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Specific Process Knowledge/Etch/Etching of Polymer/Polymer Etch by ASE: Difference between revisions

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'''Feedback to this page''': '''[mailto:labadviser@danchip.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowledge/Etch/Etching_of_Polymer/Polymer_Etch_by_ASE click here]'''
'''Feedback to this page''': '''[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php/Specific_Process_Knowledge/Etch/Etching_of_Polymer/Polymer_Etch_by_ASE click here]'''
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<!--Page reviewed by jmli 9/8-2022  -->
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= Etching of polymers on the ASE =
= Etching of polymers on the ASE =
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! colspan="2" align="center"| Materials
! colspan="2" align="center"| Materials
! colspan="8" align="center"| Process parameters  
! colspan="8" align="center"| Process parameters  
! rowspan="2" align="center" width="300" | Comments by Kevin Riddell SPTS prior to any tests at Danchip
! rowspan="2" align="center" width="300" | Comments by Kevin Riddell SPTS prior to any tests at Nanolab
|-
|-
| Mask
| Mask
| Etched
| Etched
| O<sub>2</sub>
| O<sub>2</sub>
| CO<sub>2</sub>
| CO<sub>2</sub> (no available anymore)
| SF<sub>6</sub>
| SF<sub>6</sub>
| He/Ar
| He/Ar
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