Specific Process Knowledge/Etch/ICP Metal Etcher/silicon oxide/By Peixiong: Difference between revisions
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<br> {{CC-bghe1}} <br> | |||
=With C4F8 and H2 chemistry (all tests done by Peixiong Shi, DTU Nanolab)= | |||
==Part 1== | |||
{| class=MsoNormalTable border=0 cellspacing=0 cellpadding=0 width=855 style='width:641.0pt;border-collapse:collapse' style='height:36.0pt' | |||
| width=83 valign=top style='width:62.0pt;border:solid white 1.0pt; border-bottom:solid white 3.0pt;background:#4F81BD;padding:3.6pt 7.2pt 3.6pt 7.2pt; height:36.0pt' | | |||
| width=68 valign=top style='width:51.0pt;border-top:solid white 1.0pt; border-left:none;border-bottom:solid white 3.0pt;border-right:solid white 1.0pt; background:#4F81BD;padding:3.6pt 7.2pt 3.6pt 7.2pt;height:36.0pt' | | |||
| width=81 valign=top style='width:61.0pt;border-top:solid white 1.0pt; border-left:none;border-bottom:solid white 3.0pt;border-right:solid white 1.0pt; background:#4F81BD;padding:3.6pt 7.2pt 3.6pt 7.2pt;height:36.0pt' | <p class=MsoNormal><span lang=DA>Very good</span></p> | |||
| width=72 valign=top style='width:54.0pt;border-top:solid white 1.0pt; border-left:none;border-bottom:solid white 3.0pt;border-right:solid white 1.0pt; background:#4F81BD;padding:3.6pt 7.2pt 3.6pt 7.2pt;height:36.0pt' | <p class=MsoNormal><span lang=DA>Very good</span></p> | |||
| width=79 valign=top style='width:59.0pt;border-top:solid white 1.0pt; border-left:none;border-bottom:solid white 3.0pt;border-right:solid white 1.0pt; background:#4F81BD;padding:3.6pt 7.2pt 3.6pt 7.2pt;height:36.0pt' | <p class=MsoNormal><span lang=DA>Very good</span></p> | |||
| width=79 valign=top style='width:59.0pt;border-top:solid white 1.0pt; border-left:none;border-bottom:solid white 3.0pt;border-right:solid white 1.0pt; background:#4F81BD;padding:3.6pt 7.2pt 3.6pt 7.2pt;height:36.0pt' | <p class=MsoNormal><span lang=DA>Very good</span></p> | |||
| width=79 valign=top style='width:59.0pt;border-top:solid white 1.0pt; border-left:none;border-bottom:solid white 3.0pt;border-right:solid white 1.0pt; background:#4F81BD;padding:3.6pt 7.2pt 3.6pt 7.2pt;height:36.0pt' | <p class=MsoNormal><span lang=DA>Very good</span></p> | |||
| width=79 valign=top style='width:59.0pt;border-top:solid white 1.0pt; border-left:none;border-bottom:solid white 3.0pt;border-right:solid white 1.0pt; background:#4F81BD;padding:3.6pt 7.2pt 3.6pt 7.2pt;height:36.0pt' | <p class=MsoNormal><span lang=DA>Very good</span></p> | |||
| width=79 valign=top style='width:59.0pt;border-top:solid white 1.0pt; border-left:none;border-bottom:solid white 3.0pt;border-right:solid white 1.0pt; background:#4F81BD;padding:3.6pt 7.2pt 3.6pt 7.2pt;height:36.0pt' | <p class=MsoNormal><span lang=DA>Unstable plasma at 2mtorr</span></p> | |||
| width=79 valign=top style='width:59.0pt;border-top:solid white 1.0pt; border-left:none;border-bottom:solid white 3.0pt;border-right:solid white 1.0pt; background:#4F81BD;padding:3.6pt 7.2pt 3.6pt 7.2pt;height:36.0pt' | <p class=MsoNormal><span lang=DA>stable plasma at 2.5mtorr</span></p> | |||
| width=79 valign=top style='width:59.0pt;border-top:solid white 1.0pt; border-left:none;border-bottom:solid white 3.0pt;border-right:solid white 1.0pt; background:#4F81BD;padding:3.6pt 7.2pt 3.6pt 7.2pt;height:36.0pt' | <p class=MsoNormal><span lang=DA>stable plasma at 2.5mtorr</span></p> | |||
|- style='height:36.0pt' | |||
| width=83 valign=top style='width:62.0pt;border-top:none;border-left:solid white 1.0pt; border-bottom:solid white 3.0pt;border-right:solid white 1.0pt;background: #4F81BD;padding:3.6pt 7.2pt 3.6pt 7.2pt;height:36.0pt' | <p class=MsoNormal>ICP metal etch SiO2 by reist mask try</p> | |||
| width=68 valign=top style='width:51.0pt;border-top:none;border-left:none; border-bottom:solid white 3.0pt;border-right:solid white 1.0pt;background: #4F81BD;padding:3.6pt 7.2pt 3.6pt 7.2pt;height:36.0pt' | <p class=MsoNormal><span lang=DA>Date</span></p> | |||
| width=81 valign=top style='width:61.0pt;border-top:none;border-left:none; border-bottom:solid white 3.0pt;border-right:solid white 1.0pt;background: #4F81BD;padding:3.6pt 7.2pt 3.6pt 7.2pt;height:36.0pt' | <p class=MsoNormal><span lang=DA>Feb262013</span></p> | |||
| width=72 valign=top style='width:54.0pt;border-top:none;border-left:none; border-bottom:solid white 3.0pt;border-right:solid white 1.0pt;background: #4F81BD;padding:3.6pt 7.2pt 3.6pt 7.2pt;height:36.0pt' | <p class=MsoNormal><span lang=DA>Feb272013</span></p> | |||
| width=79 valign=top style='width:59.0pt;border-top:none;border-left:none; border-bottom:solid white 3.0pt;border-right:solid white 1.0pt;background: #4F81BD;padding:3.6pt 7.2pt 3.6pt 7.2pt;height:36.0pt' | <p class=MsoNormal><span lang=DA>Feb272013 20:00</span></p> | |||
| width=79 valign=top style='width:59.0pt;border-top:none;border-left:none; border-bottom:solid white 3.0pt;border-right:solid white 1.0pt;background: #4F81BD;padding:3.6pt 7.2pt 3.6pt 7.2pt;height:36.0pt' | <p class=MsoNormal><span lang=DA>Feb272013 23:00</span></p> | |||
| width=79 valign=top style='width:59.0pt;border-top:none;border-left:none; border-bottom:solid white 3.0pt;border-right:solid white 1.0pt;background: #4F81BD;padding:3.6pt 7.2pt 3.6pt 7.2pt;height:36.0pt' | <p class=MsoNormal><span lang=DA>Feb282013 1am</span></p> | |||
| width=79 valign=top style='width:59.0pt;border-top:none;border-left:none; border-bottom:solid white 3.0pt;border-right:solid white 1.0pt;background: #4F81BD;padding:3.6pt 7.2pt 3.6pt 7.2pt;height:36.0pt' | <p class=MsoNormal><span lang=DA>Feb282013 2am</span></p> | |||
| width=79 valign=top style='width:59.0pt;border-top:none;border-left:none; border-bottom:solid white 3.0pt;border-right:solid white 1.0pt;background: #4F81BD;padding:3.6pt 7.2pt 3.6pt 7.2pt;height:36.0pt' | <p class=MsoNormal><span lang=DA>Feb282013 2am</span></p> | |||
| width=79 valign=top style='width:59.0pt;border-top:none;border-left:none; border-bottom:solid white 3.0pt;border-right:solid white 1.0pt;background: #4F81BD;padding:3.6pt 7.2pt 3.6pt 7.2pt;height:36.0pt' | <p class=MsoNormal><span lang=DA>Feb282013 2am</span></p> | |||
| width=79 valign=top style='width:59.0pt;border-top:none;border-left:none; border-bottom:solid white 3.0pt;border-right:solid white 1.0pt;background: #4F81BD;padding:3.6pt 7.2pt 3.6pt 7.2pt;height:36.0pt' | <p class=MsoNormal><span lang=DA>Feb2820134am</span></p> | |||
|- style='height:30.15pt' | |||
| width=83 valign=top style='width:62.0pt;border-top:none;border-left:solid white 1.0pt; border-bottom:solid white 3.0pt;border-right:solid white 1.0pt;background: #4F81BD;padding:3.6pt 7.2pt 3.6pt 7.2pt;height:30.15pt' | | |||
| width=68 valign=top style='width:51.0pt;border-top:none;border-left:none; border-bottom:solid white 3.0pt;border-right:solid white 1.0pt;background: #4F81BD;padding:3.6pt 7.2pt 3.6pt 7.2pt;height:30.15pt' | <p class=MsoNormal><span lang=DA>Metal ICP recipe</span></p> | |||
| width=81 valign=top style='width:61.0pt;border-top:none;border-left:none; border-bottom:solid white 3.0pt;border-right:solid white 1.0pt;background: #4F81BD;padding:3.6pt 7.2pt 3.6pt 7.2pt;height:30.15pt' | <p class=MsoNormal><span lang=DA>pxSiO2try5</span></p> | |||
| width=72 valign=top style='width:54.0pt;border-top:none;border-left:none; border-bottom:solid white 3.0pt;border-right:solid white 1.0pt;background: #4F81BD;padding:3.6pt 7.2pt 3.6pt 7.2pt;height:30.15pt' | <p class=MsoNormal><span lang=DA>pxSiO2try6</span></p> | |||
| width=79 valign=top style='width:59.0pt;border-top:none;border-left:none; border-bottom:solid white 3.0pt;border-right:solid white 1.0pt;background: #4F81BD;padding:3.6pt 7.2pt 3.6pt 7.2pt;height:30.15pt' | <p class=MsoNormal><span lang=DA>pxSiO2try7</span></p> | |||
| width=79 valign=top style='width:59.0pt;border-top:none;border-left:none; border-bottom:solid white 3.0pt;border-right:solid white 1.0pt;background: #4F81BD;padding:3.6pt 7.2pt 3.6pt 7.2pt;height:30.15pt' | <p class=MsoNormal><span lang=DA>pxSiO2try8</span></p> | |||
| width=79 valign=top style='width:59.0pt;border-top:none;border-left:none; border-bottom:solid white 3.0pt;border-right:solid white 1.0pt;background: #4F81BD;padding:3.6pt 7.2pt 3.6pt 7.2pt;height:30.15pt' | <p class=MsoNormal><span lang=DA>pxSiO2try8</span></p> | |||
| width=79 valign=top style='width:59.0pt;border-top:none;border-left:none; border-bottom:solid white 3.0pt;border-right:solid white 1.0pt;background: #4F81BD;padding:3.6pt 7.2pt 3.6pt 7.2pt;height:30.15pt' | <p class=MsoNormal><span lang=DA>pxSiO2try8</span></p> | |||
| width=79 valign=top style='width:59.0pt;border-top:none;border-left:none; border-bottom:solid white 3.0pt;border-right:solid white 1.0pt;background: #4F81BD;padding:3.6pt 7.2pt 3.6pt 7.2pt;height:30.15pt' | <p class=MsoNormal><span lang=DA>pxSiO2try9</span></p> | |||
| width=79 valign=top style='width:59.0pt;border-top:none;border-left:none; border-bottom:solid white 3.0pt;border-right:solid white 1.0pt;background: #4F81BD;padding:3.6pt 7.2pt 3.6pt 7.2pt;height:30.15pt' | <p class=MsoNormal><span lang=DA>pxSiO2try9</span></p> | |||
| width=79 valign=top style='width:59.0pt;border-top:none;border-left:none; border-bottom:solid white 3.0pt;border-right:solid white 1.0pt;background: #4F81BD;padding:3.6pt 7.2pt 3.6pt 7.2pt;height:30.15pt' | <p class=MsoNormal><span lang=DA>pxSiO2try9</span></p> | |||
|- style='height:33.3pt' | |||
| width=83 style='width:62.0pt;border-top:none;border-left:solid white 1.0pt; border-bottom:solid white 3.0pt;border-right:solid white 1.0pt;background: #D0D8E8;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:33.3pt' | | |||
| width=68 style='width:51.0pt;border-top:none;border-left:none;border-bottom: solid white 3.0pt;border-right:solid white 1.0pt;background:#D0D8E8; padding:2.25pt 2.25pt 2.25pt 2.25pt;height:33.3pt' | <p class=MsoNormal><span lang=DA>Wafer size and ID</span></p> | |||
| width=81 style='width:61.0pt;border-top:none;border-left:none;border-bottom: solid white 3.0pt;border-right:solid white 1.0pt;background:#D0D8E8; padding:2.25pt 2.25pt 2.25pt 2.25pt;height:33.3pt' | <p class=MsoNormal><span lang=DA>6inch,</span></p><p class=MsoNormal><span lang=DA>6A1_feb252013</span></p> | |||
| width=72 style='width:54.0pt;border-top:none;border-left:none;border-bottom: solid white 3.0pt;border-right:solid white 1.0pt;background:#D0D8E8; padding:2.25pt 2.25pt 2.25pt 2.25pt;height:33.3pt' | <p class=MsoNormal><span lang=DA>6inch,</span></p><p class=MsoNormal><span lang=DA>6A4_feb262013</span></p> | |||
| width=79 style='width:59.0pt;border-top:none;border-left:none;border-bottom: solid white 3.0pt;border-right:solid white 1.0pt;background:#D0D8E8; padding:2.25pt 2.25pt 2.25pt 2.25pt;height:33.3pt' | <p class=MsoNormal><span lang=DA>6inch,</span></p><p class=MsoNormal><span lang=DA>6A6_feb262013</span></p> | |||
| width=79 style='width:59.0pt;border-top:none;border-left:none;border-bottom: solid white 3.0pt;border-right:solid white 1.0pt;background:#D0D8E8; padding:2.25pt 2.25pt 2.25pt 2.25pt;height:33.3pt' | <p class=MsoNormal><span lang=DA>6inch,</span></p><p class=MsoNormal><span lang=DA>6A2_feb272013</span></p> | |||
| width=79 style='width:59.0pt;border-top:none;border-left:none;border-bottom: solid white 3.0pt;border-right:solid white 1.0pt;background:#D0D8E8; padding:2.25pt 2.25pt 2.25pt 2.25pt;height:33.3pt' | <p class=MsoNormal><span lang=DA>6inch,</span></p><p class=MsoNormal><span lang=DA>6A3_feb272013</span></p> | |||
| width=79 style='width:59.0pt;border-top:none;border-left:none;border-bottom: solid white 3.0pt;border-right:solid white 1.0pt;background:#D0D8E8; padding:2.25pt 2.25pt 2.25pt 2.25pt;height:33.3pt' | <p class=MsoNormal><span lang=DA>6inch,</span></p><p class=MsoNormal><span lang=DA>6A4_feb272013</span></p> | |||
| width=79 style='width:59.0pt;border-top:none;border-left:none;border-bottom: solid white 3.0pt;border-right:solid white 1.0pt;background:#D0D8E8; padding:2.25pt 2.25pt 2.25pt 2.25pt;height:33.3pt' | <p class=MsoNormal><span lang=DA>6inch,</span></p><p class=MsoNormal><span lang=DA>6A5_feb272013</span></p> | |||
| width=79 style='width:59.0pt;border-top:none;border-left:none;border-bottom: solid white 3.0pt;border-right:solid white 1.0pt;background:#D0D8E8; padding:2.25pt 2.25pt 2.25pt 2.25pt;height:33.3pt' | <p class=MsoNormal><span lang=DA>6inch,</span></p><p class=MsoNormal><span lang=DA>6A5_feb272013</span></p> | |||
