background:#E9EDF4;  padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>Set 20 real 3.7</span></p>
|  width=79 style='width:59.0pt;border-top:none;border-left:none;border-bottom:  solid white 1.0pt;border-right:solid white 1.0pt;background:#E9EDF4;  padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>Set 20 real 3.7</span></p>
|  width=79 style='width:59.0pt;border-top:none;border-left:none;border-bottom:  solid white 1.0pt;border-right:solid white 1.0pt;background:#E9EDF4;  padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>0</span></p>
|  width=79 style='width:59.0pt;border-top:none;border-left:none;border-bottom:  solid white 1.0pt;border-right:solid white 1.0pt;background:#E9EDF4;  padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>0</span></p>
|  width=79 style='width:59.0pt;border-top:none;border-left:none;border-bottom:  solid white 1.0pt;border-right:solid white 1.0pt;background:#E9EDF4;  padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>0</span></p>
|  width=79 style='width:59.0pt;border-top:none;border-left:none;border-bottom:  solid white 1.0pt;border-right:solid white 1.0pt;background:#E9EDF4;  padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>0</span></p>
|  width=79 style='width:59.0pt;border-top:none;border-left:none;border-bottom:  solid white 1.0pt;border-right:solid white 1.0pt;background:#E9EDF4;  padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>0</span></p>
|  width=79 style='width:59.0pt;border-top:none;border-left:none;border-bottom:  solid white 1.0pt;border-right:solid white 1.0pt;background:#E9EDF4;  padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>0</span></p>
|-  style='height:29.25pt'
|  width=83 style='width:62.0pt;border:solid white 1.0pt;border-top:none;  background:#E9EDF4;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' |
|  width=68 style='width:51.0pt;border-top:none;border-left:none;border-bottom:  solid white 1.0pt;border-right:solid white 1.0pt;background:#E9EDF4;  padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>Coil Power [W] </span></p>
|  width=81 style='width:61.0pt;border-top:none;border-left:none;border-bottom:  solid white 1.0pt;border-right:solid white 1.0pt;background:#E9EDF4;  padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>800</span></p>
|  width=72 style='width:54.0pt;border-top:none;border-left:none;border-bottom:  solid white 1.0pt;border-right:solid white 1.0pt;background:#E9EDF4;  padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>800</span></p>
|  width=79 style='width:59.0pt;border-top:none;border-left:none;border-bottom:  solid white 1.0pt;border-right:solid white 1.0pt;background:#E9EDF4;  padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>800</span></p>
| width=79 style='width:59.0pt;border-top:none;border-left:none;border-bottom:  solid white 1.0pt;border-right:solid white 1.0pt;background:#E9EDF4;  padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>800</span></p>
|  width=79 style='width:59.0pt;border-top:none;border-left:none;border-bottom:  solid white 1.0pt;border-right:solid white 1.0pt;background:#E9EDF4;  padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>800</span></p>
|  width=79 style='width:59.0pt;border-top:none;border-left:none;border-bottom:  solid white 1.0pt;border-right:solid white 1.0pt;background:#E9EDF4;  padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>800</span></p>
|  width=79 style='width:59.0pt;border-top:none;border-left:none;border-bottom:  solid white 1.0pt;border-right:solid white 1.0pt;background:#E9EDF4;  padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>800</span></p>
|  width=79 style='width:59.0pt;border-top:none;border-left:none;border-bottom:  solid white 1.0pt;border-right:solid white 1.0pt;background:#E9EDF4;  padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>800 reflect 13W</span></p>
|  width=79 style='width:59.0pt;border-top:none;border-left:none;border-bottom:  solid white 1.0pt;border-right:solid white 1.0pt;background:#E9EDF4;  padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>800 reflect 8W</span></p>
|-  style='height:29.25pt'
|  width=83 style='width:62.0pt;border:solid white 1.0pt;border-top:none;  background:#D0D8E8;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' |
|  width=68 style='width:51.0pt;border-top:none;border-left:none;border-bottom:  solid white 1.0pt;border-right:solid white 1.0pt;background:#D0D8E8;  padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>Platen Power [W] </span></p>
|  width=81 style='width:61.0pt;border-top:none;border-left:none;border-bottom:  solid white 1.0pt;border-right:solid white 1.0pt;background:#D0D8E8;  padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>100</span></p>
