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=<span style="background:#FF2800">THIS PAGE IS UNDER CONSTRUCTION</span>[[image:Under_construction.png|200px]]=
{{cc-nanolab}}
 
'''Feedback to this page''': '''[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php/Specific_Process_Knowledge/Characterization/Optical_microscope click here]'''  
'''Feedback to this page''': '''[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php/Specific_Process_Knowledge/Characterization/Optical_microscope click here]'''  


Line 5: Line 6:
[[Category: Characterization|Optical mi]]
[[Category: Characterization|Optical mi]]


 
{|border="1" cellspacing="1" cellpadding="3" style="text-align:left;"
{| border="1" cellspacing="0" cellpadding="3"  
!
! Zeiss Jenatech (strain)
! Nikon SMZ 1500
! Leica S8 APO
! Leitz Medilux
! Zeiss Axiotron 2
! Zeiss Jenatech (particles measurements)
! Noco IR microscope
! Nikon SMZ 1000
! Nikon ME 600
! Nikon Eclipse L200
! Nikon Eclipse L200 (2)
! Nikon ECLIPSE L200N 3
! Nikon ECLIPSE L200N 4
|-
|-
|-style="background:white; color:black; vertical-align:middle; text-align:center;"
|
|
|[[image:Zeiss Jenatech strain.jpg|100x100px|thumb|left]]
[[image:Zeiss Jenatech strain_1.jpg|100x100px|thumb|left]]
|[[image:Nikon SMZ 1500.jpg|100x100px|thumb|left]]
|[[image:Leica S8 APO.jpg|100x100px|thumb|left]]
|[[image:Leitz Medilux.jpg|100x100px|thumb|left]]
|[[image:Zeiss Axiotron.jpg|100x100px|thumb|left]]
[[image:Zeiss Axiotron_1.jpg|100x100px|thumb|left]]
|[[image:Zeiss Jenatech particle measurement_2.jpg|100x100px|thumb|left]]
[[image:Zeiss Jenatech particle measurement_1.jpg|100x100px|thumb|left]]
|[[image:Noco IR microscope.jpg|100x100px|thumb|left]]
[[image:Noco IR microscope_1.jpg|100x100px|thumb|left]]
|[[image:Nikon SMZ 1000.jpg|100x100px|thumb|left]]
||[[image:Nikon ME 600.jpg|100x100px|thumb|left]]
[[image:Nikon ME 600_1.jpg|100x100px|thumb|left]]
|[[image:Nikon Eclipse L200.jpg|100x100px|thumb|left]]
[[image:Nikon Eclipse L200_1.jpg|100x100px|thumb|left]]
|[[image:Nikon Eclipse L200 2_1.jpg|100x100px|thumb|left]]
[[image:Nikon Eclipse L200 2.jpg|100x100px|thumb|left]]
|[[File:Nikon Eclipse L 200 3_1.jpg|100x100px|thumb|left]]
|[[File:Nikon Eclipse L 200 4_1.jpg|100x100px|thumb|left]]
|-
|'''Location'''
|Check LabManager
|Check LabManager
|Check LabManager
|Check LabManager
|Check LabManager
|Check LabManager
|Check LabManager
|Check LabManager
|Check LabManager
|Check LabManager
|Check LabManager
|Check LabManager
|Check LabManager
|-
|'''Special features'''
|Wollastron prism
|Stereoscopic microscope
|Stereoscopic microscope


|No
!Noco IR
|No
!Leica<br>INM 100
|No
!Zeiss<br>Jenatech
|Infra red (IR) camera
!Nikon Eclipse<br>L200 #1
|Stereoscopic microscope
!Nikon Eclipse<br>L200 #2
|Wollastron prism
!Nikon Eclipse<br>L200N #3
|Motorized stage
!Nikon Eclipse<br>L200N #4
!Nikon<br>ME 600
!Leica<br>S8 APO
!Zeiss<br>Axiotron
!Olympus<br>MX63
|-