| width=79 style='width:59.0pt;border-top:none;border-left:none;border-bottom: solid white 3.0pt;border-right:solid white 1.0pt;background:#D0D8E8; padding:2.25pt 2.25pt 2.25pt 2.25pt;height:33.3pt' | <p class=MsoNormal><span lang=DA>6inch,</span></p><p class=MsoNormal><span lang=DA>6A6_feb272013</span></p> | |||
|- style='height:71.7pt' | |||
| width=83 style='width:62.0pt;border:solid white 1.0pt;border-top:none; background:#D0D8E8;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:71.7pt' | | |||
| width=68 style='width:51.0pt;border-top:none;border-left:none;border-bottom: solid white 1.0pt;border-right:solid white 1.0pt;background:#D0D8E8; padding:2.25pt 2.25pt 2.25pt 2.25pt;height:71.7pt' | <p class=MsoNormal><span lang=DA>Mask</span></p> | |||
| width=81 style='width:61.0pt;border-top:none;border-left:none;border-bottom: solid white 1.0pt;border-right:solid white 1.0pt;background:#D0D8E8; padding:2.25pt 2.25pt 2.25pt 2.25pt;height:71.7pt' | <p class=MsoNormal>440nm resist on 62nmBarc on 1800nm apox, first etch barc | |||
20sec by Ox plasma</p> | |||
| width=72 style='width:54.0pt;border-top:none;border-left:none;border-bottom: solid white 1.0pt;border-right:solid white 1.0pt;background:#D0D8E8; padding:2.25pt 2.25pt 2.25pt 2.25pt;height:71.7pt' | <p class=MsoNormal>440nm resist on 62nmBarc on 1800nm apox, first etch barc | |||
20sec by Ox plasma</p> | |||
| width=79 style='width:59.0pt;border-top:none;border-left:none;border-bottom: solid white 1.0pt;border-right:solid white 1.0pt;background:#D0D8E8; padding:2.25pt 2.25pt 2.25pt 2.25pt;height:71.7pt' | <p class=MsoNormal>780nm resist on 62nmBarc on 1800nm apox, first etch barc | |||
20sec by Ox plasma</p> | |||
| width=79 style='width:59.0pt;border-top:none;border-left:none;border-bottom: solid white 1.0pt;border-right:solid white 1.0pt;background:#D0D8E8; padding:2.25pt 2.25pt 2.25pt 2.25pt;height:71.7pt' | <p class=MsoNormal>780nm resist on 62nmBarc on 800nm apox, first etch barc | |||
20sec by Ox plasma</p> | |||
| width=79 style='width:59.0pt;border-top:none;border-left:none;border-bottom: solid white 1.0pt;border-right:solid white 1.0pt;background:#D0D8E8; padding:2.25pt 2.25pt 2.25pt 2.25pt;height:71.7pt' | <p class=MsoNormal>780nm resist on 62nmBarc on 490nm apox, first etch barc | |||
20sec by Ox plasma</p> | |||
| width=79 style='width:59.0pt;border-top:none;border-left:none;border-bottom: solid white 1.0pt;border-right:solid white 1.0pt;background:#D0D8E8; padding:2.25pt 2.25pt 2.25pt 2.25pt;height:71.7pt' | <p class=MsoNormal><span lang=DA>Blank Si</span></p> | |||
| width=79 style='width:59.0pt;border-top:none;border-left:none;border-bottom: solid white 1.0pt;border-right:solid white 1.0pt;background:#D0D8E8; padding:2.25pt 2.25pt 2.25pt 2.25pt;height:71.7pt' | <p class=MsoNormal>780nm resist on 62nmBarc on 490nm apox, first etch barc | |||
20sec by Ox plasma</p> | |||
| width=79 style='width:59.0pt;border-top:none;border-left:none;border-bottom: solid white 1.0pt;border-right:solid white 1.0pt;background:#D0D8E8; padding:2.25pt 2.25pt 2.25pt 2.25pt;height:71.7pt' | <p class=MsoNormal>780nm resist on 62nmBarc on 490nm apox, first etch barc | |||
20sec by Ox plasma</p> | |||
| width=79 style='width:59.0pt;border-top:none;border-left:none;border-bottom: solid white 1.0pt;border-right:solid white 1.0pt;background:#D0D8E8; padding:2.25pt 2.25pt 2.25pt 2.25pt;height:71.7pt' | <p class=MsoNormal>780nm resist on 62nmBarc on 490nm apox, first etch barc | |||
20sec by Ox plasma</p> | |||
|- style='height:29.25pt' | |||
| width=83 style='width:62.0pt;border:solid white 1.0pt;border-top:none; background:#E9EDF4;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | | |||
| width=68 style='width:51.0pt;border-top:none;border-left:none;border-bottom: solid white 1.0pt;border-right:solid white 1.0pt;background:#E9EDF4; padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>Etch time</span></p> | |||
| width=81 style='width:61.0pt;border-top:none;border-left:none;border-bottom: solid white 1.0pt;border-right:solid white 1.0pt;background:#E9EDF4; padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>2min</span></p> | |||
| width=72 style='width:54.0pt;border-top:none;border-left:none;border-bottom: solid white 1.0pt;border-right:solid white 1.0pt;background:#E9EDF4; padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>4min</span></p> | |||
| width=79 style='width:59.0pt;border-top:none;border-left:none;border-bottom: solid white 1.0pt;border-right:solid white 1.0pt;background:#E9EDF4; padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>4min</span></p> | |||
| width=79 style='width:59.0pt;border-top:none;border-left:none;border-bottom: solid white 1.0pt;border-right:solid white 1.0pt;background:#E9EDF4; padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>4min</span></p> | |||
| width=79 style='width:59.0pt;border-top:none;border-left:none;border-bottom: solid white 1.0pt;border-right:solid white 1.0pt;background:#E9EDF4; padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>5min</span></p> | |||
| width=79 style='width:59.0pt;border-top:none;border-left:none;border-bottom: solid white 1.0pt;border-right:solid white 1.0pt;background:#E9EDF4; padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>4min</span></p> | |||
| width=79 style='width:59.0pt;border-top:none;border-left:none;border-bottom: solid white 1.0pt;border-right:solid white 1.0pt;background:#E9EDF4; padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>1min</span></p> | |||
| width=79 style='width:59.0pt;border-top:none;border-left:none;border-bottom: solid white 1.0pt;border-right:solid white 1.0pt;background:#E9EDF4; padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>4min</span></p> | |||
| width=79 style='width:59.0pt;border-top:none;border-left:none;border-bottom: solid white 1.0pt;border-right:solid white 1.0pt;background:#E9EDF4; padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>5min</span></p> | |||
|- style='height:29.25pt' | |||
| width=83 style='width:62.0pt;border:solid white 1.0pt;border-top:none; background:#E9EDF4;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | | |||
| width=68 style='width:51.0pt;border-top:none;border-left:none;border-bottom: solid white 1.0pt;border-right:solid white 1.0pt;background:#E9EDF4; padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>Pressure [mTorr] </span></p> | |||
| width=81 style='width:61.0pt;border-top:none;border-left:none;border-bottom: solid white 1.0pt;border-right:solid white 1.0pt;background:#E9EDF4; padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>6</span></p> | |||
| width=72 style='width:54.0pt;border-top:none;border-left:none;border-bottom: solid white 1.0pt;border-right:solid white 1.0pt;background:#E9EDF4; padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>6</span></p> | |||
| width=79 style='width:59.0pt;border-top:none;border-left:none;border-bottom: solid white 1.0pt;border-right:solid white 1.0pt;background:#E9EDF4; padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>4</span></p> | |||
| width=79 style='width:59.0pt;border-top:none;border-left:none;border-bottom: solid white 1.0pt;border-right:solid white 1.0pt;background:#E9EDF4; padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>3</span></p> | |||
| width=79 style='width:59.0pt;border-top:none;border-left:none;border-bottom: solid white 1.0pt;border-right:solid white 1.0pt;background:#E9EDF4; padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>3</span></p> | |||
| width=79 style='width:59.0pt;border-top:none;border-left:none;border-bottom: solid white 1.0pt;border-right:solid white 1.0pt;background:#E9EDF4; padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>2</span></p> | |||
| width=79 style='width:59.0pt;border-top:none;border-left:none;border-bottom: solid white 1.0pt;border-right:solid white 1.0pt;background:#E9EDF4; padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>2</span></p> | |||
| width=79 style='width:59.0pt;border-top:none;border-left:none;border-bottom: solid white 1.0pt;border-right:solid white 1.0pt;background:#E9EDF4; padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>2.5</span></p> | |||
| width=79 style='width:59.0pt;border-top:none;border-left:none;border-bottom: solid white 1.0pt;border-right:solid white 1.0pt;background:#E9EDF4; padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>2.5</span></p> | |||
|- style='height:29.25pt' | |||
| width=83 style='width:62.0pt;border:solid white 1.0pt;border-top:none; background:#E9EDF4;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | | |||
| width=68 style='width:51.0pt;border-top:none;border-left:none;border-bottom: solid white 1.0pt;border-right:solid white 1.0pt;background:#E9EDF4; padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>C4F8 flow [sccm] </span></p> | |||
| width=81 style='width:61.0pt;border-top:none;border-left:none;border-bottom: solid white 1.0pt;border-right:solid white 1.0pt;background:#E9EDF4; padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>0</span></p> | |||
| width=72 style='width:54.0pt;border-top:none;border-left:none;border-bottom: solid white 1.0pt;border-right:solid white 1.0pt;background:#E9EDF4; padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>20</span></p> | |||
| width=79 style='width:59.0pt;border-top:none;border-left:none;border-bottom: solid white 1.0pt;border-right:solid white 1.0pt;background:#E9EDF4; padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>10</span></p> | |||
| width=79 style='width:59.0pt;border-top:none;border-left:none;border-bottom: solid white 1.0pt;border-right:solid white 1.0pt;background:#E9EDF4; padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>8</span></p> | |||
| width=79 style='width:59.0pt;border-top:none;border-left:none;border-bottom: solid white 1.0pt;border-right:solid white 1.0pt;background:#E9EDF4; padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>8</span></p> | |||
| width=79 style='width:59.0pt;border-top:none;border-left:none;border-bottom: solid white 1.0pt;border-right:solid white 1.0pt;background:#E9EDF4; padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>8</span></p> | |||
| width=79 style='width:59.0pt;border-top:none;border-left:none;border-bottom: solid white 1.0pt;border-right:solid white 1.0pt;background:#E9EDF4; padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>8</span></p> | |||
| width=79 style='width:59.0pt;border-top:none;border-left:none;border-bottom: solid white 1.0pt;border-right:solid white 1.0pt;background:#E9EDF4; padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>8</span></p> | |||
| width=79 style='width:59.0pt;border-top:none;border-left:none;border-bottom: solid white 1.0pt;border-right:solid white 1.0pt;background:#E9EDF4; padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>8</span></p> | |||
|- style='height:29.25pt' | |||
| width=83 style='width:62.0pt;border:solid white 1.0pt;border-top:none; background:#E9EDF4;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | | |||
| width=68 style='width:51.0pt;border-top:none;border-left:none;border-bottom: solid white 1.0pt;border-right:solid white 1.0pt;background:#E9EDF4; padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>CF4 flow [sccm] </span></p> | |||
| width=81 style='width:61.0pt;border-top:none;border-left:none;border-bottom: solid white 1.0pt;border-right:solid white 1.0pt;background:#E9EDF4; padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>40</span></p> | |||
| width=72 style='width:54.0pt;border-top:none;border-left:none;border-bottom: solid white 1.0pt;border-right:solid white 1.0pt;background:#E9EDF4; padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>0</span></p> | |||
| width=79 style='width:59.0pt;border-top:none;border-left:none;border-bottom: solid white 1.0pt;border-right:solid white 1.0pt;background:#E9EDF4; padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>0</span></p> | |||
| width=79 style='width:59.0pt;border-top:none;border-left:none;border-bottom: solid white 1.0pt;border-right:solid white 1.0pt;background:#E9EDF4; padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>0</span></p> | |||
| width=79 style='width:59.0pt;border-top:none;border-left:none;border-bottom: solid white 1.0pt;border-right:solid white 1.0pt;background:#E9EDF4; padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>0</span></p> | |||