|  width=72 style='width:54.0pt;border-top:none;border-left:none;border-bottom:  solid white 1.0pt;border-right:solid white 1.0pt;background:#D0D8E8;  padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>100</span></p>
|  width=79 style='width:59.0pt;border-top:none;border-left:none;border-bottom:  solid white 1.0pt;border-right:solid white 1.0pt;background:#D0D8E8;  padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>120</span></p>
|  width=79 style='width:59.0pt;border-top:none;border-left:none;border-bottom:  solid white 1.0pt;border-right:solid white 1.0pt;background:#D0D8E8;  padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>150</span></p>
|  width=79 style='width:59.0pt;border-top:none;border-left:none;border-bottom:  solid white 1.0pt;border-right:solid white 1.0pt;background:#D0D8E8;  padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>150</span></p>
|  width=79 style='width:59.0pt;border-top:none;border-left:none;border-bottom:  solid white 1.0pt;border-right:solid white 1.0pt;background:#D0D8E8;  padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>150</span></p>
|  width=79 style='width:59.0pt;border-top:none;border-left:none;border-bottom:  solid white 1.0pt;border-right:solid white 1.0pt;background:#D0D8E8;  padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>150</span></p>
|  width=79 style='width:59.0pt;border-top:none;border-left:none;border-bottom:  solid white 1.0pt;border-right:solid white 1.0pt;background:#D0D8E8;  padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>150</span></p>
|  width=79 style='width:59.0pt;border-top:none;border-left:none;border-bottom:  solid white 1.0pt;border-right:solid white 1.0pt;background:#D0D8E8;  padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>150reflect 0.2w</span></p>
|-  style='height:33.3pt'
|  width=83 style='width:62.0pt;border:solid white 1.0pt;border-top:none;  background:#E9EDF4;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:33.3pt' |
|  width=68 style='width:51.0pt;border-top:none;border-left:none;border-bottom:  solid white 1.0pt;border-right:solid white 1.0pt;background:#E9EDF4;  padding:2.25pt 2.25pt 2.25pt 2.25pt;height:33.3pt' | <p class=MsoNormal><span lang=DA>Platen temperature [<sup>o</sup>C] </span></p>
|  width=81 style='width:61.0pt;border-top:none;border-left:none;border-bottom:  solid white 1.0pt;border-right:solid white 1.0pt;background:#E9EDF4;  padding:2.25pt 2.25pt 2.25pt 2.25pt;height:33.3pt' | <p class=MsoNormal><span lang=DA>20</span></p>
|  width=72 style='width:54.0pt;border-top:none;border-left:none;border-bottom:  solid white 1.0pt;border-right:solid white 1.0pt;background:#E9EDF4;  padding:2.25pt 2.25pt 2.25pt 2.25pt;height:33.3pt' | <p class=MsoNormal><span lang=DA>20</span></p>
|  width=79 style='width:59.0pt;border-top:none;border-left:none;border-bottom:  solid white 1.0pt;border-right:solid white 1.0pt;background:#E9EDF4;  padding:2.25pt 2.25pt 2.25pt 2.25pt;height:33.3pt' | <p class=MsoNormal><span lang=DA>20</span></p>
|  width=79 style='width:59.0pt;border-top:none;border-left:none;border-bottom:  solid white 1.0pt;border-right:solid white 1.0pt;background:#E9EDF4;  padding:2.25pt 2.25pt 2.25pt 2.25pt;height:33.3pt' | <p class=MsoNormal><span lang=DA>20</span></p>
|  width=79 style='width:59.0pt;border-top:none;border-left:none;border-bottom:  solid white 1.0pt;border-right:solid white 1.0pt;background:#E9EDF4;  padding:2.25pt 2.25pt 2.25pt 2.25pt;height:33.3pt' | <p class=MsoNormal><span lang=DA>20</span></p>
|  width=79 style='width:59.0pt;border-top:none;border-left:none;border-bottom:  solid white 1.0pt;border-right:solid white 1.0pt;background:#E9EDF4;  padding:2.25pt 2.25pt 2.25pt 2.25pt;height:33.3pt' | <p class=MsoNormal><span lang=DA>20</span></p>
|  width=79 style='width:59.0pt;border-top:none;border-left:none;border-bottom:  solid white 1.0pt;border-right:solid white 1.0pt;background:#E9EDF4;  padding:2.25pt 2.25pt 2.25pt 2.25pt;height:33.3pt' | <p class=MsoNormal><span lang=DA>20</span></p>
|  width=79 style='width:59.0pt;border-top:none;border-left:none;border-bottom:  solid white 1.0pt;border-right:solid white 1.0pt;background:#E9EDF4;  padding:2.25pt 2.25pt 2.25pt 2.25pt;height:33.3pt' | <p class=MsoNormal><span lang=DA>20</span></p>
|  width=79 style='width:59.0pt;border-top:none;border-left:none;border-bottom:  solid white 1.0pt;border-right:solid white 1.0pt;background:#E9EDF4;  padding:2.25pt 2.25pt 2.25pt 2.25pt;height:33.3pt' | <p class=MsoNormal><span lang=DA>20</span></p>
|-  style='height:29.25pt'
