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Specific Process Knowledge/Lithography/EBeamLithography/JEOLAlignment: Difference between revisions

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DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, NLAB-Nlab347-labadviser-users-35231
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Thope (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, NLAB-Nlab347-labadviser-users-35231
2,224 edits
 
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{| style="border: none; border-spacing: 0; margin: 1em auto; text-align: center;"
{| style="border: none; border-spacing: 0; margin: 1em auto; text-align: center;"
|-
|-
| [[image:OpticalPrealigner1.png|400px]] || [[image:OpticalPrealigner2.png|400px]]
| [[image:OpticalPrealigner1.png|300px]] || [[image:OpticalPrealigner2.png|300px]]
|-  
|-  
| colspan="2" style="text-align:center;|
| colspan="2" style="text-align:center;|
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{| style="border: none; border-spacing: 0; margin: 1em auto; text-align: center;"
{| style="border: none; border-spacing: 0; margin: 1em auto; text-align: center;"
|-
|-
| [[image:P_roughscan.png|400px]] || [[image:Q_finescan.png|400px]]  || [[image:PQ_finaloffset.png|400px]]  
| [[image:P_roughscan.png|300px]] || [[image:Q_finescan.png|300px]]  || [[image:PQ_finaloffset.png|300px]]  
|-  
|-  
| colspan="2" style="text-align:center;|
| colspan="2" style="text-align:center;|
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{| style="border: none; border-spacing: 0; margin: 1em auto; text-align: center;"
{| style="border: none; border-spacing: 0; margin: 1em auto; text-align: center;"
|-
|-
| [[image:CHIPAL2.png|400px]] || [[image:CHIPAL-scan.png|400px]]
| [[image:CHIPAL2.png|300px]] || [[image:CHIPAL-scan.png|300px]]
|-  
|-  
| colspan="2" style="text-align:center;|
| colspan="2" style="text-align:center;|
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{| style="border: none; border-spacing: 0; margin: 1em auto; text-align: center;"
{| style="border: none; border-spacing: 0; margin: 1em auto; text-align: center;"
|-
|-
| [[image:scantype.png|400px]] || [[image:2Dpane.png|400px]]
| [[image:scantype.png|300px]] || [[image:2Dpane.png|300px]]
|-  
|-  
| colspan="2" style="text-align:enter;|
| colspan="2" style="text-align:enter;|
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{| style="border: none; border-spacing: 0; margin: 1em auto; text-align: center;"
{| style="border: none; border-spacing: 0; margin: 1em auto; text-align: center;"
|-
|-
| [[image:2Droughscan.png|400px]] || [[image:2Dfinescan.png|400px]]
| [[image:2Droughscan.png|300px]] || [[image:2Dfinescan.png|300px]]
|-  
|-  
| colspan="2" style="text-align:enter;|
| colspan="2" style="text-align:enter;|
Imagescans obtained during alignment. Rough alignment scan (left) is 1000 µm while fine scan (right) is 10 µm. The green cross indicates the center as determined by the system.
Imagescans obtained during alignment. Rough alignment scan (left) is 1000 µm while fine scan (right) is 10 µm. The green cross indicates the center as determined by the system.
|}
|}
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