| width=79 style='width:59.0pt;border-top:none;border-left:none;border-bottom: solid white 1.0pt;border-right:solid white 1.0pt;background:#E9EDF4; padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>0</span></p> | |||
| width=79 style='width:59.0pt;border-top:none;border-left:none;border-bottom: solid white 1.0pt;border-right:solid white 1.0pt;background:#E9EDF4; padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>0</span></p> | |||
| width=79 style='width:59.0pt;border-top:none;border-left:none;border-bottom: solid white 1.0pt;border-right:solid white 1.0pt;background:#E9EDF4; padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>0</span></p> | |||
| width=79 style='width:59.0pt;border-top:none;border-left:none;border-bottom: solid white 1.0pt;border-right:solid white 1.0pt;background:#E9EDF4; padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>0</span></p> | |||
|- style='height:29.25pt' | |||
| width=83 style='width:62.0pt;border:solid white 1.0pt;border-top:none; background:#E9EDF4;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | | |||
| width=68 style='width:51.0pt;border-top:none;border-left:none;border-bottom: solid white 1.0pt;border-right:solid white 1.0pt;background:#E9EDF4; padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>H2 flow [sccm] </span></p> | |||
| width=81 style='width:61.0pt;border-top:none;border-left:none;border-bottom: solid white 1.0pt;border-right:solid white 1.0pt;background:#E9EDF4; padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>30</span></p> | |||
| width=72 style='width:54.0pt;border-top:none;border-left:none;border-bottom: solid white 1.0pt;border-right:solid white 1.0pt;background:#E9EDF4; padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>20</span></p> | |||
| width=79 style='width:59.0pt;border-top:none;border-left:none;border-bottom: solid white 1.0pt;border-right:solid white 1.0pt;background:#E9EDF4; padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>30</span></p> | |||
| width=79 style='width:59.0pt;border-top:none;border-left:none;border-bottom: solid white 1.0pt;border-right:solid white 1.0pt;background:#E9EDF4; padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>30</span></p> | |||
| width=79 style='width:59.0pt;border-top:none;border-left:none;border-bottom: solid white 1.0pt;border-right:solid white 1.0pt;background:#E9EDF4; padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>30</span></p> | |||
| width=79 style='width:59.0pt;border-top:none;border-left:none;border-bottom: solid white 1.0pt;border-right:solid white 1.0pt;background:#E9EDF4; padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>30</span></p> | |||
| width=79 style='width:59.0pt;border-top:none;border-left:none;border-bottom: solid white 1.0pt;border-right:solid white 1.0pt;background:#E9EDF4; padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>30</span></p> | |||
| width=79 style='width:59.0pt;border-top:none;border-left:none;border-bottom: solid white 1.0pt;border-right:solid white 1.0pt;background:#E9EDF4; padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>30</span></p> | |||
| width=79 style='width:59.0pt;border-top:none;border-left:none;border-bottom: solid white 1.0pt;border-right:solid white 1.0pt;background:#E9EDF4; padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>30</span></p> | |||
|- style='height:29.25pt' | |||
| width=83 style='width:62.0pt;border:solid white 1.0pt;border-top:none; background:#E9EDF4;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | | |||
| width=68 style='width:51.0pt;border-top:none;border-left:none;border-bottom: solid white 1.0pt;border-right:solid white 1.0pt;background:#E9EDF4; padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>CH4 flow [sccm] </span></p> | |||
| width=81 style='width:61.0pt;border-top:none;border-left:none;border-bottom: solid white 1.0pt;border-right:solid white 1.0pt;background:#E9EDF4; padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>0</span></p> | |||
| width=72 style='width:54.0pt;border-top:none;border-left:none;border-bottom: solid white 1.0pt;border-right:solid white 1.0pt;background:#E9EDF4; padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>Set 20 real 3.7</span></p> | |||
| width=79 style='width:59.0pt;border-top:none;border-left:none;border-bottom: solid white 1.0pt;border-right:solid white 1.0pt;background:#E9EDF4; padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>Set 20 real 3.7</span></p> | |||
| width=79 style='width:59.0pt;border-top:none;border-left:none;border-bottom: solid white 1.0pt;border-right:solid white 1.0pt;background:#E9EDF4; padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>0</span></p> | |||
| width=79 style='width:59.0pt;border-top:none;border-left:none;border-bottom: solid white 1.0pt;border-right:solid white 1.0pt;background:#E9EDF4; padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>0</span></p> | |||
| width=79 style='width:59.0pt;border-top:none;border-left:none;border-bottom: solid white 1.0pt;border-right:solid white 1.0pt;background:#E9EDF4; padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>0</span></p> | |||
| width=79 style='width:59.0pt;border-top:none;border-left:none;border-bottom: solid white 1.0pt;border-right:solid white 1.0pt;background:#E9EDF4; padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>0</span></p> | |||
| width=79 style='width:59.0pt;border-top:none;border-left:none;border-bottom: solid white 1.0pt;border-right:solid white 1.0pt;background:#E9EDF4; padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>0</span></p> | |||
| width=79 style='width:59.0pt;border-top:none;border-left:none;border-bottom: solid white 1.0pt;border-right:solid white 1.0pt;background:#E9EDF4; padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>0</span></p> | |||
|- style='height:29.25pt' | |||
| width=83 style='width:62.0pt;border:solid white 1.0pt;border-top:none; background:#E9EDF4;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | | |||
| width=68 style='width:51.0pt;border-top:none;border-left:none;border-bottom: solid white 1.0pt;border-right:solid white 1.0pt;background:#E9EDF4; padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>Coil Power [W] </span></p> | |||
| width=81 style='width:61.0pt;border-top:none;border-left:none;border-bottom: solid white 1.0pt;border-right:solid white 1.0pt;background:#E9EDF4; padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>800</span></p> | |||
| width=72 style='width:54.0pt;border-top:none;border-left:none;border-bottom: solid white 1.0pt;border-right:solid white 1.0pt;background:#E9EDF4; padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>800</span></p> | |||
| width=79 style='width:59.0pt;border-top:none;border-left:none;border-bottom: solid white 1.0pt;border-right:solid white 1.0pt;background:#E9EDF4; padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>800</span></p> | |||
| width=79 style='width:59.0pt;border-top:none;border-left:none;border-bottom: solid white 1.0pt;border-right:solid white 1.0pt;background:#E9EDF4; padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>800</span></p> | |||
| width=79 style='width:59.0pt;border-top:none;border-left:none;border-bottom: solid white 1.0pt;border-right:solid white 1.0pt;background:#E9EDF4; padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>800</span></p> | |||
| width=79 style='width:59.0pt;border-top:none;border-left:none;border-bottom: solid white 1.0pt;border-right:solid white 1.0pt;background:#E9EDF4; padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>800</span></p> | |||
| width=79 style='width:59.0pt;border-top:none;border-left:none;border-bottom: solid white 1.0pt;border-right:solid white 1.0pt;background:#E9EDF4; padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>800</span></p> | |||
| width=79 style='width:59.0pt;border-top:none;border-left:none;border-bottom: solid white 1.0pt;border-right:solid white 1.0pt;background:#E9EDF4; padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>800 reflect 13W</span></p> | |||
| width=79 style='width:59.0pt;border-top:none;border-left:none;border-bottom: solid white 1.0pt;border-right:solid white 1.0pt;background:#E9EDF4; padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>800 reflect 8W</span></p> | |||
|- style='height:29.25pt' | |||
| width=83 style='width:62.0pt;border:solid white 1.0pt;border-top:none; background:#D0D8E8;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | | |||
| width=68 style='width:51.0pt;border-top:none;border-left:none;border-bottom: solid white 1.0pt;border-right:solid white 1.0pt;background:#D0D8E8; padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>Platen Power [W] </span></p> | |||
| width=81 style='width:61.0pt;border-top:none;border-left:none;border-bottom: solid white 1.0pt;border-right:solid white 1.0pt;background:#D0D8E8; padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>100</span></p> | |||
| width=72 style='width:54.0pt;border-top:none;border-left:none;border-bottom: solid white 1.0pt;border-right:solid white 1.0pt;background:#D0D8E8; padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>100</span></p> | |||
| width=79 style='width:59.0pt;border-top:none;border-left:none;border-bottom: solid white 1.0pt;border-right:solid white 1.0pt;background:#D0D8E8; padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>120</span></p> | |||
| width=79 style='width:59.0pt;border-top:none;border-left:none;border-bottom: solid white 1.0pt;border-right:solid white 1.0pt;background:#D0D8E8; padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>150</span></p> | |||
| width=79 style='width:59.0pt;border-top:none;border-left:none;border-bottom: solid white 1.0pt;border-right:solid white 1.0pt;background:#D0D8E8; padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>150</span></p> | |||
| width=79 style='width:59.0pt;border-top:none;border-left:none;border-bottom: solid white 1.0pt;border-right:solid white 1.0pt;background:#D0D8E8; padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>150</span></p> | |||
| width=79 style='width:59.0pt;border-top:none;border-left:none;border-bottom: solid white 1.0pt;border-right:solid white 1.0pt;background:#D0D8E8; padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>150</span></p> | |||
| width=79 style='width:59.0pt;border-top:none;border-left:none;border-bottom: solid white 1.0pt;border-right:solid white 1.0pt;background:#D0D8E8; padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>150</span></p> | |||
| width=79 style='width:59.0pt;border-top:none;border-left:none;border-bottom: solid white 1.0pt;border-right:solid white 1.0pt;background:#D0D8E8; padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>150reflect 0.2w</span></p> | |||
|- style='height:33.3pt' | |||
| width=83 style='width:62.0pt;border:solid white 1.0pt;border-top:none; background:#E9EDF4;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:33.3pt' | | |||
| width=68 style='width:51.0pt;border-top:none;border-left:none;border-bottom: solid white 1.0pt;border-right:solid white 1.0pt;background:#E9EDF4; padding:2.25pt 2.25pt 2.25pt 2.25pt;height:33.3pt' | <p class=MsoNormal><span lang=DA>Platen temperature [<sup>o</sup>C] </span></p> | |||
| width=81 style='width:61.0pt;border-top:none;border-left:none;border-bottom: solid white 1.0pt;border-right:solid white 1.0pt;background:#E9EDF4; padding:2.25pt 2.25pt 2.25pt 2.25pt;height:33.3pt' | <p class=MsoNormal><span lang=DA>20</span></p> | |||
| width=72 style='width:54.0pt;border-top:none;border-left:none;border-bottom: solid white 1.0pt;border-right:solid white 1.0pt;background:#E9EDF4; padding:2.25pt 2.25pt 2.25pt 2.25pt;height:33.3pt' | <p class=MsoNormal><span lang=DA>20</span></p> | |||
| width=79 style='width:59.0pt;border-top:none;border-left:none;border-bottom: solid white 1.0pt;border-right:solid white 1.0pt;background:#E9EDF4; padding:2.25pt 2.25pt 2.25pt 2.25pt;height:33.3pt' | <p class=MsoNormal><span lang=DA>20</span></p> | |||
| width=79 style='width:59.0pt;border-top:none;border-left:none;border-bottom: solid white 1.0pt;border-right:solid white 1.0pt;background:#E9EDF4; padding:2.25pt 2.25pt 2.25pt 2.25pt;height:33.3pt' | <p class=MsoNormal><span lang=DA>20</span></p> | |||
| width=79 style='width:59.0pt;border-top:none;border-left:none;border-bottom: solid white 1.0pt;border-right:solid white 1.0pt;background:#E9EDF4; padding:2.25pt 2.25pt 2.25pt 2.25pt;height:33.3pt' | <p class=MsoNormal><span lang=DA>20</span></p> | |||
