Specific Process Knowledge/Pattern Design/Travka: Difference between revisions
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== The Travka mask set == | == The Travka mask set == | ||
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|+ '''Field distribution''' | |+ '''Field distribution''' | ||
|- | |- | ||
| style="background:silver; color:black" width="50" height="50" color align="center" valign="center" | | style="background:silver; color:black" width="50" height="50" color align="center" valign="center"| Dummy | ||
| style="background:silver; color:black" width="50" height="50" color align="center" valign="center" | | style="background:silver; color:black" width="50" height="50" color align="center" valign="center"| Dummy | ||
| style="background:red; color:black" width="50" height="50" color align="center" valign="center" | | style="background:red; color:black" width="50" height="50" color align="center" valign="center"| A-circle | ||
| style="background:fuchsia; color:black" width="50" height="50" color align="center" valign="center"| | | style="background:fuchsia; color:black" width="50" height="50" color align="center" valign="center"| PilCav | ||
| style="background:lime; color:black" width="50" height="50" color align="center" valign="center" | | style="background:lime; color:black" width="50" height="50" color align="center" valign="center"| Dektak | ||
| style="background:fuchsia; color:black" width="50" height="50" color align="center" valign="center"| | | style="background:fuchsia; color:black" width="50" height="50" color align="center" valign="center"| PilCav | ||
| style="background:red; color:black" width="50" height="50" color align="center" valign="center" | | style="background:red; color:black" width="50" height="50" color align="center" valign="center"| A-circle | ||
| style="background:silver; color:black" width="50" height="50" color align="center" valign="center" | | style="background:silver; color:black" width="50" height="50" color align="center" valign="center"| Dummy | ||
| style="background:silver; color:black" width="50" height="50" color align="center" valign="center" | | style="background:silver; color:black" width="50" height="50" color align="center" valign="center"| Dummy | ||
|- | |- | ||
| style="background:silver; color:black" width="50" height="50" color align="center" valign="center" | | style="background:silver; color:black" width="50" height="50" color align="center" valign="center"| Dummy | ||
| style="background:fuchsia; color:black" width="50" height="50" color align="center" valign="center"| | | style="background:fuchsia; color:black" width="50" height="50" color align="center" valign="center"| PilCav | ||
| style="background:olive; color:black" width="50" height="50" color align="center" valign="center" | | style="background:olive; color:black" width="50" height="50" color align="center" valign="center"| A-square | ||
| style="background:yellow; color:black" width="50" height="50" color align="center" valign="center" | | style="background:yellow; color:black" width="50" height="50" color align="center" valign="center"| Filmtek | ||
| style="background:aqua; color:black" width="50" height="50" color align="center" valign="center" | | style="background:aqua; color:black" width="50" height="50" color align="center" valign="center"| ASE | ||
| style="background:yellow; color:black" width="50" height="50" color align="center" valign="center" | | style="background:yellow; color:black" width="50" height="50" color align="center" valign="center"| Filmtek | ||
| style="background:olive; color:black" width="50" height="50" color align="center" valign="center" | | style="background:olive; color:black" width="50" height="50" color align="center" valign="center"| A-square | ||
| style="background:green; color:black" width="50" height="50" color align="center" valign="center"| [[/fields/deskew| Deskew]] | | style="background:green; color:black" width="50" height="50" color align="center" valign="center"| [[/fields/deskew| Deskew]] | ||
| style="background:silver; color:black" width="50" height="50" color align="center" valign="center" | | style="background:silver; color:black" width="50" height="50" color align="center" valign="center"| Dummy | ||
|- | |- | ||
| style="background:white; color:black" width="100" height="50" color align="center" valign="center" colspan="2"| [[/fields/Tridge| T-ridge]] | | style="background:white; color:black" width="100" height="50" color align="center" valign="center" colspan="2"| [[/fields/Tridge| T-ridge]] | ||
| style="background:teal; color:black" width="100" height="50" color align="center" valign="center" colspan="2"| [[/fields/Aline| A-line]] | | style="background:teal; color:black" width="100" height="50" color align="center" valign="center" colspan="2"| [[/fields/Aline| A-line]] | ||
