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Specific Process Knowledge/Back-end processing/Laser Micromachining Tool/Lasers sources: Difference between revisions

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Latest revision as of 13:39, 15 September 2026

Unless anything else is stated, everything on this page, text and pictures are made by DTU Nanolab.

Laser sources

The laser micromachining tool is equipped with a tunable laser sources from 211 fs to 10 ps. The technical specifications provided by the supplier 3D micromac are shown below. Refer to the Performances to know the measured values of the output power. \ rkch.

Specifications from 3D micromac

Picosecond (TBW)
Wavelength 1030nm, 515nm, 343nm
Pulse duration 211fs to 10ps software controlled
Repetition rate 200 kHz up to 8000 kHz software controlled
Output power 40 W @ 1030 nm
Warm-up time 25min