| width=79 style='width:59.0pt;border-top:none;border-left:none;border-bottom: solid white 1.0pt;border-right:solid white 1.0pt;background:#E9EDF4; padding:2.25pt 2.25pt 2.25pt 2.25pt;height:33.3pt' | <p class=MsoNormal><span lang=DA>20</span></p> | |||
| width=79 style='width:59.0pt;border-top:none;border-left:none;border-bottom: solid white 1.0pt;border-right:solid white 1.0pt;background:#E9EDF4; padding:2.25pt 2.25pt 2.25pt 2.25pt;height:33.3pt' | <p class=MsoNormal><span lang=DA>20</span></p> | |||
| width=79 style='width:59.0pt;border-top:none;border-left:none;border-bottom: solid white 1.0pt;border-right:solid white 1.0pt;background:#E9EDF4; padding:2.25pt 2.25pt 2.25pt 2.25pt;height:33.3pt' | <p class=MsoNormal><span lang=DA>20</span></p> | |||
| width=79 style='width:59.0pt;border-top:none;border-left:none;border-bottom: solid white 1.0pt;border-right:solid white 1.0pt;background:#E9EDF4; padding:2.25pt 2.25pt 2.25pt 2.25pt;height:33.3pt' | <p class=MsoNormal><span lang=DA>20</span></p> | |||
|- style='height:29.25pt' | |||
| width=83 style='width:62.0pt;border:solid white 1.0pt;border-top:none; background:#D0D8E8;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | | |||
| width=68 style='width:51.0pt;border-top:none;border-left:none;border-bottom: solid white 1.0pt;border-right:solid white 1.0pt;background:#D0D8E8; padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>Coil match</span></p> | |||
| width=81 style='width:61.0pt;border-top:none;border-left:none;border-bottom: solid white 1.0pt;border-right:solid white 1.0pt;background:#D0D8E8; padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>60%,27%</span></p> | |||
| width=72 style='width:54.0pt;border-top:none;border-left:none;border-bottom: solid white 1.0pt;border-right:solid white 1.0pt;background:#D0D8E8; padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>63%,25%</span></p> | |||
| width=79 style='width:59.0pt;border-top:none;border-left:none;border-bottom: solid white 1.0pt;border-right:solid white 1.0pt;background:#D0D8E8; padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>63%,25%</span></p> | |||
| width=79 style='width:59.0pt;border-top:none;border-left:none;border-bottom: solid white 1.0pt;border-right:solid white 1.0pt;background:#D0D8E8; padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>67%,24%</span></p> | |||
| width=79 style='width:59.0pt;border-top:none;border-left:none;border-bottom: solid white 1.0pt;border-right:solid white 1.0pt;background:#D0D8E8; padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>67%,24%</span></p> | |||
| width=79 style='width:59.0pt;border-top:none;border-left:none;border-bottom: solid white 1.0pt;border-right:solid white 1.0pt;background:#D0D8E8; padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>68.9%,24.1%</span></p> | |||
| width=79 style='width:59.0pt;border-top:none;border-left:none;border-bottom: solid white 1.0pt;border-right:solid white 1.0pt;background:#D0D8E8; padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>68.9%,24.1%</span></p> | |||
| width=79 style='width:59.0pt;border-top:none;border-left:none;border-bottom: solid white 1.0pt;border-right:solid white 1.0pt;background:#D0D8E8; padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>68.7%,25.3%</span></p> | |||
| width=79 style='width:59.0pt;border-top:none;border-left:none;border-bottom: solid white 1.0pt;border-right:solid white 1.0pt;background:#D0D8E8; padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>68.87%,23.1%</span></p> | |||
|- style='height:29.25pt' | |||
| width=83 style='width:62.0pt;border:solid white 1.0pt;border-top:none; background:#D0D8E8;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | | |||
| width=68 style='width:51.0pt;border-top:none;border-left:none;border-bottom: solid white 1.0pt;border-right:solid white 1.0pt;background:#D0D8E8; padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>Platen Match</span></p> | |||
| width=81 style='width:61.0pt;border-top:none;border-left:none;border-bottom: solid white 1.0pt;border-right:solid white 1.0pt;background:#D0D8E8; padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>40%,53%</span></p> | |||
| width=72 style='width:54.0pt;border-top:none;border-left:none;border-bottom: solid white 1.0pt;border-right:solid white 1.0pt;background:#D0D8E8; padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>36%,54%</span></p> | |||
| width=79 style='width:59.0pt;border-top:none;border-left:none;border-bottom: solid white 1.0pt;border-right:solid white 1.0pt;background:#D0D8E8; padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>36%,54%</span></p> | |||
| width=79 style='width:59.0pt;border-top:none;border-left:none;border-bottom: solid white 1.0pt;border-right:solid white 1.0pt;background:#D0D8E8; padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>34%,54%</span></p> | |||
| width=79 style='width:59.0pt;border-top:none;border-left:none;border-bottom: solid white 1.0pt;border-right:solid white 1.0pt;background:#D0D8E8; padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>34%,54%</span></p> | |||
| width=79 style='width:59.0pt;border-top:none;border-left:none;border-bottom: solid white 1.0pt;border-right:solid white 1.0pt;background:#D0D8E8; padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>34.3%,53.8%</span></p> | |||
| width=79 style='width:59.0pt;border-top:none;border-left:none;border-bottom: solid white 1.0pt;border-right:solid white 1.0pt;background:#D0D8E8; padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>34.3%,53.8%</span></p> | |||
| width=79 style='width:59.0pt;border-top:none;border-left:none;border-bottom: solid white 1.0pt;border-right:solid white 1.0pt;background:#D0D8E8; padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>36.8%,54.9%</span></p> | |||
| width=79 style='width:59.0pt;border-top:none;border-left:none;border-bottom: solid white 1.0pt;border-right:solid white 1.0pt;background:#D0D8E8; padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>33.0%,54.4%</span></p> | |||
|- style='height:29.25pt' | |||
| width=83 style='width:62.0pt;border:solid white 1.0pt;border-top:none; background:#E9EDF4;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | | |||
| width=68 style='width:51.0pt;border-top:none;border-left:none;border-bottom: solid white 1.0pt;border-right:solid white 1.0pt;background:#E9EDF4; padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>Throde valve opening rate</span></p> | |||
| width=81 style='width:61.0pt;border-top:none;border-left:none;border-bottom: solid white 1.0pt;border-right:solid white 1.0pt;background:#E9EDF4; padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>17%</span></p> | |||
| width=72 style='width:54.0pt;border-top:none;border-left:none;border-bottom: solid white 1.0pt;border-right:solid white 1.0pt;background:#E9EDF4; padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>12%</span></p> | |||
| width=79 style='width:59.0pt;border-top:none;border-left:none;border-bottom: solid white 1.0pt;border-right:solid white 1.0pt;background:#E9EDF4; padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>14%</span></p> | |||
| width=79 style='width:59.0pt;border-top:none;border-left:none;border-bottom: solid white 1.0pt;border-right:solid white 1.0pt;background:#E9EDF4; padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>14.7%</span></p> | |||
| width=79 style='width:59.0pt;border-top:none;border-left:none;border-bottom: solid white 1.0pt;border-right:solid white 1.0pt;background:#E9EDF4; padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>14.7%</span></p> | |||
| width=79 style='width:59.0pt;border-top:none;border-left:none;border-bottom: solid white 1.0pt;border-right:solid white 1.0pt;background:#E9EDF4; padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>14.7%</span></p> | |||
| width=79 style='width:59.0pt;border-top:none;border-left:none;border-bottom: solid white 1.0pt;border-right:solid white 1.0pt;background:#E9EDF4; padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>14.7%</span></p> | |||
| width=79 style='width:59.0pt;border-top:none;border-left:none;border-bottom: solid white 1.0pt;border-right:solid white 1.0pt;background:#E9EDF4; padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>16.2%</span></p> | |||
| width=79 style='width:59.0pt;border-top:none;border-left:none;border-bottom: solid white 1.0pt;border-right:solid white 1.0pt;background:#E9EDF4; padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | | |||
|- | |||
| width=83 style='width:62.0pt;border:solid white 1.0pt;border-top:none; background:#D0D8E8;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:90.9pt' | | |||
| width=68 style='width:51.0pt;border-top:none;border-left:none;border-bottom: solid white 1.0pt;border-right:solid white 1.0pt;background:#D0D8E8; padding:2.25pt 2.25pt 2.25pt 2.25pt;height:90.9pt' | <p class=MsoNormal><span lang=DA>Images </span></p> | |||
| width=81 style='width:61.0pt;border-top:none;border-left:none;border-bottom: solid white 1.0pt;border-right:solid white 1.0pt;background:#D0D8E8; padding:2.25pt 2.25pt 2.25pt 2.25pt;height:90.9pt' | <p class=MsoNormal>Image1</p> | |||
| width=72 style='width:54.0pt;border-top:none;border-left:none;border-bottom: solid white 1.0pt;border-right:solid white 1.0pt;background:#D0D8E8; padding:2.25pt 2.25pt 2.25pt 2.25pt;height:90.9pt' | <p class=MsoNormal>[[Specific_Process_Knowledge/Etch/ICP_Metal_Etcher/silicon_oxide/By_Peixiong/images_CF4#Images_stepper_6A4_feb262013_step9|Images]]</p> | |||
| width=79 style='width:59.0pt;border-top:none;border-left:none;border-bottom: solid white 1.0pt;border-right:solid white 1.0pt;background:#D0D8E8; padding:2.25pt 2.25pt 2.25pt 2.25pt;height:90.9pt' | <p class=MsoNormal>Images3</p> | |||
| width=79 style='width:59.0pt;border-top:none;border-left:none;border-bottom: solid white 1.0pt;border-right:solid white 1.0pt;background:#D0D8E8; padding:2.25pt 2.25pt 2.25pt 2.25pt;height:90.9pt' | <p class=MsoNormal>Images4</p> | |||
| width=79 style='width:59.0pt;border-top:none;border-left:none;border-bottom: solid white 1.0pt;border-right:solid white 1.0pt;background:#D0D8E8; padding:2.25pt 2.25pt 2.25pt 2.25pt;height:90.9pt' | <p class=MsoNormal>Iamges5</p> | |||
| width=79 style='width:59.0pt;border-top:none;border-left:none;border-bottom: solid white 1.0pt;border-right:solid white 1.0pt;background:#D0D8E8; padding:2.25pt 2.25pt 2.25pt 2.25pt;height:90.9pt' | <p class=MsoNormal>Images6</p> | |||
| width=79 style='width:59.0pt;border-top:none;border-left:none;border-bottom: solid white 1.0pt;border-right:solid white 1.0pt;background:#D0D8E8; padding:2.25pt 2.25pt 2.25pt 2.25pt;height:90.9pt' | <p class=MsoNormal>Images7</p> | |||
| width=79 style='width:59.0pt;border-top:none;border-left:none;border-bottom: solid white 1.0pt;border-right:solid white 1.0pt;background:#D0D8E8; padding:2.25pt 2.25pt 2.25pt 2.25pt;height:90.9pt' | <p class=MsoNormal>[[Specific_Process_Knowledge/Etch/ICP_Metal_Etcher/silicon_oxide/By_Peixiong/images_CF4#Images_Stepper_6A5_feb272013|Images]]</p> | |||
| width=79 style='width:59.0pt;border-top:none;border-left:none;border-bottom: solid white 1.0pt;border-right:solid white 1.0pt;background:#D0D8E8; padding:2.25pt 2.25pt 2.25pt 2.25pt;height:90.9pt' | | |||
|- | |||
| width=83 style='width:62.0pt;border:solid white 1.0pt;border-top:none; background:#D0D8E8;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:90.9pt' | | |||
| width=68 style='width:51.0pt;border-top:none;border-left:none;border-bottom: solid white 1.0pt;border-right:solid white 1.0pt;background:#D0D8E8; padding:2.25pt 2.25pt 2.25pt 2.25pt;height:90.9pt' | <p class=MsoNormal><span lang=DA>Comments </span></p> | |||
| width=81 style='width:61.0pt;border-top:none;border-left:none;border-bottom: solid white 1.0pt;border-right:solid white 1.0pt;background:#D0D8E8; padding:2.25pt 2.25pt 2.25pt 2.25pt;height:90.9pt' | <p class=MsoNormal>Profile Very good, 2min etch SiO3 350nm in wafer center, | |||
310nm in wafer, resist etched 260nm</p> | |||
| width=72 style='width:54.0pt;border-top:none;border-left:none;border-bottom: solid white 1.0pt;border-right:solid white 1.0pt;background:#D0D8E8; padding:2.25pt 2.25pt 2.25pt 2.25pt;height:90.9pt' | <p class=MsoNormal>Profile Very good, 2min etch SiO3 350nm in wafer center, | |||
310nm in wafer, resist etched 260nm</p> | |||