| style="background:lime; color:black" width="50" height="50" color align="center" valign="center" | | style="background:lime; color:black" width="50" height="50" color align="center" valign="center"| Dektak | ||
| style="background:white; color:black" width="100" height="50" color align="center" valign="center" colspan="2"| [[/fields/Tridge| T-ridge]] | | style="background:white; color:black" width="100" height="50" color align="center" valign="center" colspan="2"| [[/fields/Tridge| T-ridge]] | ||
| style="background:teal; color:black" width="100" height="50" color align="center" valign="center" colspan="2"| [[/fields/Aline| A-line]] | | style="background:teal; color:black" width="100" height="50" color align="center" valign="center" colspan="2"| [[/fields/Aline| A-line]] | ||
|- | |- | ||
| style="background:yellow; color:black" width="50" height="50" color align="center" valign="center" | | style="background:yellow; color:black" width="50" height="50" color align="center" valign="center"| Filmtek | ||
| style="background:fuchsia; color:black" width="50" height="50" color align="center" valign="center"| | | style="background:fuchsia; color:black" width="50" height="50" color align="center" valign="center"| PilCav | ||
| style="background:red; color:black" width="50" height="50" color align="center" valign="center" | | style="background:red; color:black" width="50" height="50" color align="center" valign="center"| A-circle | ||
| style="background:yellow; color:black" width="50" height="50" color align="center" valign="center" | | style="background:yellow; color:black" width="50" height="50" color align="center" valign="center"| Filmtek | ||
| style="background:aqua; color:black" width="50" height="50" color align="center" valign="center" | | style="background:aqua; color:black" width="50" height="50" color align="center" valign="center"| ASE | ||
| style="background:yellow; color:black" width="50" height="50" color align="center" valign="center" | | style="background:yellow; color:black" width="50" height="50" color align="center" valign="center"| Filmtek | ||
| style="background:red; color:black" width="50" height="50" color align="center" valign="center" | | style="background:red; color:black" width="50" height="50" color align="center" valign="center"| A-circle | ||
| style="background:fuchsia; color:black" width="50" height="50" color align="center" valign="center"| | | style="background:fuchsia; color:black" width="50" height="50" color align="center" valign="center"| PilCav | ||
| style="background:yellow; color:black" width="50" height="50" color align="center" valign="center" | | style="background:yellow; color:black" width="50" height="50" color align="center" valign="center"| Filmtek | ||
|- | |- | ||
| style="background:lime; color:black" width="50" height="50" color align="center" valign="center" | | style="background:lime; color:black" width="50" height="50" color align="center" valign="center"| Dektak | ||
| style="background:aqua; color:black" width="50" height="50" color align="center" valign="center" | | style="background:aqua; color:black" width="50" height="50" color align="center" valign="center"| ASE | ||
| style="background:lime; color:black" width="50" height="50" color align="center" valign="center" | | style="background:lime; color:black" width="50" height="50" color align="center" valign="center"| Dektak | ||
| style="background:aqua; color:black" width="50" height="50" color align="center" valign="center" | | style="background:aqua; color:black" width="50" height="50" color align="center" valign="center"| ASE | ||
| style="background:lime; color:black" width="50" height="50" color align="center" valign="center" | | style="background:lime; color:black" width="50" height="50" color align="center" valign="center"| Dektak | ||
| style="background:aqua; color:black" width="50" height="50" color align="center" valign="center" | | style="background:aqua; color:black" width="50" height="50" color align="center" valign="center"| ASE | ||
| style="background:lime; color:black" width="50" height="50" color align="center" valign="center" | | style="background:lime; color:black" width="50" height="50" color align="center" valign="center"| Dektak | ||
| style="background:aqua; color:black" width="50" height="50" color align="center" valign="center" | | style="background:aqua; color:black" width="50" height="50" color align="center" valign="center"| ASE | ||
| style="background:lime; color:black" width="50" height="50" color align="center" valign="center" | | style="background:lime; color:black" width="50" height="50" color align="center" valign="center"| Dektak | ||