|  width=83 style='width:62.0pt;border:solid white 1.0pt;border-top:none;  background:#D0D8E8;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' |
|  width=68 style='width:51.0pt;border-top:none;border-left:none;border-bottom:  solid white 1.0pt;border-right:solid white 1.0pt;background:#D0D8E8;  padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>Coil match</span></p>
|  width=81 style='width:61.0pt;border-top:none;border-left:none;border-bottom:  solid white 1.0pt;border-right:solid white 1.0pt;background:#D0D8E8;  padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>60%,27%</span></p>
|  width=72 style='width:54.0pt;border-top:none;border-left:none;border-bottom:  solid white 1.0pt;border-right:solid white 1.0pt;background:#D0D8E8;  padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>63%,25%</span></p>
|  width=79 style='width:59.0pt;border-top:none;border-left:none;border-bottom:  solid white 1.0pt;border-right:solid white 1.0pt;background:#D0D8E8;  padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>63%,25%</span></p>
|  width=79 style='width:59.0pt;border-top:none;border-left:none;border-bottom:  solid white 1.0pt;border-right:solid white 1.0pt;background:#D0D8E8;  padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>67%,24%</span></p>
|  width=79 style='width:59.0pt;border-top:none;border-left:none;border-bottom:  solid white 1.0pt;border-right:solid white 1.0pt;background:#D0D8E8;  padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>67%,24%</span></p>
|  width=79 style='width:59.0pt;border-top:none;border-left:none;border-bottom:  solid white 1.0pt;border-right:solid white 1.0pt;background:#D0D8E8;  padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>68.9%,24.1%</span></p>
|  width=79 style='width:59.0pt;border-top:none;border-left:none;border-bottom:  solid white 1.0pt;border-right:solid white 1.0pt;background:#D0D8E8;  padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>68.9%,24.1%</span></p>
|  width=79 style='width:59.0pt;border-top:none;border-left:none;border-bottom:  solid white 1.0pt;border-right:solid white 1.0pt;background:#D0D8E8;  padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>68.7%,25.3%</span></p>
|  width=79 style='width:59.0pt;border-top:none;border-left:none;border-bottom:  solid white 1.0pt;border-right:solid white 1.0pt;background:#D0D8E8;  padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>68.87%,23.1%</span></p>
|-  style='height:29.25pt'
|  width=83 style='width:62.0pt;border:solid white 1.0pt;border-top:none;  background:#D0D8E8;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' |
|  width=68 style='width:51.0pt;border-top:none;border-left:none;border-bottom:  solid white 1.0pt;border-right:solid white 1.0pt;background:#D0D8E8;  padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>Platen Match</span></p>
|  width=81 style='width:61.0pt;border-top:none;border-left:none;border-bottom:  solid white 1.0pt;border-right:solid white 1.0pt;background:#D0D8E8;  padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>40%,53%</span></p>
|  width=72 style='width:54.0pt;border-top:none;border-left:none;border-bottom:  solid white 1.0pt;border-right:solid white 1.0pt;background:#D0D8E8;  padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>36%,54%</span></p>
|  width=79 style='width:59.0pt;border-top:none;border-left:none;border-bottom:  solid white 1.0pt;border-right:solid white 1.0pt;background:#D0D8E8;  padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>36%,54%</span></p>
|  width=79 style='width:59.0pt;border-top:none;border-left:none;border-bottom:  solid white 1.0pt;border-right:solid white 1.0pt;background:#D0D8E8;  padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>34%,54%</span></p>
|  width=79 style='width:59.0pt;border-top:none;border-left:none;border-bottom:  solid white 1.0pt;border-right:solid white 1.0pt;background:#D0D8E8;  padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>34%,54%</span></p>
|  width=79 style='width:59.0pt;border-top:none;border-left:none;border-bottom:  solid white 1.0pt;border-right:solid white 1.0pt;background:#D0D8E8;  padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>34.3%,53.8%</span></p>
|  width=79 style='width:59.0pt;border-top:none;border-left:none;border-bottom:  solid white 1.0pt;border-right:solid white 1.0pt;background:#D0D8E8;  padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>34.3%,53.8%</span></p>
|  width=79 style='width:59.0pt;border-top:none;border-left:none;border-bottom:  solid white 1.0pt;border-right:solid white 1.0pt;background:#D0D8E8;  padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>36.8%,54.9%</span></p>
