Specific Process Knowledge/Wafer and sample drying/Spin Dryers: Difference between revisions

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-'''The user manual, technical information, and contact information can be found in LabManager: [http://labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=156 Spin dryer 1] [http://labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=157 Spin dryer 2] [http://labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=158 Spin dryer 3] [http://labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=256 Spindryer 4 (4",6")]'''
+'''The user manual, technical information, and contact information can be found in LabManager: [http://labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=157 Spin dryer 2] [http://labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=158 Spin dryer 3] [https://labmanager.dtu.dk/function.php?module=Machine&view=view&mach=408 Spin dryer 5][https://labmanager.dtu.dk/function.php?module=Machine&view=view&mach=323 Spindryer 6 (8")]'''
@@ Line 30: / Line 30: @@
 !colspan="2" border="none" style="background:silver; color:black;" align="center"|Equipment
-|style="background:WhiteSmoke; color:black"|<b>Spin dryer 1</b>
 |style="background:WhiteSmoke; color:black"|<b>Spin dryer 2</b>
 |style="background:WhiteSmoke; color:black"|<b>Spin dryer 3</b>
-|style="background:WhiteSmoke; color:black"|<b>Spin dryer 4</b>
+|style="background:WhiteSmoke; color:black"|<b>Spin dryer 5</b>
+|style="background:WhiteSmoke; color:black"|<b>Spin dryer 6</b>
 |-
 !style="background:silver; color:black;" align="center" width="60"|Location
 |style="background:LightGrey; color:black"|
 |style="background:WhiteSmoke; color:black"|
-*C-1
+*B-1
 |style="background:WhiteSmoke; color:black"|
-*B-1
+*D-3
 |style="background:WhiteSmoke; color:black"|
-*D-4
+*D-3
 |style="background:WhiteSmoke; color:black"|
-*E-5
+*F-3
 |-
 !style="background:silver; color:black;" align="center" width="60"|Purpose
@@ Line 52: / Line 52: @@
 |style="background:WhiteSmoke; color:black"|
 *Drying
+*Rinsing + drying
 |style="background:WhiteSmoke; color:black"|
 *Drying
@@ Line 64: / Line 65: @@
 |style="background:WhiteSmoke; color:black"|
 *1-25 100 mm wafers
+*1-25 150 mm wafers
 |style="background:WhiteSmoke; color:black"|
 *1-25 100 mm wafers
 *1-25 150 mm wafers
 |style="background:WhiteSmoke; color:black"|
-*? 50 mm wafers
 *1-25 100 mm wafers
 *1-25 150 mm wafers
+*1-25 200 mm wafers
 |-
 | style="background:LightGrey; color:black"|Allowed materials
+|style="background:WhiteSmoke; color:black"|
+*Only for RCA cleaned wafers
 |style="background:WhiteSmoke; color:black"|
 *No restrictions
-|style="background:WhiteSmoke; color:black"|
-*Only for RCA cleaned wafers
 |style="background:WhiteSmoke; color:black"|
 *No restrictions