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= Element analysis at Nanolab =


= Element analysis at Danchip =
The following techniques for elemental analysis are available at Nanolab.  
 
The following techniques for elemental analysis are available at Danchip.  
* EDX
* EDX
* SIMS
* SIMS (no longer available at DTU Nanolab, SIMS service can be provided by [http://www.eag.com/ EAG Laboratories])
* XPS (ESCA)
* XPS (ESCA)
In the table below the three techniques are compared  
In the table below the three techniques are compared  
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== Comparison of EDX, SIMS and XPS ==
== Comparison of EDX, SIMS and XPS ==


{| border="2" cellspacing="0" cellpadding="2" align="center"
{| border="2" cellspacing="0" cellpadding="2" align="left"
!width="100" style="background:silver; color:black" |
!width="100" style="background:silver; color:black" |
!width="250" style="background:silver; color:black" | SEM with [[Specific Process Knowledge/Characterization/EDX|EDX]]
!width="250" style="background:silver; color:black" | SEM with [[Specific Process Knowledge/Characterization/EDX|EDX]]
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|-
|-
! style="background:WhiteSmoke; color:black" | Speed of measurement
! style="background:WhiteSmoke; color:black" | Speed of measurement
| style="background:WhiteSmoke; color:black" | Quite fast and easy  
| style="background:WhiteSmoke; color:black" | Very fast and easy  
| style="background:WhiteSmoke; color:black" | Time consuming
| style="background:WhiteSmoke; color:black" | Time consuming
| style="background:WhiteSmoke; color:black" | Quite fast and easy  
| style="background:WhiteSmoke; color:black" | Quite fast and easy  
|}
|}
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