|  width=79 style='width:59.0pt;border-top:none;border-left:none;border-bottom:  solid white 1.0pt;border-right:solid white 1.0pt;background:#D0D8E8;  padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>33.0%,54.4%</span></p>
|-  style='height:29.25pt'
|  width=83 style='width:62.0pt;border:solid white 1.0pt;border-top:none;  background:#E9EDF4;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' |
|  width=68 style='width:51.0pt;border-top:none;border-left:none;border-bottom:  solid white 1.0pt;border-right:solid white 1.0pt;background:#E9EDF4;  padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>Throde valve opening rate</span></p>
|  width=81 style='width:61.0pt;border-top:none;border-left:none;border-bottom:  solid white 1.0pt;border-right:solid white 1.0pt;background:#E9EDF4;  padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>17%</span></p>
|  width=72 style='width:54.0pt;border-top:none;border-left:none;border-bottom:  solid white 1.0pt;border-right:solid white 1.0pt;background:#E9EDF4;  padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>12%</span></p>
|  width=79 style='width:59.0pt;border-top:none;border-left:none;border-bottom:  solid white 1.0pt;border-right:solid white 1.0pt;background:#E9EDF4;  padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>14%</span></p>
|  width=79 style='width:59.0pt;border-top:none;border-left:none;border-bottom:  solid white 1.0pt;border-right:solid white 1.0pt;background:#E9EDF4;  padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>14.7%</span></p>
|  width=79 style='width:59.0pt;border-top:none;border-left:none;border-bottom:  solid white 1.0pt;border-right:solid white 1.0pt;background:#E9EDF4;  padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>14.7%</span></p>
|  width=79 style='width:59.0pt;border-top:none;border-left:none;border-bottom:  solid white 1.0pt;border-right:solid white 1.0pt;background:#E9EDF4;  padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>14.7%</span></p>
|  width=79 style='width:59.0pt;border-top:none;border-left:none;border-bottom:  solid white 1.0pt;border-right:solid white 1.0pt;background:#E9EDF4;  padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>14.7%</span></p>
|  width=79 style='width:59.0pt;border-top:none;border-left:none;border-bottom:  solid white 1.0pt;border-right:solid white 1.0pt;background:#E9EDF4;  padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>16.2%</span></p>
|  width=79 style='width:59.0pt;border-top:none;border-left:none;border-bottom:  solid white 1.0pt;border-right:solid white 1.0pt;background:#E9EDF4;  padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' |
|-


=With C4F8 and H2 chemistry=
|  width=83 style='width:62.0pt;border:solid white 1.0pt;border-top:none;  background:#D0D8E8;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:90.9pt' |
|  width=68 style='width:51.0pt;border-top:none;border-left:none;border-bottom:  solid white 1.0pt;border-right:solid white 1.0pt;background:#D0D8E8;  padding:2.25pt 2.25pt 2.25pt 2.25pt;height:90.9pt' | <p class=MsoNormal><span lang=DA>Images </span></p>
|  width=81 style='width:61.0pt;border-top:none;border-left:none;border-bottom:  solid white 1.0pt;border-right:solid white 1.0pt;background:#D0D8E8;  padding:2.25pt 2.25pt 2.25pt 2.25pt;height:90.9pt' | <p class=MsoNormal>Image1</p>
|  width=72 style='width:54.0pt;border-top:none;border-left:none;border-bottom:  solid white 1.0pt;border-right:solid white 1.0pt;background:#D0D8E8;  padding:2.25pt 2.25pt 2.25pt 2.25pt;height:90.9pt' | <p class=MsoNormal>[[Specific_Process_Knowledge/Etch/ICP_Metal_Etcher/silicon_oxide/By_Peixiong/images_CF4#Images_stepper_6A4_feb262013_step9|Images]]</p>
|  width=79 style='width:59.0pt;border-top:none;border-left:none;border-bottom:  solid white 1.0pt;border-right:solid white 1.0pt;background:#D0D8E8;  padding:2.25pt 2.25pt 2.25pt 2.25pt;height:90.9pt' | <p class=MsoNormal>Images3</p>
|  width=79 style='width:59.0pt;border-top:none;border-left:none;border-bottom:  solid white 1.0pt;border-right:solid white 1.0pt;background:#D0D8E8;  padding:2.25pt 2.25pt 2.25pt 2.25pt;height:90.9pt' | <p class=MsoNormal>Images4</p>
|  width=79 style='width:59.0pt;border-top:none;border-left:none;border-bottom:  solid white 1.0pt;border-right:solid white 1.0pt;background:#D0D8E8;  padding:2.25pt 2.25pt 2.25pt 2.25pt;height:90.9pt' | <p class=MsoNormal>Iamges5</p>
|  width=79 style='width:59.0pt;border-top:none;border-left:none;border-bottom:  solid white 1.0pt;border-right:solid white 1.0pt;background:#D0D8E8;  padding:2.25pt 2.25pt 2.25pt 2.25pt;height:90.9pt' | <p class=MsoNormal>Images6</p>
