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'''SEM images from different exposure equipment:'''


{|border="1" cellspacing="0" cellpadding="3" style="text-align:left;"  
{|border="1" cellspacing="0" cellpadding="3" style="text-align:left;"  
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|-style="background:silver; color:black"
|-style="background:silver; color:black"
!
!
!1µm triplets
!2µm triplets
!2µm triplets
!4µm triplets
!Lines
!Lines
!Trenches
!Trenches
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|Aligner: MA6-2
|Aligner: MA6-2
100mJ/cm<sup>2</sup>, vacuum contact
100mJ/cm<sup>2</sup>, vacuum contact
|
|[[Image:W14 MA62 5214E vac D100_B4T_01.jpg|400px]]
|[[Image:W14 MA62 5214E vac D100_B4T_01.jpg|300px]]
|[[Image:W14 MA62 5214E vac D100_B4T_02.jpg|400px]]
|
|[[Image:W14 MA62 5214E vac D100_B4T_03.jpg|400px]]
|[[Image:W14 MA62 5214E vac D100_B4T_02.jpg|300px]]
|[[Image:W14 MA62 5214E vac D100_B4T_03.jpg|300px]]


|-
|-
|-style="background:WhiteSmoke; color:black"
|-style="background:WhiteSmoke; color:black"
|Aligner: MA6-1
|Aligner: MA6-1
100mJ/cm<sup>2</sup>, vacuum contact
100mJ/cm<sup>2</sup>, vacuum contact <br>(probably over-exposed)
(probably over-exposed)
|[[Image:W32 PFL 5214 D100 vac C6B_01.jpg|400px]]
|[[Image:W32 PFL 5214 D100 vac C6B_02.jpg|290px]]
|[[Image:W32 PFL 5214 D100 vac C6B_04.jpg|400px]]
|[[Image:W32 PFL 5214 D100 vac C6B_01.jpg|290px]]
|[[Image:W32 PFL 5214 D100 vac C6B_05.jpg|400px]]
|[[Image:W32 PFL 5214 D100 vac C6B_03.jpg|290px]]
|[[Image:W32 PFL 5214 D100 vac C6B_04.jpg|290px]]
|[[Image:W32 PFL 5214 D100 vac C6B_05.jpg|290px]]


|-
|-
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|Aligner: Maskless 02 (MLA2)
|Aligner: Maskless 02 (MLA2)
90mJ/cm<sup>2</sup>, defoc 2
90mJ/cm<sup>2</sup>, defoc 2
|
|[[Image:W13 mla2 5214E D90 F2_05.jpg|400px]]
|[[Image:W13 mla2 5214E D90 F2_05.jpg|300px]]
|[[Image:W13 mla2 5214E D90 F2_01.jpg|400px]]
|
|[[Image:W13 mla2 5214E D90 F2_02.jpg|400px]]
|[[Image:W13 mla2 5214E D90 F2_01.jpg|300px]]
|[[Image:W13 mla2 5214E D90 F2_02.jpg|300px]]


|}
|}


'''SEM images of different size structures:'''
{|border="1" cellspacing="0" cellpadding="3" style="text-align:left;"
|-
|-
|-style="background:silver; color:black"
!
!1µm triplets
!2µm triplets
!4µm triplets
|-
|-
|-style="background:WhiteSmoke; color:black"
|Aligner: MA6-1
100mJ/cm<sup>2</sup>, vacuum contact <br>(probably over-exposed)
|[[Image:W32 PFL 5214 D100 vac C6B_02.jpg|400px]]
|[[Image:W32 PFL 5214 D100 vac C6B_01.jpg|400px]]
|[[Image:W32 PFL 5214 D100 vac C6B_03.jpg|400px]]
|}
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<br clear="all" />


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===Resist profile (linewidth and sidewall angle)===
===Resist profile===
 
====Linewidth and sidewall angle vs exposure dose====
'''SEM images of 2µm triplets as a function of exposure dose:'''
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{|border="1" cellspacing="0" cellpadding="3" style="text-align:left;"  
|-
|-
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|}
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{|border="1" cellspacing="0" cellpadding="3" style="text-align:left;"  
{|border="1" cellspacing="0" cellpadding="3" style="text-align:left;"  
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'''Result of image analysis of SEM images of 2µm triplets:'''
'''Result of image analysis of SEM images of 2µm triplets:'''
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====Linewidth and sidewall angle vs defocus parameter====
'''SEM images as a function of defocus parameter for Aligner: Maskless 02 (MLA2) using dose 95mJ/cm<sup>2</sup>:'''
{|border="1" cellspacing="0" cellpadding="3" style="text-align:left;"
|-
|-
|-style="background:silver; color:black"
!
!Defoc -8
!Defoc -1
!Defoc 2
!Defoc 5
!Defoc 12
|-
|-
|-style="background:WhiteSmoke; color:black"
|2µm triplets
|[[Image:W33 MLA2 5214 F-8 D95_101.jpg|280px]]
|[[Image:W33 MLA2 5214 F-1 D95_01.jpg|280px]]
|[[Image:W33 MLA2 5214 F2 D95_01.jpg|280px]]
|[[Image:W33 MLA2 5214 F5 D95_01.jpg|280px]]
|[[Image:W33 MLA2 5214 F12 D95_101.jpg|280px]]
|-
|-style="background:WhiteSmoke; color:black"
|Lines
|[[Image:W33 MLA2 5214 F-8 D95_102.jpg|280px]]
|[[Image:W33 MLA2 5214 F-1 D95_02.jpg|280px]]
|[[Image:W33 MLA2 5214 F2 D95_1_02.jpg|280px]]
|[[Image:W33 MLA2 5214 F5 D95_02.jpg|280px]]
|[[Image:W33 MLA2 5214 F12 D95_102.jpg|280px]]
|}
'''Result of image analysis of SEM images of 2µm triplets:'''
{| cellpadding="2" style="border: 2px solid darkgray;" align="left"
{| cellpadding="2" style="border: 2px solid darkgray;" align="left"
! width="510" |  
! width="510" |  
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|- align="center"
|- align="center"
| Blue circles: Width of 2µm line. <br>Orange Squares: Sidewall angle.
| Blue circles: Width of 2µm line. <br>Orange Squares: Sidewall angle.
|}
|}
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