Specific Process Knowledge/Etch/ICP Metal Etcher/silicon oxide/By Peixiong/images CF4: Difference between revisions
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'''''All images on this page has been created by Peixiong Shi, DTU Nanolab''''' <br> | |||
==Images stepper_6A1_feb262013_step9== | ==Images stepper_6A1_feb262013_step9== | ||
<gallery caption="6A1_feb262013_step9" widths="200px" heights="150px" perrow="4"> | <gallery caption="6A1_feb262013_step9" widths="200px" heights="150px" perrow="4"> | ||
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</gallery> | </gallery> | ||
== | ==Images stepper_6A4_feb262013_step9== | ||
<gallery caption="6A4_feb262013_step9" widths="200px" heights="150px" perrow="14"> | |||
image:10mm from wf edge_087.jpg|wafer edge | |||
image:10mm from wf edge_088.jpg|wafer edge | |||
image:10mm from wf edge_089.jpg|wafer edge | |||
image:10mm from wf edge_090.jpg|wafer edge | |||
image:10mm from wf edge_091.jpg|Position of the scanning: wafer edge | |||
image:10mm from wf edge_092.jpg|wafer edge | |||
image:10mm from wf edge_093.jpg|wafer edge | |||
image:20mm from wafer edge_098.jpg | |||
image:20mm from wafer edge_099.jpg | |||
image:wf cent_094.jpg|wafer center | |||
image:wf cent_095.jpg|wafer center | |||
image:wf cent_096.jpg|wafer center | |||
image:wf cent_097.jpg|wafer center | |||
</gallery> | |||
==Images Stepper_6A5_feb272013== | |||
<gallery caption="6A5_feb262013 step9 and step10" widths="200px" heights="150px" perrow="11"> | |||
Image:15mm from wf edge_163.jpg|Wafer edge | |||
Image:15mm from wf edge_164.jpg|Wafer edge | |||
Image:15mm from wf edge_165.jpg|Wafer edge | |||
Image:15mm from wf edge_166.jpg|Wafer edge | |||
Image:15mm from wf edge_167.jpg|Wafer edge | |||
Image:15mm from wf edge_168.jpg|Wafer edge | |||
Image:wf center_158.jpg|Wafer center | |||
Image:wf center_159.jpg|Wafer center | |||
Image:wf center_160.jpg|Wafer center | |||
Image:wf center_161.jpg|Wafer center | |||
Image:wf center_162.jpg|Wafer center | |||
Image:wf center202.jpg|Top view | |||
Image:wf center203.jpg|Top view | |||
Image:wf center204.jpg|Top view | |||
Image:wf center205.jpg|Top view | |||
Image:wf center206.jpg|Top view | |||
Image:wf center207.jpg|Top view | |||
</gallery> | |||
== | ==images 3== | ||
<gallery caption="6A1_feb262013_step9" widths="200px" heights="150px" perrow="4"> | |||
</gallery> |
Latest revision as of 15:21, 22 March 2023
All images on this page has been created by Peixiong Shi, DTU Nanolab
Images stepper_6A1_feb262013_step9
Images stepper_6A4_feb262013_step9
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wafer edge
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wafer edge
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wafer edge
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wafer edge
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Position of the scanning: wafer edge
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wafer edge
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wafer edge
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wafer center
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wafer center
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wafer center
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wafer center
Images Stepper_6A5_feb272013
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Wafer edge
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Wafer edge
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Wafer edge
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Wafer edge
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Wafer edge
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Wafer edge
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Wafer center
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Wafer center
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Wafer center
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Wafer center
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Wafer center
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Top view
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Top view
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Top view
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Top view
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Top view
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Top view