Specific Process Knowledge/Characterization/Drop Shape Analyzer: Difference between revisions

From LabAdviser
Taran (talk | contribs)
Rkch (talk | contribs)
 
(37 intermediate revisions by 5 users not shown)
Line 1: Line 1:
'''Feedback to this page''': '''[mailto:labadviser@danchip.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowledge/Characterization/Drop_Shape_Analyzer click here]'''  
'''Feedback to this page''': '''[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php/Specific_Process_Knowledge/Characterization/Drop_Shape_Analyzer click here]'''  
<!--Checked for updates on 5/10-2020 - ok/jmli -->


== The Drop Shape Analyzer ==


=<span style="background:#FF2800">THIS PAGE IS UNDER CONSTRUCTION</span>[[image:Under_construction.png|200px]]=
[[image:DropShapeAnalyzer.jpg|200x200px|right|thumb|The Krüss DSA 100s Drop Shape Analyzer in Cleanroom A-1]]


== The Drop Shape Analyzer ==
The Krüss DSA 100S Drop Shape Analyzer will analyze the shape of a drop of liquid on a surface, or suspended from a needle, in order to calculate the contact angle, or the surface tension, respectively. It is mostly used to determine the contact angle of water as a measure of the hydrophobicity/hydrophilicity of the sample surface.


The Krüss DSA 100S Drop Shape Analyzer will analyze the shapes of drops of liquid on a surface or suspended from a needle in order to calculate the contact angle or the surface tension, respectively.
[[image:DropShapeAnalyzer.jpg|200x200px|right|thumb|The Krüss DSA 100s Drop Shape Analyzer]]


'''The user manual, user APV(s), technical information, and contact information can be found in LabManager:'''  
'''The user manual, user APV(s), technical information, and contact information can be found in LabManager:'''  
<!-- remember to remove the type of documents that are not present -->
<!-- give the link to the equipment info page in LabManager: -->
[http://labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=023  Drop Shape Analyzer in LabManager]
== Process information ==


Link to process pages - e.g. one page for each material
[https://labmanager.dtu.dk/function.php?module=Machine&view=view&mach=520 Drop Shape Analyzer in LabManager]


Example:
==An overview of the performance of the Drop Shape Analyzer==
*[[Specific Process Knowledge/Etch/Etching of Silicon/Si etch using RIE1 or RIE2|Etch of silicon using RIE]]
*[[Specific Process Knowledge/Etch/Etching of Silicon Oxide/SiO2 etch using RIE1 or RIE2|Etch of silicon oxide using RIE]]
*[[Specific Process Knowledge/Etch/Etching of Silicon Nitride/Etch of Silicon Nitride using RIE|Etch of silicon nitride using RIE]]
*[[Specific Process Knowledge/Etch/Etching of Polymer/Etch of Photo Resist using RIE|Etch of photo resist using RIE]]


==Equipment performance and process related parameters==
{| border="2" cellspacing="0" cellpadding="10"
|-
!style="background:silver; color:black;" align="left"|Purpose
|style="background:LightGrey; color:black"|Imaging and analysis of of the shape of the interface between liquid and air||style="background:WhiteSmoke; color:black"|
*Measurement of contact angle between sample surface and liquid
*Measurement of surface tension of liquid
|-
!style="background:silver; color:black" align="left"|Performance
|style="background:LightGrey; color:black"|Measurement accuracy
|style="background:WhiteSmoke; color:black"|
*Highly dependent on analysis conditions (image quality and fitting model) and method used; usually around ±0.5°. Using several measurement points is recommended.
|-
!style="background:silver; color:black" align="left"|Process parameters
|style="background:LightGrey; color:black"|Available liquids
|style="background:WhiteSmoke; color:black"|
*Syringe 1: Water (H<sub>2</sub>O)
*Syringe 2: Diiodo-methane (CH<sub>2</sub>I<sub>2</sub>)
*Manual dispense is also possible
|-
!style="background:silver; color:black" align="left"|Sample requirements
|style="background:LightGrey; color:black"|Substrate material allowed
|style="background:WhiteSmoke; color:black"|
*In principle all materials allowed in cleanroom
|-
|style="background:silver; color:black"|
|style="background:LightGrey; color:black"|Substrate size
|style="background:WhiteSmoke; color:black"|
*Up to 6" wafers. In order to measure, a few mm<sup>2</sup> of flat surface is required.
|-
|style="background:silver; color:black"|
|style="background:LightGrey; color:black"|Batch size
|style="background:WhiteSmoke; color:black"|
*One sample at a time
|-
|}

Latest revision as of 14:58, 23 November 2023

Feedback to this page: click here

The Drop Shape Analyzer

The Krüss DSA 100s Drop Shape Analyzer in Cleanroom A-1

The Krüss DSA 100S Drop Shape Analyzer will analyze the shape of a drop of liquid on a surface, or suspended from a needle, in order to calculate the contact angle, or the surface tension, respectively. It is mostly used to determine the contact angle of water as a measure of the hydrophobicity/hydrophilicity of the sample surface.


The user manual, user APV(s), technical information, and contact information can be found in LabManager:

Drop Shape Analyzer in LabManager

An overview of the performance of the Drop Shape Analyzer

Purpose Imaging and analysis of of the shape of the interface between liquid and air
  • Measurement of contact angle between sample surface and liquid
  • Measurement of surface tension of liquid
Performance Measurement accuracy
  • Highly dependent on analysis conditions (image quality and fitting model) and method used; usually around ±0.5°. Using several measurement points is recommended.
Process parameters Available liquids
  • Syringe 1: Water (H2O)
  • Syringe 2: Diiodo-methane (CH2I2)
  • Manual dispense is also possible
Sample requirements Substrate material allowed
  • In principle all materials allowed in cleanroom
Substrate size
  • Up to 6" wafers. In order to measure, a few mm2 of flat surface is required.
Batch size
  • One sample at a time