| width=79 style='width:59.0pt;border-top:none;border-left:none;border-bottom: solid white 1.0pt;border-right:solid white 1.0pt;background:#D0D8E8; padding:2.25pt 2.25pt 2.25pt 2.25pt;height:90.9pt' | <p class=MsoNormal>Profile Very good, 4min etch SiO3 480nm in wafer center, | |||
Resist etched 100nm</p> | |||
| width=79 style='width:59.0pt;border-top:none;border-left:none;border-bottom: solid white 1.0pt;border-right:solid white 1.0pt;background:#D0D8E8; padding:2.25pt 2.25pt 2.25pt 2.25pt;height:90.9pt' | <p class=MsoNormal>Profile Very good, 4min etch SiO3 480nm in wafer center, | |||
Resist etched 100nm, side wall 85degree</p> | |||
| width=79 style='width:59.0pt;border-top:none;border-left:none;border-bottom: solid white 1.0pt;border-right:solid white 1.0pt;background:#D0D8E8; padding:2.25pt 2.25pt 2.25pt 2.25pt;height:90.9pt' | <p class=MsoNormal>Profile Very good, 4min etch SiO3 480nm in wafer center, | |||
Resist etched 100nm</p> | |||
| width=79 style='width:59.0pt;border-top:none;border-left:none;border-bottom: solid white 1.0pt;border-right:solid white 1.0pt;background:#D0D8E8; padding:2.25pt 2.25pt 2.25pt 2.25pt;height:90.9pt' | <p class=MsoNormal>Plasma very stable on blank Si wafer</p> | |||
| width=79 style='width:59.0pt;border-top:none;border-left:none;border-bottom: solid white 1.0pt;border-right:solid white 1.0pt;background:#D0D8E8; padding:2.25pt 2.25pt 2.25pt 2.25pt;height:90.9pt' | <p class=MsoNormal>Plasma not stable in apox wafer</p> | |||
| width=79 style='width:59.0pt;border-top:none;border-left:none;border-bottom: solid white 1.0pt;border-right:solid white 1.0pt;background:#D0D8E8; padding:2.25pt 2.25pt 2.25pt 2.25pt;height:90.9pt' | <p class=MsoNormal>etched 500nm apox, resit 150n, slide wall 86degm</p> | |||
| width=79 style='width:59.0pt;border-top:none;border-left:none;border-bottom: solid white 1.0pt;border-right:solid white 1.0pt;background:#D0D8E8; padding:2.25pt 2.25pt 2.25pt 2.25pt;height:90.9pt' | | |||
|}<p class=MsoNormal> </p> | |||
==Part2== | |||
{| class=MsoNormalTable border=0 cellspacing=0 cellpadding=0 width=517 style='width:388.0pt;border-collapse:collapse' style='height:36.0pt' | |||
| width=163 valign=top style='width:122.0pt;border:solid white 1.0pt; border-bottom:solid white 3.0pt;background:#4F81BD;padding:3.6pt 7.2pt 3.6pt 7.2pt; height:36.0pt' | <p class=MsoNormal>ICP metal etch SiO2 by reist mask try</p> | |||
| width=192 valign=top style='width:144.0pt;border-top:solid white 1.0pt; border-left:none;border-bottom:solid white 3.0pt;border-right:solid white 1.0pt; background:#4F81BD;padding:3.6pt 7.2pt 3.6pt 7.2pt;height:36.0pt' | <p class=MsoNormal><span lang=DA>stable plasma at 2.5mtorr</span></p> | |||
| width=163 valign=top style='width:122.0pt;border-top:solid white 1.0pt; border-left:none;border-bottom:solid white 3.0pt;border-right:solid white 1.0pt; background:#4F81BD;padding:3.6pt 7.2pt 3.6pt 7.2pt;height:36.0pt' | <p class=MsoNormal><span lang=DA>stable plasma at 2.5mtorr</span></p> | |||
|- style='height:31.25pt' | |||
| width=163 valign=top style='width:122.0pt;border-top:none;border-left: solid white 1.0pt;border-bottom:solid white 3.0pt;border-right:solid white 1.0pt; background:#4F81BD;padding:3.6pt 7.2pt 3.6pt 7.2pt;height:31.25pt' | <p class=MsoNormal><span lang=DA>Date</span></p> | |||
| width=192 valign=top style='width:144.0pt;border-top:none;border-left: none;border-bottom:solid white 3.0pt;border-right:solid white 1.0pt; background:#4F81BD;padding:3.6pt 7.2pt 3.6pt 7.2pt;height:31.25pt' | <p class=MsoNormal><span lang=DA>Feb28204am</span></p> | |||
| width=163 valign=top style='width:122.0pt;border-top:none;border-left: none;border-bottom:solid white 3.0pt;border-right:solid white 1.0pt; background:#4F81BD;padding:3.6pt 7.2pt 3.6pt 7.2pt;height:31.25pt' | <p class=MsoNormal><span lang=DA>March012013, 21</span></p> | |||
|- style='height:26.15pt' | |||
| width=163 valign=top style='width:122.0pt;border-top:none;border-left: solid white 1.0pt;border-bottom:solid white 3.0pt;border-right:solid white 1.0pt; background:#4F81BD;padding:3.6pt 7.2pt 3.6pt 7.2pt;height:26.15pt' | <p class=MsoNormal><span lang=DA>Metal ICP recipe</span></p> | |||
| width=192 valign=top style='width:144.0pt;border-top:none;border-left: none;border-bottom:solid white 3.0pt;border-right:solid white 1.0pt; background:#4F81BD;padding:3.6pt 7.2pt 3.6pt 7.2pt;height:26.15pt' | <p class=MsoNormal><span lang=DA>pxSiO2try9</span></p> | |||
| width=163 valign=top style='width:122.0pt;border-top:none;border-left: none;border-bottom:solid white 3.0pt;border-right:solid white 1.0pt; background:#4F81BD;padding:3.6pt 7.2pt 3.6pt 7.2pt;height:26.15pt' | <p class=MsoNormal><span lang=DA>pxSiO2try9</span></p> | |||
|- style='height:28.9pt' | |||
| width=163 style='width:122.0pt;border-top:none;border-left:solid white 1.0pt; border-bottom:solid white 3.0pt;border-right:solid white 1.0pt;background: #D0D8E8;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:28.9pt' | <p class=MsoNormal><span lang=DA>Wafer size and ID</span></p> | |||
| width=192 style='width:144.0pt;border-top:none;border-left:none; border-bottom:solid white 3.0pt;border-right:solid white 1.0pt;background: #D0D8E8;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:28.9pt' | <p class=MsoNormal><span lang=DA>6inch,</span></p><p class=MsoNormal><span lang=DA>6A6_feb272013</span></p> | |||
| width=163 style='width:122.0pt;border-top:none;border-left:none; border-bottom:solid white 3.0pt;border-right:solid white 1.0pt;background: #D0D8E8;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:28.9pt' | <p class=MsoNormal><span lang=DA>6inch,</span></p><p class=MsoNormal><span lang=DA>6A1_march012013</span></p> | |||
|- style='height:53.85pt' | |||
| width=163 style='width:122.0pt;border:solid white 1.0pt;border-top:none; background:#D0D8E8;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:53.85pt' | <p class=MsoNormal><span lang=DA>Mask</span></p> | |||
| width=192 style='width:144.0pt;border-top:none;border-left:none; border-bottom:solid white 1.0pt;border-right:solid white 1.0pt;background: #D0D8E8;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:53.85pt' | <p class=MsoNormal>780nm resist on 62nmBarc on 490nm apox, first etch barc | |||
20sec by Ox plasma</p> | |||
| width=163 style='width:122.0pt;border-top:none;border-left:none; border-bottom:solid white 1.0pt;border-right:solid white 1.0pt;background: #D0D8E8;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:53.85pt' | <p class=MsoNormal>780nm resist on 62nmBarc on 490nm apox, first etch barc | |||
20sec by Ox plasma</p> | |||
|- style='height:25.4pt' | |||
| width=163 style='width:122.0pt;border:solid white 1.0pt;border-top:none; background:#E9EDF4;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:25.4pt' | <p class=MsoNormal><span lang=DA>Etch time</span></p> | |||
| width=192 style='width:144.0pt;border-top:none;border-left:none; border-bottom:solid white 1.0pt;border-right:solid white 1.0pt;background: #E9EDF4;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:25.4pt' | <p class=MsoNormal><span lang=DA>5min</span></p> | |||
| width=163 style='width:122.0pt;border-top:none;border-left:none; border-bottom:solid white 1.0pt;border-right:solid white 1.0pt;background: #E9EDF4;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:25.4pt' | <p class=MsoNormal><span lang=DA>65min</span></p> | |||
|- style='height:25.4pt' | |||
| width=163 style='width:122.0pt;border:solid white 1.0pt;border-top:none; background:#E9EDF4;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:25.4pt' | <p class=MsoNormal><span lang=DA>Pressure [mTorr] </span></p> | |||
| width=192 style='width:144.0pt;border-top:none;border-left:none; border-bottom:solid white 1.0pt;border-right:solid white 1.0pt;background: #E9EDF4;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:25.4pt' | <p class=MsoNormal><span lang=DA>2.5</span></p> | |||
| width=163 style='width:122.0pt;border-top:none;border-left:none; border-bottom:solid white 1.0pt;border-right:solid white 1.0pt;background: #E9EDF4;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:25.4pt' | <p class=MsoNormal><span lang=DA>2.5</span></p> | |||
|- style='height:25.4pt' | |||
| width=163 style='width:122.0pt;border:solid white 1.0pt;border-top:none; background:#E9EDF4;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:25.4pt' | <p class=MsoNormal><span lang=DA>C4F8 flow [sccm] </span></p> | |||
| width=192 style='width:144.0pt;border-top:none;border-left:none; border-bottom:solid white 1.0pt;border-right:solid white 1.0pt;background: #E9EDF4;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:25.4pt' | <p class=MsoNormal><span lang=DA>8</span></p> | |||
| width=163 style='width:122.0pt;border-top:none;border-left:none; border-bottom:solid white 1.0pt;border-right:solid white 1.0pt;background: #E9EDF4;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:25.4pt' | <p class=MsoNormal><span lang=DA>8</span></p> | |||
|- style='height:25.4pt' | |||
| width=163 style='width:122.0pt;border:solid white 1.0pt;border-top:none; background:#E9EDF4;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:25.4pt' | <p class=MsoNormal><span lang=DA>CF4 flow [sccm] </span></p> | |||
| width=192 style='width:144.0pt;border-top:none;border-left:none; border-bottom:solid white 1.0pt;border-right:solid white 1.0pt;background: #E9EDF4;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:25.4pt' | <p class=MsoNormal><span lang=DA>0</span></p> | |||
| width=163 style='width:122.0pt;border-top:none;border-left:none; border-bottom:solid white 1.0pt;border-right:solid white 1.0pt;background: #E9EDF4;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:25.4pt' | <p class=MsoNormal><span lang=DA>0</span></p> | |||
|- style='height:25.4pt' | |||
| width=163 style='width:122.0pt;border:solid white 1.0pt;border-top:none; background:#E9EDF4;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:25.4pt' | <p class=MsoNormal><span lang=DA>H2 flow [sccm] </span></p> | |||
| width=192 style='width:144.0pt;border-top:none;border-left:none; border-bottom:solid white 1.0pt;border-right:solid white 1.0pt;background: #E9EDF4;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:25.4pt' | <p class=MsoNormal><span lang=DA>30</span></p> | |||
| width=163 style='width:122.0pt;border-top:none;border-left:none; border-bottom:solid white 1.0pt;border-right:solid white 1.0pt;background: #E9EDF4;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:25.4pt' | <p class=MsoNormal><span lang=DA>30</span></p> | |||
|- style='height:25.4pt' | |||
| width=163 style='width:122.0pt;border:solid white 1.0pt;border-top:none; background:#E9EDF4;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:25.4pt' | <p class=MsoNormal><span lang=DA>CH4 flow [sccm] </span></p> | |||
| width=192 style='width:144.0pt;border-top:none;border-left:none; border-bottom:solid white 1.0pt;border-right:solid white 1.0pt;background: #E9EDF4;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:25.4pt' | <p class=MsoNormal><span lang=DA>0</span></p> | |||
| width=163 style='width:122.0pt;border-top:none;border-left:none; border-bottom:solid white 1.0pt;border-right:solid white 1.0pt;background: #E9EDF4;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:25.4pt' | <p class=MsoNormal><span lang=DA>0</span></p> | |||
|- style='height:25.4pt' | |||
| width=163 style='width:122.0pt;border:solid white 1.0pt;border-top:none; background:#E9EDF4;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:25.4pt' | <p class=MsoNormal><span lang=DA>Coil Power [W] </span></p> | |||
| width=192 style='width:144.0pt;border-top:none;border-left:none; border-bottom:solid white 1.0pt;border-right:solid white 1.0pt;background: #E9EDF4;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:25.4pt' | <p class=MsoNormal><span lang=DA>800 reflect 8W</span></p> | |||
| width=163 style='width:122.0pt;border-top:none;border-left:none; border-bottom:solid white 1.0pt;border-right:solid white 1.0pt;background: #E9EDF4;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:25.4pt' | <p class=MsoNormal><span lang=DA>800 reflect 8W</span></p> | |||
|- style='height:25.4pt' | |||
| width=163 style='width:122.0pt;border:solid white 1.0pt;border-top:none; background:#D0D8E8;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:25.4pt' | <p class=MsoNormal><span lang=DA>Platen Power [W] </span></p> | |||