|  width=79 style='width:59.0pt;border-top:none;border-left:none;border-bottom:  solid white 1.0pt;border-right:solid white 1.0pt;background:#D0D8E8;  padding:2.25pt 2.25pt 2.25pt 2.25pt;height:90.9pt' | <p class=MsoNormal>Images7</p>
|  width=79 style='width:59.0pt;border-top:none;border-left:none;border-bottom:  solid white 1.0pt;border-right:solid white 1.0pt;background:#D0D8E8;  padding:2.25pt 2.25pt 2.25pt 2.25pt;height:90.9pt' | <p class=MsoNormal>[[Specific_Process_Knowledge/Etch/ICP_Metal_Etcher/silicon_oxide/By_Peixiong/images_CF4#Images_Stepper_6A5_feb272013|Images]]</p>
|  width=79 style='width:59.0pt;border-top:none;border-left:none;border-bottom:  solid white 1.0pt;border-right:solid white 1.0pt;background:#D0D8E8;  padding:2.25pt 2.25pt 2.25pt 2.25pt;height:90.9pt' |


|-


|  width=83 style='width:62.0pt;border:solid white 1.0pt;border-top:none;  background:#D0D8E8;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:90.9pt' |
|  width=68 style='width:51.0pt;border-top:none;border-left:none;border-bottom:  solid white 1.0pt;border-right:solid white 1.0pt;background:#D0D8E8;  padding:2.25pt 2.25pt 2.25pt 2.25pt;height:90.9pt' | <p class=MsoNormal><span lang=DA>Comments </span></p>
|  width=81 style='width:61.0pt;border-top:none;border-left:none;border-bottom:  solid white 1.0pt;border-right:solid white 1.0pt;background:#D0D8E8;  padding:2.25pt 2.25pt 2.25pt 2.25pt;height:90.9pt' | <p class=MsoNormal>Profile Very good, 2min etch SiO3 350nm in wafer center,
310nm in wafer, resist etched 260nm</p>
|  width=72 style='width:54.0pt;border-top:none;border-left:none;border-bottom:  solid white 1.0pt;border-right:solid white 1.0pt;background:#D0D8E8;  padding:2.25pt 2.25pt 2.25pt 2.25pt;height:90.9pt' | <p class=MsoNormal>Profile Very good, 2min etch SiO3 350nm in wafer center,
310nm in wafer, resist etched 260nm</p>
|  width=79 style='width:59.0pt;border-top:none;border-left:none;border-bottom:  solid white 1.0pt;border-right:solid white 1.0pt;background:#D0D8E8;  padding:2.25pt 2.25pt 2.25pt 2.25pt;height:90.9pt' | <p class=MsoNormal>Profile Very good, 4min etch SiO3 480nm in wafer center,
Resist etched 100nm</p>
|  width=79 style='width:59.0pt;border-top:none;border-left:none;border-bottom:  solid white 1.0pt;border-right:solid white 1.0pt;background:#D0D8E8;  padding:2.25pt 2.25pt 2.25pt 2.25pt;height:90.9pt' | <p class=MsoNormal>Profile Very good, 4min etch SiO3 480nm in wafer center,
Resist etched 100nm, side wall 85degree</p>
|  width=79 style='width:59.0pt;border-top:none;border-left:none;border-bottom:  solid white 1.0pt;border-right:solid white 1.0pt;background:#D0D8E8;  padding:2.25pt 2.25pt 2.25pt 2.25pt;height:90.9pt' | <p class=MsoNormal>Profile Very good, 4min etch SiO3 480nm in wafer center,
Resist etched 100nm</p>
|  width=79 style='width:59.0pt;border-top:none;border-left:none;border-bottom:  solid white 1.0pt;border-right:solid white 1.0pt;background:#D0D8E8;  padding:2.25pt 2.25pt 2.25pt 2.25pt;height:90.9pt' | <p class=MsoNormal>Plasma very stable on blank Si wafer</p>
|  width=79 style='width:59.0pt;border-top:none;border-left:none;border-bottom:  solid white 1.0pt;border-right:solid white 1.0pt;background:#D0D8E8;  padding:2.25pt 2.25pt 2.25pt 2.25pt;height:90.9pt' | <p class=MsoNormal>Plasma not stable in apox wafer</p>
|  width=79 style='width:59.0pt;border-top:none;border-left:none;border-bottom:  solid white 1.0pt;border-right:solid white 1.0pt;background:#D0D8E8;  padding:2.25pt 2.25pt 2.25pt 2.25pt;height:90.9pt' | <p class=MsoNormal>etched 500nm apox, resit 150n, slide wall  86degm</p>
|  width=79 style='width:59.0pt;border-top:none;border-left:none;border-bottom:  solid white 1.0pt;border-right:solid white 1.0pt;background:#D0D8E8;  padding:2.25pt 2.25pt 2.25pt 2.25pt;height:90.9pt' |
|}<p class=MsoNormal>&nbsp;</p>


==Part2==


=With CF4 and H2 chemistry=
 
{|  class=MsoNormalTable border=0 cellspacing=0 cellpadding=0 width=517 style='width:388.0pt;border-collapse:collapse'  style='height:36.0pt'
|  width=163 valign=top style='width:122.0pt;border:solid white 1.0pt;  border-bottom:solid white 3.0pt;background:#4F81BD;padding:3.6pt 7.2pt 3.6pt 7.2pt;  height:36.0pt' | <p class=MsoNormal>ICP metal etch SiO2 by reist mask try</p>
|  width=192 valign=top style='width:144.0pt;border-top:solid white 1.0pt;  border-left:none;border-bottom:solid white 3.0pt;border-right:solid white 1.0pt;  background:#4F81BD;padding:3.6pt 7.2pt 3.6pt 7.2pt;height:36.0pt' | <p class=MsoNormal><span lang=DA>stable plasma at 2.5mtorr</span></p>
|  width=163 valign=top style='width:122.0pt;border-top:solid white 1.0pt;  border-left:none;border-bottom:solid white 3.0pt;border-right:solid white 1.0pt;  background:#4F81BD;padding:3.6pt 7.2pt 3.6pt 7.2pt;height:36.0pt' | <p class=MsoNormal><span lang=DA>stable plasma at 2.5mtorr</span></p>
