Specific Process Knowledge/Etch/DRIE-Pegasus/FAQ: Difference between revisions
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'''Feedback to this page''': '''[mailto:labadviser@ | '''Feedback to this page''': '''[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php/Specific_Process_Knowledge/Etch/DRIE-Pegasus/FAQ click here]''' | ||
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== Some questions and answers == | == Some questions and answers == | ||
'''Disclaimer''' | |||
The content in here (and the links below) is from email correspondence with SPTS - We pose a question and they answer. The content is, at most, only slightly modified from the original emails and thus may appear somewhat sloppily written. You may, however, find some useful answers. The idea is to share some valuable and potentially very useful information that would otherwise be hidden from everybody except the persons in the correspondence. Hidden deep inside an email correspondence, the information is also very likely to get completely lost should the people involved decide to change job. | |||
*[[Specific Process Knowledge/Etch/DRIE-Pegasus/FAQ/Bonding|Bonding wafers]] | *[[Specific Process Knowledge/Etch/DRIE-Pegasus/FAQ/Bonding|Bonding wafers]] | ||
*[[Specific Process Knowledge/Etch/DRIE-Pegasus/FAQ/Matching|Problems with matching]] | *[[Specific Process Knowledge/Etch/DRIE-Pegasus/FAQ/Matching|Problems with matching]] | ||
*[[Specific Process Knowledge/Etch/DRIE-Pegasus/FAQ/Nanoetch|Nanoetching]] | *[[Specific Process Knowledge/Etch/DRIE-Pegasus/FAQ/Nanoetch|Nanoetching]] | ||
*[[Specific Process Knowledge/Etch/DRIE-Pegasus/FAQ/Potasi|Positively tapered sidewalls]] | *[[Specific Process Knowledge/Etch/DRIE-Pegasus/FAQ/Potasi|Positively tapered sidewalls]] | ||
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Latest revision as of 15:22, 2 February 2023
Feedback to this page: click here
Some questions and answers
Disclaimer
The content in here (and the links below) is from email correspondence with SPTS - We pose a question and they answer. The content is, at most, only slightly modified from the original emails and thus may appear somewhat sloppily written. You may, however, find some useful answers. The idea is to share some valuable and potentially very useful information that would otherwise be hidden from everybody except the persons in the correspondence. Hidden deep inside an email correspondence, the information is also very likely to get completely lost should the people involved decide to change job.