Specific Process Knowledge/Characterization/PL mapper: Difference between revisions

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-'''Feedback to this page''': '''[mailto:danchipsupport@danchip.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.danchip.dtu.dk/index.php?title=Specific_Process_Knowledge/III-V_Process/characterisation/PL_Mapper click here]'''
+{{cc-nanolab}}
-==PhotoLuminescense Mapper RPM2000 ==
+'''Feedback to this page''': '''[mailto:labadviser@Nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.Nanolab.dtu.dk/index.php?title=Specific_Process_Knowledge/characterisation/PL_Mapper click here]'''
+<br>
+<br>
+==PhotoLuminescence Mapper RPM2000 ==
-Photoluminiscense mapping is a non-contact, non-destructive technique for mapping out uniformity of alloy composition, material quality and defects in substrates and of III-V epiwafers. The Rapid Photoluminiscense Mapper (RPM) is equipped with 3 lasers for PL measurements and a white-light source to map out thickness and reflectance of eg layers, microcavities and VCSELs.
+[[Image:PL-mapper.jpg|500px|right|thumb|Positioned in the MOCVD room: F-1, {{photo1}}]]
+Photoluminescence mapping is a non-contact, non-destructive technique for mapping out uniformity of alloy composition, material quality and defects in substrates and of III-V epiwafers. The Rapid Photoluminiscence Mapper (RPM) is equipped with 3 lasers for PL measurements and a white-light source to map out thickness and reflectance of eg layers, microcavities and VCSELs.
-'''The user manual and contact information can be found in LabManager:'''
+[[Image:Wafer-bonding PL-mapper (LabAdviser) Jehem.jpg|500px|right|thumb|Map of two bonded silicon wafers. Red areas are voids between the wafers, Made by Jens Hemmingsen @ DTU Nanolab]]
+It can also be used to map out voids after silicon wafer-bonding. This is done using the reflectance mapping and is using the fact that silicon is transparent for wavelengths above ~1000nm. A void will therefor change the reflectance in that wavelength range. See datasheet below (Thanks to Jens Hemmingsen for the data).
-[http://www.labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=152 PL mapper]
-[[Image:PL-mapper.jpg|500px|right|thumb|Positioned in the MOCVD room: F-1]]
+The user manual and contact information can be found in [http://www.labmanager.dtu.dk/function.php?module=Machine&view=view&mach=152 '''LabManager'''].
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 |style="background:LightGrey; color:black"|RPM viewer
 |style="background:WhiteSmoke; color:black"|
-*Software (free) to view and re-analyse the maps and spectra can be found on Labmanager.
+*Only on the local PC at the system
-*Direct link to file download [http://labmanager.danchip.dtu.dk/view_binary.php?fileId=832 RPM2000 analysis software].
-*The software will request you to get a (free) license key from Nanometrics.
 |}