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| '''Feedback to this page''': '''[mailto:labadviser@danchip.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowledge/Characterization/SIMS:_Secondary_Ion_Mass_Spectrometry click here]''' | | '''Feedback to this page''': '''[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php/Specific_Process_Knowledge/Characterization/SIMS:_Secondary_Ion_Mass_Spectrometry click here]''' |
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| | '''<p style="color:red;">The Atomika SIMS has been decomissioned and is no longer available.</p>''' |
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| ==Atomika SIMS== | | ==Atomika SIMS== |
| [[Image:Equipment_SIMS.jpg|300x300px|thumb|Atomika SIMS: positioned in the basement of building 346 (underneath the cleanroom).]]
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| | | The SIMS analyses the composition of a sample by secondary ion mass spectroscopy. By using either oxygen or cesium ions accelerated by a high tension the surface of the sample is sputtered off as ions. These ions are analysed in a mass spectrometer and one can determine the elemental composition as a function of depth. If compared to signals from reference materials one can quantify the atomic composition - in certain cases down to extremely low concentrations (ppm). Doping levels and impurities may be determined.. |
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| '''Feedback to this page''': '''[mailto:labadviser@danchip.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowledge/Characterization/Drop_Shape_Analyzer click here]'''
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| == The Drop Shape Analyzer ==
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| [[image:DropShapeAnalyzer.jpg|200x200px|right|thumb|The Krüss DSA 100s Drop Shape Analyzer]]
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| The Krüss DSA 100S Drop Shape Analyzer will analyze the shape a drop of liquid on a surface, or suspended from a needle, in order to calculate the contact angle, or the surface tension, respectively. It is mostly used to determine the contact angle of water as a measure of the hydrophobicity/hydrophility of the sample surface.
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| '''The user manual, user APV(s), technical information, and contact information can be found in LabManager:'''
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| [http://labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=240 Drop Shape Analyzer in LabManager]
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| ==An overview of the performance of the Drop Shape Analyzer==
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| {| border="2" cellspacing="0" cellpadding="10"
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| !style="background:silver; color:black;" align="left"|Purpose
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| |style="background:LightGrey; color:black"|Imaging and analysis of of the shape of the interface between liquid and air||style="background:WhiteSmoke; color:black"|
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| *Measurement of contact angle between sample surface and liquid
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| *Measurement of surface tension of liquid
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| !style="background:silver; color:black" align="left"|Performance
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| |style="background:LightGrey; color:black"|Measurement accuracy
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| |style="background:WhiteSmoke; color:black"|
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| *Highly dependent on analysis conditions (image quality and fitting model); usually around ±0.5°. Using several measurement points is recommended.
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| !style="background:silver; color:black" align="left"|Process parameters
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| |style="background:LightGrey; color:black"|Available liquids
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| |style="background:WhiteSmoke; color:black"|
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| *Syringe 1: Water (H2O)
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| *Syringe 2: Diiodo-methane (I2CH2)
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| *Syringe 3: Benzyl alcohol (C6H5CH2OH)
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| *Syringe 4: Available
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| *Manual dispense is also possible
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| !style="background:silver; color:black" align="left"|Sample requirements
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| |style="background:LightGrey; color:black"|Substrate material allowed
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| |style="background:WhiteSmoke; color:black"|
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| *In principle all materials
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| |style="background:silver; color:black"|
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| |style="background:LightGrey; color:black"|Substrate size
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| |style="background:WhiteSmoke; color:black"|
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| *Up to 6" wafers. In order to measure, a few square mm's of flat surface is required.
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| |style="background:silver; color:black"|
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| |style="background:LightGrey; color:black"|Batch size
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| |style="background:WhiteSmoke; color:black"|
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| *One sample at a time
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| |}
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Feedback to this page: click here
The Atomika SIMS has been decomissioned and is no longer available.
Atomika SIMS
The SIMS analyses the composition of a sample by secondary ion mass spectroscopy. By using either oxygen or cesium ions accelerated by a high tension the surface of the sample is sputtered off as ions. These ions are analysed in a mass spectrometer and one can determine the elemental composition as a function of depth. If compared to signals from reference materials one can quantify the atomic composition - in certain cases down to extremely low concentrations (ppm). Doping levels and impurities may be determined..