|- | |- | ||
| style="background:yellow; color:black" width="50" height="50" color align="center" valign="center" | | style="background:yellow; color:black" width="50" height="50" color align="center" valign="center"| Filmtek | ||
| style="background:fuchsia; color:black" width="50" height="50" color align="center" valign="center"| | | style="background:fuchsia; color:black" width="50" height="50" color align="center" valign="center"| PilCav | ||
| style="background:red; color:black" width="50" height="50" color align="center" valign="center" | | style="background:red; color:black" width="50" height="50" color align="center" valign="center"| A-circle | ||
| style="background:yellow; color:black" width="50" height="50" color align="center" valign="center" | | style="background:yellow; color:black" width="50" height="50" color align="center" valign="center"| Filmtek | ||
| style="background:aqua; color:black" width="50" height="50" color align="center" valign="center" | | style="background:aqua; color:black" width="50" height="50" color align="center" valign="center"| ASE | ||
| style="background:yellow; color:black" width="50" height="50" color align="center" valign="center" | | style="background:yellow; color:black" width="50" height="50" color align="center" valign="center"| Filmtek | ||
| style="background:red; color:black" width="50" height="50" color align="center" valign="center" | | style="background:red; color:black" width="50" height="50" color align="center" valign="center"| A-circle | ||
| style="background:fuchsia; color:black" width="50" height="50" color align="center" valign="center"| | | style="background:fuchsia; color:black" width="50" height="50" color align="center" valign="center"| PilCav | ||
| style="background:yellow; color:black" width="50" height="50" color align="center" valign="center" | | style="background:yellow; color:black" width="50" height="50" color align="center" valign="center"| Filmtek | ||
|- | |- | ||
| style="background:teal; color:black" width="100" height="50" color align="center" valign="center" colspan="2"| [[/fields/Aline| A-line]] | | style="background:teal; color:black" width="100" height="50" color align="center" valign="center" colspan="2"| [[/fields/Aline| A-line]] | ||
| style="background:white; color:black" width="100" height="50" color align="center" valign="center" colspan="2"| [[/fields/Tridge| T-ridge]] | | style="background:white; color:black" width="100" height="50" color align="center" valign="center" colspan="2"| [[/fields/Tridge| T-ridge]] | ||
| style="background:lime; color:black" width="50" height="50" color align="center" valign="center" | | style="background:lime; color:black" width="50" height="50" color align="center" valign="center"| Dektak | ||
| style="background:teal; color:black" width="100" height="50" color align="center" valign="center" colspan="2"| [[/fields/Aline| A-line]] | | style="background:teal; color:black" width="100" height="50" color align="center" valign="center" colspan="2"| [[/fields/Aline| A-line]] | ||
| style="background:white; color:black" width="100" height="50" color align="center" valign="center" colspan="2"| [[/fields/Tridge| T-ridge]] | | style="background:white; color:black" width="100" height="50" color align="center" valign="center" colspan="2"| [[/fields/Tridge| T-ridge]] | ||
|- | |- | ||
| style="background:silver; color:black" width="50" height="50" color align="center" valign="center" | | style="background:silver; color:black" width="50" height="50" color align="center" valign="center"| Dummy | ||
| style="background:green; color:black" width="50" height="50" color align="center" valign="center"| [[/fields/deskew| Deskew]] | | style="background:green; color:black" width="50" height="50" color align="center" valign="center"| [[/fields/deskew| Deskew]] | ||
| style="background:olive; color:black" width="50" height="50" color align="center" valign="center" | | style="background:olive; color:black" width="50" height="50" color align="center" valign="center"| A-square | ||
| style="background:yellow; color:black" width="50" height="50" color align="center" valign="center" | | style="background:yellow; color:black" width="50" height="50" color align="center" valign="center"| Filmtek | ||
| style="background:aqua; color:black" width="50" height="50" color align="center" valign="center" | | style="background:aqua; color:black" width="50" height="50" color align="center" valign="center"| ASE | ||
| style="background:yellow; color:black" width="50" height="50" color align="center" valign="center" | | style="background:yellow; color:black" width="50" height="50" color align="center" valign="center"| Filmtek | ||