| width=192 style='width:144.0pt;border-top:none;border-left:none; border-bottom:solid white 1.0pt;border-right:solid white 1.0pt;background: #D0D8E8;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:25.4pt' | <p class=MsoNormal><span lang=DA>150reflect 0.2w</span></p> | |||
| width=163 style='width:122.0pt;border-top:none;border-left:none; border-bottom:solid white 1.0pt;border-right:solid white 1.0pt;background: #D0D8E8;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:25.4pt' | <p class=MsoNormal><span lang=DA>150reflect 0.2w</span></p> | |||
|- style='height:28.9pt' | |||
| width=163 style='width:122.0pt;border:solid white 1.0pt;border-top:none; background:#E9EDF4;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:28.9pt' | <p class=MsoNormal><span lang=DA>Platen temperature [<sup>o</sup>C] </span></p> | |||
| width=192 style='width:144.0pt;border-top:none;border-left:none; border-bottom:solid white 1.0pt;border-right:solid white 1.0pt;background: #E9EDF4;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:28.9pt' | <p class=MsoNormal><span lang=DA>20</span></p> | |||
| width=163 style='width:122.0pt;border-top:none;border-left:none; border-bottom:solid white 1.0pt;border-right:solid white 1.0pt;background: #E9EDF4;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:28.9pt' | <p class=MsoNormal><span lang=DA>20</span></p> | |||
|- style='height:25.4pt' | |||
| width=163 style='width:122.0pt;border:solid white 1.0pt;border-top:none; background:#D0D8E8;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:25.4pt' | <p class=MsoNormal><span lang=DA>Coil match</span></p> | |||
| width=192 style='width:144.0pt;border-top:none;border-left:none; border-bottom:solid white 1.0pt;border-right:solid white 1.0pt;background: #D0D8E8;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:25.4pt' | <p class=MsoNormal><span lang=DA>68.87%,23.1%</span></p> | |||
| width=163 style='width:122.0pt;border-top:none;border-left:none; border-bottom:solid white 1.0pt;border-right:solid white 1.0pt;background: #D0D8E8;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:25.4pt' | <p class=MsoNormal><span lang=DA>68.87%,23.1%</span></p> | |||
|- style='height:25.4pt' | |||
| width=163 style='width:122.0pt;border:solid white 1.0pt;border-top:none; background:#D0D8E8;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:25.4pt' | <p class=MsoNormal><span lang=DA>Platen Match</span></p> | |||
| width=192 style='width:144.0pt;border-top:none;border-left:none; border-bottom:solid white 1.0pt;border-right:solid white 1.0pt;background: #D0D8E8;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:25.4pt' | <p class=MsoNormal><span lang=DA>33.0%,54.4%</span></p> | |||
| width=163 style='width:122.0pt;border-top:none;border-left:none; border-bottom:solid white 1.0pt;border-right:solid white 1.0pt;background: #D0D8E8;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:25.4pt' | <p class=MsoNormal><span lang=DA>33.0%,54.4%</span></p> | |||
|- style='height:45.6pt' | |||
| width=163 style='width:122.0pt;border:solid white 1.0pt;border-top:none; background:#E9EDF4;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:45.6pt' | <p class=MsoNormal><span lang=DA>Throde valve opening rate</span></p> | |||
| width=192 style='width:144.0pt;border-top:none;border-left:none; border-bottom:solid white 1.0pt;border-right:solid white 1.0pt;background: #E9EDF4;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:45.6pt' | | |||
| width=163 style='width:122.0pt;border-top:none;border-left:none; border-bottom:solid white 1.0pt;border-right:solid white 1.0pt;background: #E9EDF4;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:45.6pt' | <p class=MsoNormal>10.8% to 11.7%, pressure 2.11 to 2.40, not stable</p> | |||
|- style='height:25.4pt' | |||
| width=163 style='width:122.0pt;border:solid white 1.0pt;border-top:none; background:#D0D8E8;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:25.4pt' | <p class=MsoNormal><span lang=DA>Comments </span></p> | |||
| width=192 style='width:144.0pt;border-top:none;border-left:none; border-bottom:solid white 1.0pt;border-right:solid white 1.0pt;background: #D0D8E8;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:25.4pt' | | |||
| width=163 style='width:122.0pt;border-top:none;border-left:none; border-bottom:solid white 1.0pt;border-right:solid white 1.0pt;background: #D0D8E8;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:25.4pt' | <p class=MsoNormal><span lang=DA>SiO2 width 230nm</span></p> | |||
|}<p class=MsoNormal><span lang=DA> </span></p> | |||
=With CF4 and H2 chemistry by ''Peixiong Shi, DTU Nanolab''= | |||
==Part 1== | |||
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==Part 2== | |||
<div class=WordSection1> | |||
{| class=MsoNormalTable border=0 cellspacing=0 cellpadding=0 width=748 style='width:561.0pt;border-collapse:collapse' style='height:29.25pt' | |||
| width=136 valign=top style='width:102.0pt;border:solid white 1.0pt; border-bottom:solid white 3.0pt;background:#4F81BD;padding:3.6pt 7.2pt 3.6pt 7.2pt; height:29.25pt' | | |||
| width=136 valign=top style='width:102.0pt;border-top:solid white 1.0pt; border-left:none;border-bottom:solid white 3.0pt;border-right:solid white 1.0pt; background:#4F81BD;padding:3.6pt 7.2pt 3.6pt 7.2pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>bad</span></p> | |||
| width=108 valign=top style='width:81.0pt;border-top:solid white 1.0pt; border-left:none;border-bottom:solid white 3.0pt;border-right:solid white 1.0pt; background:#4F81BD;padding:3.6pt 7.2pt 3.6pt 7.2pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>bad</span></p> | |||
| width=119 valign=top style='width:89.0pt;border-top:solid white 1.0pt; border-left:none;border-bottom:solid white 3.0pt;border-right:solid white 1.0pt; background:#4F81BD;padding:3.6pt 7.2pt 3.6pt 7.2pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>bad</span></p> | |||
| width=121 valign=top style='width:91.0pt;border-top:solid white 1.0pt; border-left:none;border-bottom:solid white 3.0pt;border-right:solid white 1.0pt; background:#4F81BD;padding:3.6pt 7.2pt 3.6pt 7.2pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>Very good</span></p> | |||
| width=128 valign=top style='width:96.0pt;border-top:solid white 1.0pt; border-left:none;border-bottom:solid white 3.0pt;border-right:solid white 1.0pt; background:#4F81BD;padding:3.6pt 7.2pt 3.6pt 7.2pt;height:29.25pt' | | |||
|- style='height:29.25pt' | |||
| width=136 valign=top style='width:102.0pt;border-top:none;border-left: solid white 1.0pt;border-bottom:solid white 3.0pt;border-right:solid white 1.0pt; background:#4F81BD;padding:3.6pt 7.2pt 3.6pt 7.2pt;height:29.25pt' | <p class=MsoNormal>ICP metal etch SiO2 by reist mask try</p> | |||
| width=136 valign=top style='width:102.0pt;border-top:none;border-left: none;border-bottom:solid white 3.0pt;border-right:solid white 1.0pt; background:#4F81BD;padding:3.6pt 7.2pt 3.6pt 7.2pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>Date</span></p> | |||
| width=108 valign=top style='width:81.0pt;border-top:none;border-left: none;border-bottom:solid white 3.0pt;border-right:solid white 1.0pt; background:#4F81BD;padding:3.6pt 7.2pt 3.6pt 7.2pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>Feb252013</span></p> | |||
| width=119 valign=top style='width:89.0pt;border-top:none;border-left: none;border-bottom:solid white 3.0pt;border-right:solid white 1.0pt; background:#4F81BD;padding:3.6pt 7.2pt 3.6pt 7.2pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>Feb252013</span></p> | |||
| width=121 valign=top style='width:91.0pt;border-top:none;border-left: none;border-bottom:solid white 3.0pt;border-right:solid white 1.0pt; background:#4F81BD;padding:3.6pt 7.2pt 3.6pt 7.2pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>Feb262013</span></p> | |||
| width=128 valign=top style='width:96.0pt;border-top:none;border-left: none;border-bottom:solid white 3.0pt;border-right:solid white 1.0pt; background:#4F81BD;padding:3.6pt 7.2pt 3.6pt 7.2pt;height:29.25pt' | | |||
|- style='height:29.25pt' | |||
| width=136 valign=top style='width:102.0pt;border-top:none;border-left: solid white 1.0pt;border-bottom:solid white 3.0pt;border-right:solid white 1.0pt; background:#4F81BD;padding:3.6pt 7.2pt 3.6pt 7.2pt;height:29.25pt' | | |||
| width=136 valign=top style='width:102.0pt;border-top:none;border-left: none;border-bottom:solid white 3.0pt;border-right:solid white 1.0pt; background:#4F81BD;padding:3.6pt 7.2pt 3.6pt 7.2pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>Metal ICP recipe</span></p> | |||
| width=108 valign=top style='width:81.0pt;border-top:none;border-left: none;border-bottom:solid white 3.0pt;border-right:solid white 1.0pt; background:#4F81BD;padding:3.6pt 7.2pt 3.6pt 7.2pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>pxSiO2try3</span></p> | |||
| width=119 valign=top style='width:89.0pt;border-top:none;border-left: none;border-bottom:solid white 3.0pt;border-right:solid white 1.0pt; background:#4F81BD;padding:3.6pt 7.2pt 3.6pt 7.2pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>pxSiO2try4</span></p> | |||
| width=121 valign=top style='width:91.0pt;border-top:none;border-left: none;border-bottom:solid white 3.0pt;border-right:solid white 1.0pt; background:#4F81BD;padding:3.6pt 7.2pt 3.6pt 7.2pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>pxSiO2try5</span></p> | |||
| width=128 valign=top style='width:96.0pt;border-top:none;border-left: none;border-bottom:solid white 3.0pt;border-right:solid white 1.0pt; background:#4F81BD;padding:3.6pt 7.2pt 3.6pt 7.2pt;height:29.25pt' | | |||
|- style='height:29.25pt' | |||
| width=136 style='width:102.0pt;border-top:none;border-left:solid white 1.0pt; border-bottom:solid white 3.0pt;border-right:solid white 1.0pt;background: #D0D8E8;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | | |||
| width=136 style='width:102.0pt;border-top:none;border-left:none; border-bottom:solid white 3.0pt;border-right:solid white 1.0pt;background: #D0D8E8;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>Wafer size and ID</span></p> | |||
| width=108 style='width:81.0pt;border-top:none;border-left:none; border-bottom:solid white 3.0pt;border-right:solid white 1.0pt;background: #D0D8E8;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>6inch,</span></p><p class=MsoNormal><span lang=DA>6A1_feb252013</span></p> | |||
| width=119 style='width:89.0pt;border-top:none;border-left:none; border-bottom:solid white 3.0pt;border-right:solid white 1.0pt;background: #D0D8E8;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>6inch,</span></p><p class=MsoNormal><span lang=DA>6A6_feb252013</span></p> | |||
| width=121 style='width:91.0pt;border-top:none;border-left:none; border-bottom:solid white 3.0pt;border-right:solid white 1.0pt;background: #D0D8E8;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>6inch,</span></p><p class=MsoNormal><span lang=DA>6A1_feb252013</span></p> | |||
| width=128 style='width:96.0pt;border-top:none;border-left:none; border-bottom:solid white 3.0pt;border-right:solid white 1.0pt;background: #D0D8E8;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | | |||
|- style='height:42.9pt' | |||
| width=136 style='width:102.0pt;border:solid white 1.0pt;border-top:none; background:#D0D8E8;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:42.9pt' | | |||
| width=136 style='width:102.0pt;border-top:none;border-left:none; border-bottom:solid white 1.0pt;border-right:solid white 1.0pt;background: #D0D8E8;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:42.9pt' | <p class=MsoNormal><span lang=DA>Mask</span></p> | |||
| width=108 style='width:81.0pt;border-top:none;border-left:none; border-bottom:solid white 1.0pt;border-right:solid white 1.0pt;background: #D0D8E8;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:42.9pt' | <p class=MsoNormal>980nm resist resist on 62nmBarc on 1190nm apox</p> | |||
| width=119 style='width:89.0pt;border-top:none;border-left:none; border-bottom:solid white 1.0pt;border-right:solid white 1.0pt;background: #D0D8E8;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:42.9pt' | <p class=MsoNormal>780nm resist on 62nmBarc on 492nm apox, first etch barc | |||
20sec by Ox plasma</p> | |||
| width=121 style='width:91.0pt;border-top:none;border-left:none; border-bottom:solid white 1.0pt;border-right:solid white 1.0pt;background: #D0D8E8;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:42.9pt' | <p class=MsoNormal>440nm resist on 62nmBarc on 1800nm apox, first etch barc | |||
20sec by Ox plasma</p> | |||
