Specific Process Knowledge/Etch/ICP Metal Etcher/silicon oxide/By Peixiong/images CF4: Difference between revisions

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'''''All images on this page has been created by Peixiong Shi, DTU Nanolab''''' <br>
==Images stepper_6A1_feb262013_step9==
==Images stepper_6A1_feb262013_step9==
<gallery caption="6A1_feb262013_step9" widths="200px" heights="150px" perrow="4">
<gallery caption="6A1_feb262013_step9" widths="200px" heights="150px" perrow="4">
Line 7: Line 8:
</gallery>
</gallery>


==images 1==
==Images stepper_6A4_feb262013_step9==
<gallery caption="6A4_feb262013_step9" widths="200px" heights="150px" perrow="14">
image:10mm from wf edge_087.jpg|wafer edge
image:10mm from wf edge_088.jpg|wafer edge
image:10mm from wf edge_089.jpg|wafer edge
image:10mm from wf edge_090.jpg|wafer edge
image:10mm from wf edge_091.jpg|Position of the scanning: wafer edge
image:10mm from wf edge_092.jpg|wafer edge
image:10mm from wf edge_093.jpg|wafer edge
image:20mm from wafer edge_098.jpg
image:20mm from wafer edge_099.jpg
image:wf cent_094.jpg|wafer center
image:wf cent_095.jpg|wafer center
image:wf cent_096.jpg|wafer center
image:wf cent_097.jpg|wafer center
</gallery>
 
==Images Stepper_6A5_feb272013==
<gallery caption="6A5_feb262013 step9 and step10" widths="200px" heights="150px" perrow="11">
 
Image:15mm from wf edge_163.jpg|Wafer edge
Image:15mm from wf edge_164.jpg|Wafer edge
Image:15mm from wf edge_165.jpg|Wafer edge
Image:15mm from wf edge_166.jpg|Wafer edge
Image:15mm from wf edge_167.jpg|Wafer edge
Image:15mm from wf edge_168.jpg|Wafer edge
Image:wf center_158.jpg|Wafer center
Image:wf center_159.jpg|Wafer center
Image:wf center_160.jpg|Wafer center
Image:wf center_161.jpg|Wafer center
Image:wf center_162.jpg|Wafer center
Image:wf center202.jpg|Top view
Image:wf center203.jpg|Top view
Image:wf center204.jpg|Top view
Image:wf center205.jpg|Top view
Image:wf center206.jpg|Top view
Image:wf center207.jpg|Top view


==Images 2==
</gallery>


==iamges 3==
==images 3==
<gallery caption="6A1_feb262013_step9" widths="200px" heights="150px" perrow="4">
 
</gallery>

Latest revision as of 15:21, 22 March 2023

All images on this page has been created by Peixiong Shi, DTU Nanolab

Images stepper_6A1_feb262013_step9

  • 6A1_feb262013_step9

Images stepper_6A4_feb262013_step9

  • 6A4_feb262013_step9
  • wafer edge
    wafer edge
  • wafer edge
    wafer edge
  • wafer edge
    wafer edge
  • wafer edge
    wafer edge
  • Position of the scanning: wafer edge
    Position of the scanning: wafer edge
  • wafer edge
    wafer edge
  • wafer edge
    wafer edge
  • wafer center
    wafer center
  • wafer center
    wafer center
  • wafer center
    wafer center
  • wafer center
    wafer center

Images Stepper_6A5_feb272013

  • 6A5_feb262013 step9 and step10
  • Wafer edge
    Wafer edge
  • Wafer edge
    Wafer edge
  • Wafer edge
    Wafer edge
  • Wafer edge
    Wafer edge
  • Wafer edge
    Wafer edge
  • Wafer edge
    Wafer edge
  • Wafer center
    Wafer center
  • Wafer center
    Wafer center
  • Wafer center
    Wafer center
  • Wafer center
    Wafer center
  • Wafer center
    Wafer center
  • Top view
    Top view
  • Top view
    Top view
  • Top view
    Top view
  • Top view
    Top view
  • Top view
    Top view
  • Top view
    Top view

images 3

  • 6A1_feb262013_step9
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