|-  style='height:31.25pt'
|  width=163 valign=top style='width:122.0pt;border-top:none;border-left:  solid white 1.0pt;border-bottom:solid white 3.0pt;border-right:solid white 1.0pt;  background:#4F81BD;padding:3.6pt 7.2pt 3.6pt 7.2pt;height:31.25pt' | <p class=MsoNormal><span lang=DA>Date</span></p>
|  width=192 valign=top style='width:144.0pt;border-top:none;border-left:  none;border-bottom:solid white 3.0pt;border-right:solid white 1.0pt;  background:#4F81BD;padding:3.6pt 7.2pt 3.6pt 7.2pt;height:31.25pt' | <p class=MsoNormal><span lang=DA>Feb28204am</span></p>
|  width=163 valign=top style='width:122.0pt;border-top:none;border-left:  none;border-bottom:solid white 3.0pt;border-right:solid white 1.0pt;  background:#4F81BD;padding:3.6pt 7.2pt 3.6pt 7.2pt;height:31.25pt' | <p class=MsoNormal><span lang=DA>March012013, 21</span></p>
|-  style='height:26.15pt'
|  width=163 valign=top style='width:122.0pt;border-top:none;border-left:  solid white 1.0pt;border-bottom:solid white 3.0pt;border-right:solid white 1.0pt;  background:#4F81BD;padding:3.6pt 7.2pt 3.6pt 7.2pt;height:26.15pt' | <p class=MsoNormal><span lang=DA>Metal ICP  recipe</span></p>
|  width=192 valign=top style='width:144.0pt;border-top:none;border-left:  none;border-bottom:solid white 3.0pt;border-right:solid white 1.0pt;  background:#4F81BD;padding:3.6pt 7.2pt 3.6pt 7.2pt;height:26.15pt' | <p class=MsoNormal><span lang=DA>pxSiO2try9</span></p>
|  width=163 valign=top style='width:122.0pt;border-top:none;border-left:  none;border-bottom:solid white 3.0pt;border-right:solid white 1.0pt;  background:#4F81BD;padding:3.6pt 7.2pt 3.6pt 7.2pt;height:26.15pt' | <p class=MsoNormal><span lang=DA>pxSiO2try9</span></p>
|-  style='height:28.9pt'
|  width=163 style='width:122.0pt;border-top:none;border-left:solid white 1.0pt;  border-bottom:solid white 3.0pt;border-right:solid white 1.0pt;background:  #D0D8E8;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:28.9pt' | <p class=MsoNormal><span lang=DA>Wafer size and ID</span></p>
|  width=192 style='width:144.0pt;border-top:none;border-left:none;  border-bottom:solid white 3.0pt;border-right:solid white 1.0pt;background:  #D0D8E8;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:28.9pt' | <p class=MsoNormal><span lang=DA>6inch,</span></p><p class=MsoNormal><span lang=DA>6A6_feb272013</span></p>
|  width=163 style='width:122.0pt;border-top:none;border-left:none;  border-bottom:solid white 3.0pt;border-right:solid white 1.0pt;background:  #D0D8E8;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:28.9pt' | <p class=MsoNormal><span lang=DA>6inch,</span></p><p class=MsoNormal><span lang=DA>6A1_march012013</span></p>
|-  style='height:53.85pt'
|  width=163 style='width:122.0pt;border:solid white 1.0pt;border-top:none;  background:#D0D8E8;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:53.85pt' | <p class=MsoNormal><span lang=DA>Mask</span></p>
|  width=192 style='width:144.0pt;border-top:none;border-left:none;  border-bottom:solid white 1.0pt;border-right:solid white 1.0pt;background:  #D0D8E8;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:53.85pt' | <p class=MsoNormal>780nm resist on 62nmBarc on 490nm apox, first etch barc
20sec by Ox plasma</p>
|  width=163 style='width:122.0pt;border-top:none;border-left:none;  border-bottom:solid white 1.0pt;border-right:solid white 1.0pt;background:  #D0D8E8;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:53.85pt' | <p class=MsoNormal>780nm resist on 62nmBarc on 490nm apox, first etch barc
20sec by Ox plasma</p>
|-  style='height:25.4pt'
|  width=163 style='width:122.0pt;border:solid white 1.0pt;border-top:none;  background:#E9EDF4;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:25.4pt' | <p class=MsoNormal><span lang=DA>Etch time</span></p>
|  width=192 style='width:144.0pt;border-top:none;border-left:none;  border-bottom:solid white 1.0pt;border-right:solid white 1.0pt;background:  #E9EDF4;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:25.4pt' | <p class=MsoNormal><span lang=DA>5min</span></p>
|  width=163 style='width:122.0pt;border-top:none;border-left:none;  border-bottom:solid white 1.0pt;border-right:solid white 1.0pt;background:  #E9EDF4;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:25.4pt' | <p class=MsoNormal><span lang=DA>65min</span></p>
|-  style='height:25.4pt'
|  width=163 style='width:122.0pt;border:solid white 1.0pt;border-top:none;  background:#E9EDF4;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:25.4pt' | <p class=MsoNormal><span lang=DA>Pressure [mTorr] </span></p>