| width=128 style='width:96.0pt;border-top:none;border-left:none; border-bottom:solid white 1.0pt;border-right:solid white 1.0pt;background: #D0D8E8;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:42.9pt' | | |||
|- style='height:29.25pt' | |||
| width=136 style='width:102.0pt;border:solid white 1.0pt;border-top:none; background:#E9EDF4;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | | |||
| width=136 style='width:102.0pt;border-top:none;border-left:none; border-bottom:solid white 1.0pt;border-right:solid white 1.0pt;background: #E9EDF4;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>Etch time</span></p> | |||
| width=108 style='width:81.0pt;border-top:none;border-left:none; border-bottom:solid white 1.0pt;border-right:solid white 1.0pt;background: #E9EDF4;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>3min</span></p> | |||
| width=119 style='width:89.0pt;border-top:none;border-left:none; border-bottom:solid white 1.0pt;border-right:solid white 1.0pt;background: #E9EDF4;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>3min</span></p> | |||
| width=121 style='width:91.0pt;border-top:none;border-left:none; border-bottom:solid white 1.0pt;border-right:solid white 1.0pt;background: #E9EDF4;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>2min</span></p> | |||
| width=128 style='width:96.0pt;border-top:none;border-left:none; border-bottom:solid white 1.0pt;border-right:solid white 1.0pt;background: #E9EDF4;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | | |||
|- style='height:29.25pt' | |||
| width=136 style='width:102.0pt;border:solid white 1.0pt;border-top:none; background:#E9EDF4;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | | |||
| width=136 style='width:102.0pt;border-top:none;border-left:none; border-bottom:solid white 1.0pt;border-right:solid white 1.0pt;background: #E9EDF4;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>Pressure [mTorr] </span></p> | |||
| width=108 style='width:81.0pt;border-top:none;border-left:none; border-bottom:solid white 1.0pt;border-right:solid white 1.0pt;background: #E9EDF4;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>15</span></p> | |||
| width=119 style='width:89.0pt;border-top:none;border-left:none; border-bottom:solid white 1.0pt;border-right:solid white 1.0pt;background: #E9EDF4;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>8</span></p> | |||
| width=121 style='width:91.0pt;border-top:none;border-left:none; border-bottom:solid white 1.0pt;border-right:solid white 1.0pt;background: #E9EDF4;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>6</span></p> | |||
| width=128 style='width:96.0pt;border-top:none;border-left:none; border-bottom:solid white 1.0pt;border-right:solid white 1.0pt;background: #E9EDF4;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | | |||
|- style='height:29.25pt' | |||
| width=136 style='width:102.0pt;border:solid white 1.0pt;border-top:none; background:#E9EDF4;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | | |||
| width=136 style='width:102.0pt;border-top:none;border-left:none; border-bottom:solid white 1.0pt;border-right:solid white 1.0pt;background: #E9EDF4;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>C4F8 flow [sccm] </span></p> | |||
| width=108 style='width:81.0pt;border-top:none;border-left:none; border-bottom:solid white 1.0pt;border-right:solid white 1.0pt;background: #E9EDF4;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>0</span></p> | |||
| width=119 style='width:89.0pt;border-top:none;border-left:none; border-bottom:solid white 1.0pt;border-right:solid white 1.0pt;background: #E9EDF4;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>0</span></p> | |||
| width=121 style='width:91.0pt;border-top:none;border-left:none; border-bottom:solid white 1.0pt;border-right:solid white 1.0pt;background: #E9EDF4;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>0</span></p> | |||
| width=128 style='width:96.0pt;border-top:none;border-left:none; border-bottom:solid white 1.0pt;border-right:solid white 1.0pt;background: #E9EDF4;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | | |||
|- style='height:29.25pt' | |||
| width=136 style='width:102.0pt;border:solid white 1.0pt;border-top:none; background:#E9EDF4;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | | |||
| width=136 style='width:102.0pt;border-top:none;border-left:none; border-bottom:solid white 1.0pt;border-right:solid white 1.0pt;background: #E9EDF4;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>CF4 flow [sccm] </span></p> | |||
| width=108 style='width:81.0pt;border-top:none;border-left:none; border-bottom:solid white 1.0pt;border-right:solid white 1.0pt;background: #E9EDF4;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>40</span></p> | |||
| width=119 style='width:89.0pt;border-top:none;border-left:none; border-bottom:solid white 1.0pt;border-right:solid white 1.0pt;background: #E9EDF4;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>40</span></p> | |||
| width=121 style='width:91.0pt;border-top:none;border-left:none; border-bottom:solid white 1.0pt;border-right:solid white 1.0pt;background: #E9EDF4;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>40</span></p> | |||
| width=128 style='width:96.0pt;border-top:none;border-left:none; border-bottom:solid white 1.0pt;border-right:solid white 1.0pt;background: #E9EDF4;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | | |||
|- style='height:29.25pt' | |||
| width=136 style='width:102.0pt;border:solid white 1.0pt;border-top:none; background:#E9EDF4;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | | |||
| width=136 style='width:102.0pt;border-top:none;border-left:none; border-bottom:solid white 1.0pt;border-right:solid white 1.0pt;background: #E9EDF4;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>H2 flow [sccm] </span></p> | |||
| width=108 style='width:81.0pt;border-top:none;border-left:none; border-bottom:solid white 1.0pt;border-right:solid white 1.0pt;background: #E9EDF4;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>30</span></p> | |||
| width=119 style='width:89.0pt;border-top:none;border-left:none; border-bottom:solid white 1.0pt;border-right:solid white 1.0pt;background: #E9EDF4;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>30</span></p> | |||
| width=121 style='width:91.0pt;border-top:none;border-left:none; border-bottom:solid white 1.0pt;border-right:solid white 1.0pt;background: #E9EDF4;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>30</span></p> | |||
| width=128 style='width:96.0pt;border-top:none;border-left:none; border-bottom:solid white 1.0pt;border-right:solid white 1.0pt;background: #E9EDF4;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | | |||
|- style='height:29.25pt' | |||
| width=136 style='width:102.0pt;border:solid white 1.0pt;border-top:none; background:#E9EDF4;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | | |||
| width=136 style='width:102.0pt;border-top:none;border-left:none; border-bottom:solid white 1.0pt;border-right:solid white 1.0pt;background: #E9EDF4;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>Coil Power [W] </span></p> | |||
| width=108 style='width:81.0pt;border-top:none;border-left:none; border-bottom:solid white 1.0pt;border-right:solid white 1.0pt;background: #E9EDF4;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>800</span></p> | |||
| width=119 style='width:89.0pt;border-top:none;border-left:none; border-bottom:solid white 1.0pt;border-right:solid white 1.0pt;background: #E9EDF4;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>800</span></p> | |||
| width=121 style='width:91.0pt;border-top:none;border-left:none; border-bottom:solid white 1.0pt;border-right:solid white 1.0pt;background: #E9EDF4;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>800</span></p> | |||
| width=128 style='width:96.0pt;border-top:none;border-left:none; border-bottom:solid white 1.0pt;border-right:solid white 1.0pt;background: #E9EDF4;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | | |||
|- style='height:29.25pt' | |||
| width=136 style='width:102.0pt;border:solid white 1.0pt;border-top:none; background:#D0D8E8;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | | |||
| width=136 style='width:102.0pt;border-top:none;border-left:none; border-bottom:solid white 1.0pt;border-right:solid white 1.0pt;background: #D0D8E8;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>Platen Power [W] </span></p> | |||
| width=108 style='width:81.0pt;border-top:none;border-left:none; border-bottom:solid white 1.0pt;border-right:solid white 1.0pt;background: #D0D8E8;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>200 </span></p> | |||
| width=119 style='width:89.0pt;border-top:none;border-left:none; border-bottom:solid white 1.0pt;border-right:solid white 1.0pt;background: #D0D8E8;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>200 </span></p> | |||
| width=121 style='width:91.0pt;border-top:none;border-left:none; border-bottom:solid white 1.0pt;border-right:solid white 1.0pt;background: #D0D8E8;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>100</span></p> | |||
| width=128 style='width:96.0pt;border-top:none;border-left:none; border-bottom:solid white 1.0pt;border-right:solid white 1.0pt;background: #D0D8E8;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | | |||
|- style='height:29.25pt' | |||
| width=136 style='width:102.0pt;border:solid white 1.0pt;border-top:none; background:#E9EDF4;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | | |||
| width=136 style='width:102.0pt;border-top:none;border-left:none; border-bottom:solid white 1.0pt;border-right:solid white 1.0pt;background: #E9EDF4;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>Platen temperature [<sup>o</sup>C] </span></p> | |||
| width=108 style='width:81.0pt;border-top:none;border-left:none; border-bottom:solid white 1.0pt;border-right:solid white 1.0pt;background: #E9EDF4;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>20 </span></p> | |||
| width=119 style='width:89.0pt;border-top:none;border-left:none; border-bottom:solid white 1.0pt;border-right:solid white 1.0pt;background: #E9EDF4;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>20 </span></p> | |||
| width=121 style='width:91.0pt;border-top:none;border-left:none; border-bottom:solid white 1.0pt;border-right:solid white 1.0pt;background: #E9EDF4;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>20</span></p> | |||
| width=128 style='width:96.0pt;border-top:none;border-left:none; border-bottom:solid white 1.0pt;border-right:solid white 1.0pt;background: #E9EDF4;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | | |||
|- style='height:29.25pt' | |||
| width=136 style='width:102.0pt;border:solid white 1.0pt;border-top:none; background:#D0D8E8;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | | |||
| width=136 style='width:102.0pt;border-top:none;border-left:none; border-bottom:solid white 1.0pt;border-right:solid white 1.0pt;background: #D0D8E8;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>Coil match</span></p> | |||
| width=108 style='width:81.0pt;border-top:none;border-left:none; border-bottom:solid white 1.0pt;border-right:solid white 1.0pt;background: #D0D8E8;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>50%, 30%</span></p> | |||
| width=119 style='width:89.0pt;border-top:none;border-left:none; border-bottom:solid white 1.0pt;border-right:solid white 1.0pt;background: #D0D8E8;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>59%, 27%</span></p> | |||
| width=121 style='width:91.0pt;border-top:none;border-left:none; border-bottom:solid white 1.0pt;border-right:solid white 1.0pt;background: #D0D8E8;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>60%,27%</span></p> | |||
| width=128 style='width:96.0pt;border-top:none;border-left:none; border-bottom:solid white 1.0pt;border-right:solid white 1.0pt;background: #D0D8E8;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | | |||
|- style='height:29.25pt' | |||
| width=136 style='width:102.0pt;border:solid white 1.0pt;border-top:none; background:#D0D8E8;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | | |||
| width=136 style='width:102.0pt;border-top:none;border-left:none; border-bottom:solid white 1.0pt;border-right:solid white 1.0pt;background: #D0D8E8;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>Platen Match</span></p> | |||
