Specific Process Knowledge/Lithography/Descum: Difference between revisions
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*Films, or patterned films, of any material except type IV (Pb, Te) | *Films, or patterned films, of any material except type IV (Pb, Te) | ||
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=Decommisioned tools= | =Decommisioned tools= | ||
<span style="color:red">Plasma asher 1 was decommissioned 2024-12-02.</span> | <span style="color:red">Plasma asher 1 was decommissioned 2024-12-02.</span> | ||