|  width=192 style='width:144.0pt;border-top:none;border-left:none;  border-bottom:solid white 1.0pt;border-right:solid white 1.0pt;background:  #E9EDF4;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:25.4pt' | <p class=MsoNormal><span lang=DA>2.5</span></p>
|  width=163 style='width:122.0pt;border-top:none;border-left:none;  border-bottom:solid white 1.0pt;border-right:solid white 1.0pt;background:  #E9EDF4;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:25.4pt' | <p class=MsoNormal><span lang=DA>2.5</span></p>
|-  style='height:25.4pt'
|  width=163 style='width:122.0pt;border:solid white 1.0pt;border-top:none;  background:#E9EDF4;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:25.4pt' | <p class=MsoNormal><span lang=DA>C4F8 flow [sccm] </span></p>
|  width=192 style='width:144.0pt;border-top:none;border-left:none;  border-bottom:solid white 1.0pt;border-right:solid white 1.0pt;background:  #E9EDF4;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:25.4pt' | <p class=MsoNormal><span lang=DA>8</span></p>
|  width=163 style='width:122.0pt;border-top:none;border-left:none;  border-bottom:solid white 1.0pt;border-right:solid white 1.0pt;background:  #E9EDF4;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:25.4pt' | <p class=MsoNormal><span lang=DA>8</span></p>
|-  style='height:25.4pt'
|  width=163 style='width:122.0pt;border:solid white 1.0pt;border-top:none;  background:#E9EDF4;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:25.4pt' | <p class=MsoNormal><span lang=DA>CF4 flow [sccm] </span></p>
|  width=192 style='width:144.0pt;border-top:none;border-left:none;  border-bottom:solid white 1.0pt;border-right:solid white 1.0pt;background:  #E9EDF4;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:25.4pt' | <p class=MsoNormal><span lang=DA>0</span></p>
|  width=163 style='width:122.0pt;border-top:none;border-left:none;  border-bottom:solid white 1.0pt;border-right:solid white 1.0pt;background:  #E9EDF4;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:25.4pt' | <p class=MsoNormal><span lang=DA>0</span></p>
|-  style='height:25.4pt'
|  width=163 style='width:122.0pt;border:solid white 1.0pt;border-top:none;  background:#E9EDF4;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:25.4pt' | <p class=MsoNormal><span lang=DA>H2 flow [sccm] </span></p>
|  width=192 style='width:144.0pt;border-top:none;border-left:none;  border-bottom:solid white 1.0pt;border-right:solid white 1.0pt;background:  #E9EDF4;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:25.4pt' | <p class=MsoNormal><span lang=DA>30</span></p>
|  width=163 style='width:122.0pt;border-top:none;border-left:none;  border-bottom:solid white 1.0pt;border-right:solid white 1.0pt;background:  #E9EDF4;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:25.4pt' | <p class=MsoNormal><span lang=DA>30</span></p>
|-  style='height:25.4pt'
|  width=163 style='width:122.0pt;border:solid white 1.0pt;border-top:none;  background:#E9EDF4;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:25.4pt' | <p class=MsoNormal><span lang=DA>CH4 flow [sccm] </span></p>
|  width=192 style='width:144.0pt;border-top:none;border-left:none;  border-bottom:solid white 1.0pt;border-right:solid white 1.0pt;background:  #E9EDF4;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:25.4pt' | <p class=MsoNormal><span lang=DA>0</span></p>
|  width=163 style='width:122.0pt;border-top:none;border-left:none;  border-bottom:solid white 1.0pt;border-right:solid white 1.0pt;background:  #E9EDF4;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:25.4pt' | <p class=MsoNormal><span lang=DA>0</span></p>
|-  style='height:25.4pt'
|  width=163 style='width:122.0pt;border:solid white 1.0pt;border-top:none;  background:#E9EDF4;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:25.4pt' | <p class=MsoNormal><span lang=DA>Coil Power [W] </span></p>
|  width=192 style='width:144.0pt;border-top:none;border-left:none;  border-bottom:solid white 1.0pt;border-right:solid white 1.0pt;background:  #E9EDF4;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:25.4pt' | <p class=MsoNormal><span lang=DA>800 reflect 8W</span></p>
|  width=163 style='width:122.0pt;border-top:none;border-left:none;  border-bottom:solid white 1.0pt;border-right:solid white 1.0pt;background:  #E9EDF4;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:25.4pt' | <p class=MsoNormal><span lang=DA>800 reflect 8W</span></p>
|-  style='height:25.4pt'
|  width=163 style='width:122.0pt;border:solid white 1.0pt;border-top:none;  background:#D0D8E8;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:25.4pt' | <p class=MsoNormal><span lang=DA>Platen Power [W] </span></p>
