Specific Process Knowledge/Back-end processing/Wire Bonder: Difference between revisions

From LabAdviser
Kabi (talk | contribs)
Jehan (talk | contribs)
 
(15 intermediate revisions by 2 users not shown)
Line 1: Line 1:
'''Feedback to this page''': '''[mailto:danchipsupport@danchip.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowledge/Back-end_processing/Wire_Bonder#Ball_Wire_Bonder_K.26S_4524 click here]'''
'''Feedback to this page''': '''[mailto:danchipsupport@danchip.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowledge/Back-end_processing/Wire_Bonder#Ball_Wire_Bonder_K.26S_4524 click here]'''
<!-- Replace "http://labadviser.danchip.dtu.dk/..." wih the link to the Labadviser page-->
<!-- Replace "http://labadviser.danchip.dtu.dk/..." wih the link to the Labadviser page-->
{{CC1}}


==TPT Wire Bonder==
==TPT Wire Bonder==
[[Image:TPT-wirebonder.jpg|300x300px|thumb|TPT Wire Bonder,<br/> Packlab, Building 347, 2nd floor]]
[[Image:bond head - wedge insert.jpg|100px|thumb|TPT wire bonder<br/>Bond head with insert showing wedge capillary]]


The TPT Wire Bonder is bought i 2007. Wire bonding is a method of making interconnections between a microchip and other electronics as part of semiconductor device fabrication. The TPT-H05 is a manuel wire bonder.  
[[Image:section under construction.jpg|70px]] ''Will be temporary taken out of service during the PolyFabLab construction.''


'''The user manual(s), quality control procedure(s) and results, user APV(s), technical information and contact information can be found in LabManager:'''  
The TPT Wire Bonder is bought i 2007. Wire bonding is a method of making interconnections between a microchip and other electronics as part of semiconductor device fabrication. The TPT-H05 is a manuel wire bonder. It is possible to do wedge bonding with either aluminum wires or gold wires as well as gold ball bonding.
 
'''The user manual(s), user APV(s), technical information and contact information can be found in LabManager (requires login):'''  
<!-- remember to remove the type of documents that are not present -->
<!-- remember to remove the type of documents that are not present -->


Line 14: Line 18:


==Ball Wire Bonder K&S 4524==
==Ball Wire Bonder K&S 4524==
[[Image:K&S_4524_ball_wire-bonder.jpg|300x300px|thumb|The Ball Wire Bonder K&S 4524, <br/> Packlab, Building 347, 2nd floor]]
<!-- copyright issue kabi
[[Image:K&S_4524_ball_wire-bonder.jpg|300x300px|thumb|The Ball Wire Bonder K&S 4524, <br/> Packlab, Building 347, 1st floor]]
-->
 
<!-- copyright issue kabi
[[Image:TPTwirebonder_wedge_ball.jpg|300x300px|thumb|Wire bondings: Left: wedge bonding - Right: ball bonding]]
[[Image:TPTwirebonder_wedge_ball.jpg|300x300px|thumb|Wire bondings: Left: wedge bonding - Right: ball bonding]]
-->
[[Image:section under construction.jpg|70px]] ''Will be moved to building 451 during the PolyFabLab construction.''


The Ball Wire Bonder K&S 4524 is for high precision ball bonding. It is a semi-automatic wire bonder with good control of bond placement and bonding parameters.  
The Ball Wire Bonder K&S 4524 is for high precision ball bonding. It is a semi-automatic wire bonder with good control of bond placement and bonding parameters.  
 
[[Image:K-S 4524 wirebonder DTU.jpg|thumb|300px|K&S 4524 ball wire bonder]]
'''The user manual(s), quality control procedure(s) and results, user APV(s), technical information and contact information can be found in LabManager:'''  
 
'''The user manual(s), user APV(s), technical information and contact information can be found in LabManager (requires login):'''  
<!-- remember to remove the type of documents that are not present -->
<!-- remember to remove the type of documents that are not present -->


Line 25: Line 37:
[http://labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=307 Ball Wire Bonder]
[http://labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=307 Ball Wire Bonder]


<!-- == Process information ==
==Equipment performance and process related parameters==


*[[Specific Process Knowledge/Back-end processing/Au-Sn eutectic die bonding|Au-Sn eutectic die bonding]]
[[Image:single wire bonding.jpg|300px|thumb|Ball wire bond]]
-->
 
==Equipment performance and process related parameters==


{| border="2" cellspacing="0" cellpadding="2"  
{| border="2" cellspacing="0" cellpadding="2"  
Line 53: Line 62:
*Manual operation
*Manual operation
*Wedge bonding:  
*Wedge bonding:  
**recommended min. bonding area 200 µm
**recommended min. bonding area 200 µm x 200 µm
*Ball bonding:   
*Ball bonding:   
**recommended min. bonding area 200 µm
**recommended min. bonding area 200 µm x 200 µm
**recommended temperature 120 <sup>o</sup>C.
**recommended temperature 120 <sup>o</sup>C.
|style="background:WhiteSmoke; color:black"|
|style="background:WhiteSmoke; color:black"|
*Semi-automatic and manual operation
*Semi-automatic and manual operation
*Bond placement laser pointer
*Bond placement laser pointer
*recommended min. bonding area 100 µm
*recommended min. bonding area 100 µm x 100 µm
*recommended temperature 120 <sup>o</sup>C.
*recommended temperature 120 <sup>o</sup>C.
|-
|-

Latest revision as of 14:08, 29 June 2023

Feedback to this page: click here

Unless otherwise stated, this page is written by DTU Nanolab internal

TPT Wire Bonder

TPT wire bonder
Bond head with insert showing wedge capillary

Will be temporary taken out of service during the PolyFabLab construction.

The TPT Wire Bonder is bought i 2007. Wire bonding is a method of making interconnections between a microchip and other electronics as part of semiconductor device fabrication. The TPT-H05 is a manuel wire bonder. It is possible to do wedge bonding with either aluminum wires or gold wires as well as gold ball bonding.

The user manual(s), user APV(s), technical information and contact information can be found in LabManager (requires login):

TPT Wire Bonder

Ball Wire Bonder K&S 4524

Will be moved to building 451 during the PolyFabLab construction.

The Ball Wire Bonder K&S 4524 is for high precision ball bonding. It is a semi-automatic wire bonder with good control of bond placement and bonding parameters.

K&S 4524 ball wire bonder

The user manual(s), user APV(s), technical information and contact information can be found in LabManager (requires login):

Ball Wire Bonder

Equipment performance and process related parameters

Ball wire bond
Equipment TPT Wire Bonder Ball Wire Bonder
Purpose
  • Al and Au 25µm wire bonding
  • Wedge and ball wire bonding
  • Au ribbon (100x20µm) bonding
    (we have tools and wire but it has not been tested)
  • Au 25µm wire bonding
  • Ball wire bonding
Performance
  • Manual operation
  • Wedge bonding:
    • recommended min. bonding area 200 µm x 200 µm
  • Ball bonding:
    • recommended min. bonding area 200 µm x 200 µm
    • recommended temperature 120 oC.
  • Semi-automatic and manual operation
  • Bond placement laser pointer
  • recommended min. bonding area 100 µm x 100 µm
  • recommended temperature 120 oC.
Substrates Allowed materials
  • Should be able to withstand the wire bonding temperature
  • Typical materials are: Alumina (Al2O3), AluminumNitride (AlN), std. circuit boards (FR4)