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| '''Feedback to this page''': '''[mailto:labadviser@danchip.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowledge/Characterization/SIMS:_Secondary_Ion_Mass_Spectrometry click here]''' | | '''Feedback to this page''': '''[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php/Specific_Process_Knowledge/Characterization/SIMS:_Secondary_Ion_Mass_Spectrometry click here]''' |
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| | ==Atomika SIMS '''NO LONGER AVAILABLE''' == |
| | {{Template:Author-jmli1}} |
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| ==Atomika SIMS==
| | '''We have decommissioned the SIMS we had at DTU Nanolab. We can guide you to another site for SIMS analysis, take a look here: [http://www.eag.com/secondary-ion-mass-spectrometry-sims/].''' |
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| [[Image:Equipment_SIMS.jpg|300x300px|thumb|Atomika SIMS: positioned in the basement of building 346 (underneath the cleanroom).]]
| | The SIMS analyses the composition of a sample by secondary ion mass spectroscopy. By using either oxygen or cesium ions accelerated by a high tension the surface of the sample is sputtered off as ions. These ions are analysed in a mass spectrometer and one can determine the elemental composition as a function of depth. If compared to signals from reference materials one can quantify the atomic composition - in certain cases down to extremely low concentrations (ppm). Doping levels and impurities may be determined.. |
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| The Atomika SIMS analyses the composition of a sample by secondary ion mass spectroscopy. By using either oxygen or cesium ions accelerated by a high tension the surface of the sample is sputtered off as ions. These ions are analysed in a mass spectrometer and one can determine the elemental composition as a function of depth. If compared to signals from reference materials one can quantify the atomic composition - in certain cases down to extremely low concentrations (ppm). Doping levels and impurities may be determined. | |
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| Please note that no user will be instructed on the SIMS. Danchip staff will run your samples.
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| '''The user manual and technical information and contact information can be found in LabManager:'''
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| [http://labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=23 The Atomika SIMS in Labmanager]
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| ==An overview of the performance of the SIMS==
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| {| border="2" cellspacing="0" cellpadding="10"
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| !style="background:silver; color:black;" align="left"|Purpose
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| |style="background:LightGrey; color:black"| Determination of atomic composition
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| |style="background:WhiteSmoke; color:black"|
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| * Doping level
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| * Sample contamination
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| !style="background:silver; color:black" align="left"|Performance
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| |style="background:LightGrey; color:black"|Measurement accuracy depends on
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| |style="background:WhiteSmoke; color:black"|
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| * Which atoms to be analysed
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| * The sample morphology (flat samples are much more suited than particles)
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| !style="background:silver; color:black" align="left" rowspan="3"|Process parameters
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| |style="background:LightGrey; color:black"| Ion gun parameters
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| |style="background:WhiteSmoke; color:black"|
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| * Acceleration voltages and focusing lens parameters
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| * Gas inlet pressures and apertures
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| |style="background:LightGrey; color:black"| Mass spectrometer parameters
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| |style="background:WhiteSmoke; color:black"|
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| * Detector biases and range
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| * Scan parameters such as raster size, speeds and pattern
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| |style="background:LightGrey; color:black"| Sample position
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| |style="background:WhiteSmoke; color:black"|
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| * Angle towards spectrometer
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| * For non-conducting samples: Flood gun parameters
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| !style="background:silver; color:black" align="left" rowspan="3" |Sample requirements
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| |style="background:LightGrey; color:black"|Substrate material allowed
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| |style="background:WhiteSmoke; color:black"|
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| *In principle all materials
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| |style="background:LightGrey; color:black"|Substrate size
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| |style="background:WhiteSmoke; color:black"|
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| * The samples must be cut into 5x5 or 7x7 mm pieces
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| * Other types of samples must be mounted onto appropriately sized carriers
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| |style="background:LightGrey; color:black"|Batch size
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| |style="background:WhiteSmoke; color:black"|
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| * The sample holder carries up to 6 samples at the time
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| |}
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| == Secondary Ion Mass Spectrometry (SIMS) ==
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| In the Atomika SIMS the samples are bombarded with a beam of either oxygen or caesium ions. When accelerated to high energy and rastered across the sample
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| these ions will be able to gradually sputter off the surface atoms in a small area defined by the raster pattern. Some of the surface atoms are emitted as ionized particles. In this way one layer after another is peeled off the sample.
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| These charged species are led through a mass spectrometer where a magnetic field is used to deflect them. The deflection increases with charge and decreases with mass and we are therefore able detect and count them according to their mass. This technique is called Secondary Ion Mass Spectrometry or SIMS.
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| === Typical application of SIMS ===
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| SIMS is the most sensitive technique for elemental composition. It is therefore ideal if you want to check doping profiles or for contaminations.
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| A typical application would be to check the concentration profile of boron doping in silicon. In that case one would put two samples into the SIMS.
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| * A reference sample with a known boron profile
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| * A sample
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Feedback to this page: click here
Atomika SIMS NO LONGER AVAILABLE
Unless otherwise stated, all content on this page was created by Jonas Michael-Lindhard, DTU Nanolab
We have decommissioned the SIMS we had at DTU Nanolab. We can guide you to another site for SIMS analysis, take a look here: [1].
The SIMS analyses the composition of a sample by secondary ion mass spectroscopy. By using either oxygen or cesium ions accelerated by a high tension the surface of the sample is sputtered off as ions. These ions are analysed in a mass spectrometer and one can determine the elemental composition as a function of depth. If compared to signals from reference materials one can quantify the atomic composition - in certain cases down to extremely low concentrations (ppm). Doping levels and impurities may be determined..