|  width=192 style='width:144.0pt;border-top:none;border-left:none;  border-bottom:solid white 1.0pt;border-right:solid white 1.0pt;background:  #D0D8E8;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:25.4pt' | <p class=MsoNormal><span lang=DA>150reflect 0.2w</span></p>
|  width=163 style='width:122.0pt;border-top:none;border-left:none;  border-bottom:solid white 1.0pt;border-right:solid white 1.0pt;background:  #D0D8E8;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:25.4pt' | <p class=MsoNormal><span lang=DA>150reflect 0.2w</span></p>
|-  style='height:28.9pt'
|  width=163 style='width:122.0pt;border:solid white 1.0pt;border-top:none;  background:#E9EDF4;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:28.9pt' | <p class=MsoNormal><span lang=DA>Platen temperature [<sup>o</sup>C] </span></p>
|  width=192 style='width:144.0pt;border-top:none;border-left:none;  border-bottom:solid white 1.0pt;border-right:solid white 1.0pt;background:  #E9EDF4;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:28.9pt' | <p class=MsoNormal><span lang=DA>20</span></p>
|  width=163 style='width:122.0pt;border-top:none;border-left:none;  border-bottom:solid white 1.0pt;border-right:solid white 1.0pt;background:  #E9EDF4;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:28.9pt' | <p class=MsoNormal><span lang=DA>20</span></p>
|-  style='height:25.4pt'
|  width=163 style='width:122.0pt;border:solid white 1.0pt;border-top:none;  background:#D0D8E8;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:25.4pt' | <p class=MsoNormal><span lang=DA>Coil match</span></p>
|  width=192 style='width:144.0pt;border-top:none;border-left:none;  border-bottom:solid white 1.0pt;border-right:solid white 1.0pt;background:  #D0D8E8;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:25.4pt' | <p class=MsoNormal><span lang=DA>68.87%,23.1%</span></p>
|  width=163 style='width:122.0pt;border-top:none;border-left:none;  border-bottom:solid white 1.0pt;border-right:solid white 1.0pt;background:  #D0D8E8;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:25.4pt' | <p class=MsoNormal><span lang=DA>68.87%,23.1%</span></p>
|-  style='height:25.4pt'
|  width=163 style='width:122.0pt;border:solid white 1.0pt;border-top:none;  background:#D0D8E8;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:25.4pt' | <p class=MsoNormal><span lang=DA>Platen Match</span></p>
|  width=192 style='width:144.0pt;border-top:none;border-left:none;  border-bottom:solid white 1.0pt;border-right:solid white 1.0pt;background:  #D0D8E8;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:25.4pt' | <p class=MsoNormal><span lang=DA>33.0%,54.4%</span></p>
|  width=163 style='width:122.0pt;border-top:none;border-left:none;  border-bottom:solid white 1.0pt;border-right:solid white 1.0pt;background:  #D0D8E8;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:25.4pt' | <p class=MsoNormal><span lang=DA>33.0%,54.4%</span></p>
|-  style='height:45.6pt'
|  width=163 style='width:122.0pt;border:solid white 1.0pt;border-top:none;  background:#E9EDF4;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:45.6pt' | <p class=MsoNormal><span lang=DA>Throde valve opening rate</span></p>
|  width=192 style='width:144.0pt;border-top:none;border-left:none;  border-bottom:solid white 1.0pt;border-right:solid white 1.0pt;background:  #E9EDF4;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:45.6pt' |
|  width=163 style='width:122.0pt;border-top:none;border-left:none;  border-bottom:solid white 1.0pt;border-right:solid white 1.0pt;background:  #E9EDF4;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:45.6pt' | <p class=MsoNormal>10.8% to 11.7%, pressure 2.11 to 2.40, not stable</p>
|-  style='height:25.4pt'
|  width=163 style='width:122.0pt;border:solid white 1.0pt;border-top:none;  background:#D0D8E8;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:25.4pt' | <p class=MsoNormal><span lang=DA>Comments </span></p>
|  width=192 style='width:144.0pt;border-top:none;border-left:none;  border-bottom:solid white 1.0pt;border-right:solid white 1.0pt;background:  #D0D8E8;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:25.4pt' |
|  width=163 style='width:122.0pt;border-top:none;border-left:none;  border-bottom:solid white 1.0pt;border-right:solid white 1.0pt;background:  #D0D8E8;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:25.4pt' | <p class=MsoNormal><span lang=DA>SiO2 width 230nm</span></p>
|}<p class=MsoNormal><span lang=DA>&nbsp;</span></p>
 
=With CF4 and H2 chemistry by ''Peixiong Shi, DTU Nanolab''=


==Part 1==
==Part 1==
Retrieved from "https://labadviser.nanolab.dtu.dk//index.php?title=Specific_Process_Knowledge/Etch/ICP_Metal_Etcher/silicon_oxide/By_Peixiong"