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= XPS data processing guide =
= XPS data processing guide =


This section is intended as an introduction to the analysis of XPS data. Simple examples are chosen to illustrate the procedures. All actions performed with Avantage (version 5.498) during an analysis of a sample are shown.  
This section is intended as an introduction to the analysis of XPS data. Simple examples are chosen to illustrate the procedures. All actions performed with Avantage (version 5.498) during an analysis of a sample are shown.  


== Open data and save the processing document ==
In case you want to follow along with your own analysis, you can download the data from [[Media:20150518_ZnO_CuZn_ZnO.doc| here (this file is a .zip file that has been renamed to .doc in order to be uploaded to LabAdviser, so download and rename to .zip and extract the files)]]
 
Locate the .VGX file in the experiment data tree. Either open the experiment by selecting 'Open Experiment' in Avantage, or double click on the .VGX file. You will see something like this:
 
[[File:XPS-basics00.jpg|700px]]
 
It is a very good idea to save the processing document as you analyze the data (Avantage may crash some times) - to do so, select 'Save Processing Document' and you analysis will be saved as a .VGD file.
 
== Spectrum views ==
<span style="font-size: 90%; text-align: right;">[[Specific_Process_Knowledge/Characterization/XPS/Processing/Basics#top|Go to top of this page]]</span>
 
To start analysing the data we will start by looking at the survey spectrum. Open a new processing document by clicking the button in the toolbar to the left as shown below:
 
[[File:XPS-basics01.jpg|700px]]
 
This will spawn a tab with an empty processing grid.
 
Then drag the survey spectrum into one of the quadrants in the data grid as shown below:
 
[[File:XPS-basics02.jpg|700px]]
 
Use the buttons as shown to the right below with the red square to  
* Maximize spectrum views
* Minimize spectrum views
* Add or remove rows/columns
 
[[File:XPS-basics03a.jpg|700px]]
 
See section below on how to use the zoom capability.
 
== Views of data with several levels ==
<span style="font-size: 90%; text-align: right;">[[Specific_Process_Knowledge/Characterization/XPS/Processing/Basics#top|Go to top of this page]]</span>
 
As shown in the bottom of the image below, some experiments hold several levels - the reason is that the exeriment is a depth profile in which a repeated set of  spectra of a sample are recorded as the surface is gradually removed by an ion bombardment. Scroll through the individual levels, either by using the 'Etch time' or 'Etch Level' scroll buttons and see how the spectra change. Level 0 is the first spectrum.
 
[[File:XPS-basics03b.jpg|700px]]
 
The view called 'Single Trace' displays only one level. Change the display mode to view the complete set of levels:
 
<gallery caption="Different views of spectra in experiments with several levels" widths="350" heights="250" perrow="2">
Image:XPS-basics03display1.jpg | 2D Chart view
Image:XPS-basics03display2.jpg | Stacked Chart view
Image:XPS-basics03display3.jpg | 3D Chart view
Image:XPS-basics03display4.jpg | Image view
</gallery>
 
== Automatic peak identification of survey spectra ==
 
<span style="font-size: 90%; text-align: right;">[[Specific_Process_Knowledge/Characterization/XPS/Processing/Basics#top|Go to top of this page]]</span>
 
In the top are several buttons in the 'Analysis' toolbar. Click the leftmost one called Automatic Survey ID and a automated peak identification routine will commence. The result is shown below:
 
[[File:XPS-basics06.jpg|700px]]


Several things are worth noting:
# [[Specific Process Knowledge/Characterization/XPS/Processing/Basics/1intro|Survey spectra analysis]]
* A peak table pops up above the spectrum. It contains information (which elements, fitted atomic percentages etc.) obtained in the automatic fitting routine. One can still scroll through the levels (if more levels in a depth profile are available) but the elements fitted will not change.
## [[Specific Process Knowledge/Characterization/XPS/Processing/Basics/1intro#Open_data_and_save_the_processing_document|Open data]]
* Only a fraction of the peaks in the spectrum have labels. The reason is that only the peaks from the peak table have a label - the remaining peaks in the spectrum are NOT unidentified elements but other peaks of the element already identified.
## [[Specific Process Knowledge/Characterization/XPS/Processing/Basics/1intro#Spectrum_views|Spectrum views]]
## [[Specific Process Knowledge/Characterization/XPS/Processing/Basics/1intro#Views_of_data_with_several_etch_levels|View of data with several levels]]
## [[Specific Process Knowledge/Characterization/XPS/Processing/Basics/1intro#Zooming|Zooming]]
## [[Specific Process Knowledge/Characterization/XPS/Processing/Basics/1intro#Automatic_peak_identification_of_survey_spectra|Automatic peak ID]]
## [[Specific Process Knowledge/Characterization/XPS/Processing/Basics/1intro#Manually_add_peaks_to_identification_of_survey_spectra|Manual ID]]
## [[Specific Process Knowledge/Characterization/XPS/Processing/Basics/1intro#Make_a_depth_profile_from_survey_spectrum|Depth profile]]
# [[Specific Process Knowledge/Characterization/XPS/Processing/Basics/2highres|High resolution spectra analysis]]
## [[Specific Process Knowledge/Characterization/XPS/Processing/Basics/2highres#Selecting_high_resolution_spectra_for_peak_fitting|Open spectra]]
## [[Specific Process Knowledge/Characterization/XPS/Processing/Basics/2highres#Peak_fitting|Peak fitting]]
## [[Specific Process Knowledge/Characterization/XPS/Processing/Basics/2highres#Verify_correctness_of_fitting_routine|Ensure correct fitting parameters]]
## [[Specific Process Knowledge/Characterization/XPS/Processing/Basics/2highres#Change_fitting_constraints|Apply constraints]]
# [[Specific Process Knowledge/Characterization/XPS/Processing/Basics/3fitting|Complete the analysis]]

Latest revision as of 15:50, 8 May 2023

Feedback to this page: click here

Unless otherwise stated, all content on this page was created by Jonas Michael-Lindhard, DTU Nanolab

XPS data processing guide

This section is intended as an introduction to the analysis of XPS data. Simple examples are chosen to illustrate the procedures. All actions performed with Avantage (version 5.498) during an analysis of a sample are shown.

In case you want to follow along with your own analysis, you can download the data from here (this file is a .zip file that has been renamed to .doc in order to be uploaded to LabAdviser, so download and rename to .zip and extract the files)

  1. Survey spectra analysis
    1. Open data
    2. Spectrum views
    3. View of data with several levels
    4. Zooming
    5. Automatic peak ID
    6. Manual ID
    7. Depth profile
  2. High resolution spectra analysis
    1. Open spectra
    2. Peak fitting
    3. Ensure correct fitting parameters
    4. Apply constraints
  3. Complete the analysis
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