| style="background:olive; color:black" width="50" height="50" color align="center" valign="center" | | style="background:olive; color:black" width="50" height="50" color align="center" valign="center"| A-square | ||
| style="background:fuchsia; color:black" width="50" height="50" color align="center" valign="center"| | | style="background:fuchsia; color:black" width="50" height="50" color align="center" valign="center"| PilCav | ||
| style="background:silver; color:black" width="50" height="50" color align="center" valign="center" | | style="background:silver; color:black" width="50" height="50" color align="center" valign="center"| Dummy | ||
|- | |- | ||
| style="background:silver; color:black" width="50" height="50" color align="center" valign="center" | | style="background:silver; color:black" width="50" height="50" color align="center" valign="center"| Dummy | ||
| style="background:silver; color:black" width="50" height="50" color align="center" valign="center" | | style="background:silver; color:black" width="50" height="50" color align="center" valign="center"| Dummy | ||
| style="background:red; color:black" width="50" height="50" color align="center" valign="center" | | style="background:red; color:black" width="50" height="50" color align="center" valign="center"| A-circle | ||
| style="background:fuchsia; color:black" width="50" height="50" color align="center" valign="center"| | | style="background:fuchsia; color:black" width="50" height="50" color align="center" valign="center"| PilCav | ||
| style="background:lime; color:black" width="50" height="50" color align="center" valign="center" | | style="background:lime; color:black" width="50" height="50" color align="center" valign="center"| Dektak | ||
| style="background:fuchsia; color:black" width="50" height="50" color align="center" valign="center"| | | style="background:fuchsia; color:black" width="50" height="50" color align="center" valign="center"| PilCav | ||
| style="background:red; color:black" width="50" height="50" color align="center" valign="center" | | style="background:red; color:black" width="50" height="50" color align="center" valign="center"| A-circle | ||
| style="background:silver; color:black" width="50" height="50" color align="center" valign="center" | | style="background:silver; color:black" width="50" height="50" color align="center" valign="center"| Dummy | ||
| style="background:silver; color:black" width="50" height="50" color align="center" valign="center" | | style="background:silver; color:black" width="50" height="50" color align="center" valign="center"| Dummy | ||
|- | |- | ||
|} | |} | ||
Latest revision as of 09:33, 28 June 2023
Feedback to this page: click here
This page is written by DTU Nanolab internal
The Travka mask set
The travka mask set consists of 7 masks:
- Travka 05 with L-Edit design file: File:Travka 05.tdb and cif file File:Travka 05.cif
- Travka 10 with L-Edit design file: File:Travka 10.tdb and cif file File:Travka 10.cif
- Travka 20 with L-Edit design file: File:Travka 20.tdb and cif file File:Travka 20.cif
- Travka 35 with L-Edit design file: File:Travka 35.tdb and cif file File:Travka 35.cif
- Travka 50 with L-Edit design file: File:Travka 50.tdb and cif file File:Travka 50.cif
- Travka 65 with L-Edit design file: File:Travka 65.tdb and cif file File:Travka 65.cif
- Travka 80 with L-Edit design file: File:Travka 80.tdb and cif file File:Travka 80.cif
The numbers in the end of the mask names refer to the average exposed area of a positive photolithography process. The masks are designed for characterisation of dry etches and holds a number of 1x1 or 1x2 cm fields. The positions of these fields are the same on all masks.
Each field has a number of features (for instance trenches of variable widths) distributed in such a way that the exposed area within the field corresponds to value for each mask.
Below is shown the field distribution on a 4 inch wafer. Click on the links in the figure to find more information on the individual fields.
| Dummy | Dummy | A-circle | PilCav | Dektak | PilCav | A-circle | Dummy | Dummy |
| Dummy | PilCav | A-square | Filmtek | ASE | Filmtek | A-square | Deskew | Dummy |
| T-ridge | A-line | Dektak | T-ridge | A-line | ||||
| Filmtek | PilCav | A-circle | Filmtek | ASE | Filmtek | A-circle | PilCav | Filmtek |
| Dektak | ASE | Dektak | ASE | Dektak | ASE | Dektak | ASE | Dektak |
| Filmtek | PilCav | A-circle | Filmtek | ASE | Filmtek | A-circle | PilCav | Filmtek |
| A-line | T-ridge | Dektak | A-line | T-ridge | ||||
| Dummy | Deskew | A-square | Filmtek | ASE | Filmtek | A-square | PilCav | Dummy |
| Dummy | Dummy | A-circle | PilCav | Dektak | PilCav | A-circle | Dummy | Dummy |