| width=108 style='width:81.0pt;border-top:none;border-left:none; border-bottom:solid white 1.0pt;border-right:solid white 1.0pt;background: #D0D8E8;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>50%, 57%</span></p> | |||
| width=119 style='width:89.0pt;border-top:none;border-left:none; border-bottom:solid white 1.0pt;border-right:solid white 1.0pt;background: #D0D8E8;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>44%, 56%</span></p> | |||
| width=121 style='width:91.0pt;border-top:none;border-left:none; border-bottom:solid white 1.0pt;border-right:solid white 1.0pt;background: #D0D8E8;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>40%,53%</span></p> | |||
| width=128 style='width:96.0pt;border-top:none;border-left:none; border-bottom:solid white 1.0pt;border-right:solid white 1.0pt;background: #D0D8E8;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | | |||
|- style='height:29.25pt' | |||
| width=136 style='width:102.0pt;border:solid white 1.0pt;border-top:none; background:#E9EDF4;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | | |||
| width=136 style='width:102.0pt;border-top:none;border-left:none; border-bottom:solid white 1.0pt;border-right:solid white 1.0pt;background: #E9EDF4;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>Throde valve opening rate</span></p> | |||
| width=108 style='width:81.0pt;border-top:none;border-left:none; border-bottom:solid white 1.0pt;border-right:solid white 1.0pt;background: #E9EDF4;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>10%</span></p> | |||
| width=119 style='width:89.0pt;border-top:none;border-left:none; border-bottom:solid white 1.0pt;border-right:solid white 1.0pt;background: #E9EDF4;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>13.6%</span></p> | |||
| width=121 style='width:91.0pt;border-top:none;border-left:none; border-bottom:solid white 1.0pt;border-right:solid white 1.0pt;background: #E9EDF4;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>17%</span></p> | |||
| width=128 style='width:96.0pt;border-top:none;border-left:none; border-bottom:solid white 1.0pt;border-right:solid white 1.0pt;background: #E9EDF4;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | | |||
|- style='height:52.5pt' | |||
| width=136 style='width:102.0pt;border:solid white 1.0pt;border-top:none; background:#D0D8E8;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:52.5pt' | | |||
| width=136 style='width:102.0pt;border-top:none;border-left:none; border-bottom:solid white 1.0pt;border-right:solid white 1.0pt;background: #D0D8E8;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:52.5pt' | <p class=MsoNormal><span lang=DA>Images </span></p> | |||
| width=108 style='width:81.0pt;border-top:none;border-left:none; border-bottom:solid white 1.0pt;border-right:solid white 1.0pt;background: #D0D8E8;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:52.5pt' | <p class=MsoNormal></p> | |||
| width=119 style='width:89.0pt;border-top:none;border-left:none; border-bottom:solid white 1.0pt;border-right:solid white 1.0pt;background: #D0D8E8;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:52.5pt' | <p class=MsoNormal>Images 2</p> | |||
| width=121 style='width:91.0pt;border-top:none;border-left:none; border-bottom:solid white 1.0pt;border-right:solid white 1.0pt;background: #D0D8E8;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:52.5pt' | <p class=MsoNormal>[[Specific_Process_Knowledge/Etch/ICP_Metal_Etcher/silicon_oxide/By_Peixiong/images_CF4#Images_stepper_6A1_feb262013_step9|Images]]</p> | |||
| width=128 valign=top style='width:96.0pt;border-top:none;border-left: none;border-bottom:solid white 1.0pt;border-right:solid white 1.0pt; background:#D0D8E8;padding:3.6pt 7.2pt 3.6pt 7.2pt;height:52.5pt' | <p class=MsoNormal></p> | |||
== | |- style='height:52.5pt' | ||
| width=136 style='width:102.0pt;border:solid white 1.0pt;border-top:none; background:#D0D8E8;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:52.5pt' | | |||
| width=136 style='width:102.0pt;border-top:none;border-left:none; border-bottom:solid white 1.0pt;border-right:solid white 1.0pt;background: #D0D8E8;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:52.5pt' | <p class=MsoNormal><span lang=DA>Comments </span></p> | |||
| width=108 style='width:81.0pt;border-top:none;border-left:none; border-bottom:solid white 1.0pt;border-right:solid white 1.0pt;background: #D0D8E8;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:52.5pt' | <p class=MsoNormal>Apox etch 550nm for 3min, side wall angle 71degree</p> | |||
| width=119 style='width:89.0pt;border-top:none;border-left:none; border-bottom:solid white 1.0pt;border-right:solid white 1.0pt;background: #D0D8E8;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:52.5pt' | <p class=MsoNormal>Too much polymer, etch Si too much</p><p class=MsoNormal>Etch through 500nm apox, then etch Si 180nm,</p> | |||
| width=121 style='width:91.0pt;border-top:none;border-left:none; border-bottom:solid white 1.0pt;border-right:solid white 1.0pt;background: #D0D8E8;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:52.5pt' | <p class=MsoNormal>Profile Very good, 2min etch SiO3 350nm in wafer center, | |||
310nm in wafer, resist etched 260nm</p> | |||
| width=128 valign=top style='width:96.0pt;border-top:none;border-left: none;border-bottom:solid white 1.0pt;border-right:solid white 1.0pt; background:#D0D8E8;padding:3.6pt 7.2pt 3.6pt 7.2pt;height:52.5pt' | <p class=MsoNormal>Low pressure gives better profile, less polymer, however, | |||
CF4 etch Si too quick</p> | |||
|}<p class=MsoNormal> </p></div> |
Latest revision as of 09:31, 10 February 2023
Feedback to this page: click here
This page is written by Berit Herstrøm @ DTU Nanolab (BGHE) if nothing else is stated
With C4F8 and H2 chemistry (all tests done by Peixiong Shi, DTU Nanolab)
Part 1
Very good |
Very good |
Very good |
Very good |
Very good |
Very good |
Unstable plasma at 2mtorr |
stable plasma at 2.5mtorr |
stable plasma at 2.5mtorr | ||
ICP metal etch SiO2 by reist mask try |
Date |
Feb262013 |
Feb272013 |
Feb272013 20:00 |
Feb272013 23:00 |
Feb282013 1am |
Feb282013 2am |
Feb282013 2am |
Feb282013 2am |
Feb2820134am |
Metal ICP recipe |
pxSiO2try5 |
pxSiO2try6 |
pxSiO2try7 |
pxSiO2try8 |
pxSiO2try8 |
pxSiO2try8 |
pxSiO2try9 |
pxSiO2try9 |
pxSiO2try9 | |
Wafer size and ID |
6inch, 6A1_feb252013 |
6inch, 6A4_feb262013 |
6inch, 6A6_feb262013 |
6inch, 6A2_feb272013 |
6inch, 6A3_feb272013 |
6inch, 6A4_feb272013 |
6inch, 6A5_feb272013 |
6inch, 6A5_feb272013 |
6inch, 6A6_feb272013 | |
Mask |
440nm resist on 62nmBarc on 1800nm apox, first etch barc 20sec by Ox plasma |
440nm resist on 62nmBarc on 1800nm apox, first etch barc 20sec by Ox plasma |
780nm resist on 62nmBarc on 1800nm apox, first etch barc 20sec by Ox plasma |
780nm resist on 62nmBarc on 800nm apox, first etch barc 20sec by Ox plasma |
780nm resist on 62nmBarc on 490nm apox, first etch barc 20sec by Ox plasma |
Blank Si |
780nm resist on 62nmBarc on 490nm apox, first etch barc 20sec by Ox plasma |
780nm resist on 62nmBarc on 490nm apox, first etch barc 20sec by Ox plasma |
780nm resist on 62nmBarc on 490nm apox, first etch barc 20sec by Ox plasma | |
Etch time |
2min |
4min |
4min |
4min |
5min |
4min |
1min |
4min |
5min | |
Pressure [mTorr] |
6 |
6 |
4 |
3 |
3 |
2 |
2 |
2.5 |
2.5 | |
C4F8 flow [sccm] |
0 |
20 |
10 |
8 |
8 |
8 |
8 |
8 |
8 | |
CF4 flow [sccm] |
40 |
0 |
0 |
0 |
0 |
0 |
0 |
0 |
0 | |
H2 flow [sccm] |
30 |
20 |
30 |
30 |
30 |
30 |
30 |
30 |
30 | |
CH4 flow [sccm] |
0 |
Set 20 real 3.7 |
Set 20 real 3.7 |
0 |
0 |
0 |
0 |
0 |
0 | |
Coil Power [W] |
800 |
800 |
800 |
800 |
800 |
800 |
800 |
800 reflect 13W |
800 reflect 8W | |
Platen Power [W] |
100 |
100 |
120 |
150 |
150 |
150 |
150 |
150 |
150reflect 0.2w | |
Platen temperature [oC] |
20 |
20 |
20 |
20 |
20 |
20 |
20 |
20 |
20 | |
Coil match |
60%,27% |
63%,25% |
63%,25% |
67%,24% |
67%,24% |
68.9%,24.1% |
68.9%,24.1% |
68.7%,25.3% |
68.87%,23.1% | |
Platen Match |
40%,53% |
36%,54% |
36%,54% |
34%,54% |
34%,54% |
34.3%,53.8% |
34.3%,53.8% |
36.8%,54.9% |
33.0%,54.4% | |
Throde valve opening rate |
17% |
12% |
14% |
14.7% |
14.7% |
14.7% |
14.7% |
16.2% |
||
Images |
Image1 |
Images3 |
Images4 |
Iamges5 |
Images6 |
Images7 |
||||
Comments |
Profile Very good, 2min etch SiO3 350nm in wafer center, 310nm in wafer, resist etched 260nm |
Profile Very good, 2min etch SiO3 350nm in wafer center, 310nm in wafer, resist etched 260nm |
Profile Very good, 4min etch SiO3 480nm in wafer center, Resist etched 100nm |
Profile Very good, 4min etch SiO3 480nm in wafer center, Resist etched 100nm, side wall 85degree |
Profile Very good, 4min etch SiO3 480nm in wafer center, Resist etched 100nm |
Plasma very stable on blank Si wafer |
Plasma not stable in apox wafer |
etched 500nm apox, resit 150n, slide wall 86degm |
Part2
ICP metal etch SiO2 by reist mask try |
stable plasma at 2.5mtorr |
stable plasma at 2.5mtorr |
Date |
Feb28204am |
March012013, 21 |
Metal ICP recipe |
pxSiO2try9 |
pxSiO2try9 |
Wafer size and ID |
6inch, 6A6_feb272013 |
6inch, 6A1_march012013 |
Mask |
780nm resist on 62nmBarc on 490nm apox, first etch barc 20sec by Ox plasma |
780nm resist on 62nmBarc on 490nm apox, first etch barc 20sec by Ox plasma |
Etch time |
5min |
65min |
Pressure [mTorr] |
2.5 |
2.5 |
C4F8 flow [sccm] |
8 |
8 |
CF4 flow [sccm] |
0 |
0 |
H2 flow [sccm] |
30 |
30 |
CH4 flow [sccm] |
0 |
0 |
Coil Power [W] |
800 reflect 8W |
800 reflect 8W |
Platen Power [W] |
150reflect 0.2w |
150reflect 0.2w |
Platen temperature [oC] |
20 |
20 |
Coil match |
68.87%,23.1% |
68.87%,23.1% |
Platen Match |
33.0%,54.4% |
33.0%,54.4% |
Throde valve opening rate |
10.8% to 11.7%, pressure 2.11 to 2.40, not stable | |
Comments |
SiO2 width 230nm |
With CF4 and H2 chemistry by Peixiong Shi, DTU Nanolab
Part 1
bad |
bad |
bad |
bad |
bad |
|
Date |
Feb122013 |
Feb122013 |
Feb122013 |
Feb122013 |
Feb122013 |
Metal ICP recipe |
pxSiO2try1 |
pxSiO2try1 |
pxSiO2try1 |
pxSiO2try2 |
pxSiO2try2 |
Wafer size and ID |
6inch 6A |
6inch 6A1_feb112013 |
6inch, 6A2_feb112013 |
6inch, 6A3_feb112013 |
6inch, 6A4_feb112013 |
Mask |
Blank Si dummy test |
Blank apox, 3539nm |
Blank KRF 347.9nm |
Blank KRF 345nm |
Blank apox 4623m |
Etch time |
2min |
2min |
1min |
1min |
1min |
Pressure [mTorr] |
8 |
8 |
8 |
20 |
20 |
C4F8 flow [sccm] |
20 |
20 |
20 |
20 |
|
CF4 flow [sccm] |
40 |
40 |
40 |
40 |
40 |
H2 flow [sccm] |
20 |
20 |
20 |
20 |
20 |
Coil Power [W] |
800 |
800 |
800 |
800 |
800 |
Platen Power [W] |
200 |
200 |
200 |
200 |
200 |
Platen temperature [oC] |
20 |
20 |
20 |
20 |
20 |
Coil match |
59%, 27% |
59%, 27% |
59%, 27% |
48%, 29% |
48%, 29% |
Platen Match |
45%, 56% |
45%, 56% |
45%, 56% |
52%, 60% |
52%, 60% |
Throde valve opening rate |
16% |
16% |
16% |
10.7% |
10.7% |
Etch rate |
µm/min |
Wf center 238µm/min Wafer edge 230nm/min |
Wafer center 170.5nm/min 1cm from wf edge , 204.1nm/min |
Wf center 80.4µm/min Wafer edge 119.6nm/min |
Wafer center 128.26nm/min, 1cm from wafer edge 123.09nm/min |
Distance from wf cent (mm) |
Seletivity at cent |
||||
Remaining APOX thickness nm |
Wf center 3062nm 1cm from wf edge: 3079nm |
Wf center nm |
Too much polymer in sem |
||
Comments |
Part 2
bad |
bad |
bad |
Very good |
||
ICP metal etch SiO2 by reist mask try |
Date |
Feb252013 |
Feb252013 |
Feb262013 |
|
Metal ICP recipe |
pxSiO2try3 |
pxSiO2try4 |
pxSiO2try5 |
||
Wafer size and ID |
6inch, 6A1_feb252013 |
6inch, 6A6_feb252013 |
6inch, 6A1_feb252013 |
||
Mask |
980nm resist resist on 62nmBarc on 1190nm apox |
780nm resist on 62nmBarc on 492nm apox, first etch barc 20sec by Ox plasma |
440nm resist on 62nmBarc on 1800nm apox, first etch barc 20sec by Ox plasma |
||
Etch time |
3min |
3min |
2min |
||
Pressure [mTorr] |
15 |
8 |
6 |
||
C4F8 flow [sccm] |
0 |
0 |
0 |
||
CF4 flow [sccm] |
40 |
40 |
40 |
||
H2 flow [sccm] |
30 |
30 |
30 |
||
Coil Power [W] |
800 |
800 |
800 |
||
Platen Power [W] |
200 |
200 |
100 |
||
Platen temperature [oC] |
20 |
20 |
20 |
||
Coil match |
50%, 30% |
59%, 27% |
60%,27% |
||
Platen Match |
50%, 57% |
44%, 56% |
40%,53% |
||
Throde valve opening rate |
10% |
13.6% |
17% |
||
Images |
Images 2 |
||||
Comments |
Apox etch 550nm for 3min, side wall angle 71degree |
Too much polymer, etch Si too much Etch through 500nm apox, then etch Si 180nm, |
Profile Very good, 2min etch SiO3 350nm in wafer center, 310nm in wafer, resist etched 260nm |
Low pressure gives better profile, less polymer, however, CF4 etch Si too quick |