[[Specific_Process_Knowledge/Characterization/Optical microscope/Nikon Eclipse L200 auto scan guide|auto scan guide]]
|No
|No
|No
|-
|-
|'''Ocular magnification'''
|-style="background:white; color:black; vertical-align:middle; text-align:center;"
|10x
|
|No
|[[image:Noco IR microscope.jpg|100x100px|thumb|center]][[image:Noco IR microscope_1.jpg|100x100px|thumb|center]]
|No
|[[image:LeicaINM100.jpg|100x100px|thumb|center]]
|10x
|[[image:Zeiss Jenatech strain.jpg|100x100px|thumb|center]][[image:Zeiss Jenatech strain_1.jpg|100x100px|thumb|center]]
|10x
|[[image:Nikon Eclipse L200.jpg|100x100px|thumb|center]][[image:Nikon Eclipse L200_1.jpg|100x100px|thumb|center]]
|10x
|[[image:Nikon Eclipse L200 2.jpg|100x100px|thumb|center]][[image:Nikon Eclipse L200 2_1.jpg|100x100px|thumb|center]]
|10x
|[[image:Nikon Eclipse L 200 3_1.jpg|100x100px|thumb|center]]
|No
|[[image:Nikon Eclipse L 200 4_1.jpg|100x100px|thumb|center]]
|10x
|[[image:Nikon ME 600.jpg|100x100px|thumb|center]][[image:Nikon ME 600_1.jpg|100x100px|thumb|center]]
|10x
|[[image:Leica S8 APO.jpg|100x100px|thumb|center]]
|10x
|[[image:Zeiss Axiotron.jpg|100x100px|thumb|center]][[image:Zeiss Axiotron_1.jpg|100x100px|thumb|center]]
|10x
|[[File:View front right .jpg|100x100px|thumb|center]]
|10x
|-
|'''Objective magnification'''
|2.5x, 5x, 10x, 20x, 50x
|Zoom 100x
|Zoom 80x
|2.5x, 5x, 10x, 20x, 50x
|5x, 10x, 20x, 50x
|5x, 10x, 20x, 50x, 100x
|2.5x, 5x, 20x, 50x
|Zoom 100x
|5x, 10x, 20x, 50x, 100x
|2.5x, 5x, 10x, 20x, 50x, 100x
|2.5x, 5x, 10x, 20x, 50x, 100x
|2.5x, 5x, 10x, 20x, 50x, 100x
|2.5x, 5x, 10x, 20x, 50x, 100x
|-
|'''Bright field'''
|Yes
|No
|No
|Yes
|Yes
|Yes
|Yes
|No
|Yes
|Yes
|Yes
|Yes
|Yes
|-
|'''Dark field'''
|Yes
|No
|No
|No
|Yes
|Yes
|No
|No
|Yes
|Yes
|Yes
|Yes
|Yes
|-
|'''Polarizer'''
|Yes
|No
|No
|No
|No
|Yes
|No
|No
|Yes
|No
|No
|No
|No
|-
|'''Episcopic light (reflected light)'''
|Yes
|Yes
|Yes
|Yes
|Yes
|Yes
|Yes
|Yes
|Yes
|Yes
|Yes
|Yes
|Yes
|-
|'''Diascopic light (transmitted light)'''
|No
|Yes
|No
|Yes
|Yes
|No
|Yes
|No
|No
|Yes
|Yes
|Yes
|Yes
|-
|'''View with eye'''
|Yes
|Yes
|Yes
|Yes
|Yes
|Yes
|Yes
|Yes
|Yes
|Yes
|Yes
|Yes
|Yes
|-
|'''View on screen (camera)'''
|Yes
|No
|No
|Yes
|Yes
|No
|Yes (IR)
|No
|Yes
|Yes
|Yes
|Yes
|Yes
|-
|'''Measurement option'''
|No
|No
|No
|No
|Yes
|No
|No
|No
|No
|Yes
|Yes
|Yes
|Yes
|-
|-
|}


It is possible to make an automated scanning of a full wafer on the Nikon Eclipse L200 with motorized stage '''[[Specific_Process_Knowledge/Characterization/Optical microscope/Nikon Eclipse L200 auto scan guide|Nikon Eclipse L200 auto scan guide]]'''
=<span style="background:#FF2800">THIS PAGE IS UNDER CONSTRUCTION</span>[[image:Under_construction.png|200px]]=
{|border="1" cellspacing="1" cellpadding="3" style="text-align:left;"
|-
|-
|-style="background:white; color:black; vertical-align:middle; text-align:center;"
|-style="background:LightGrey; color:black; vertical-align:middle; text-align:left;"
!Microscope
!Location
!Location
!Responsible Group
 
!Objectives
|346-901
!Ocular
|346-901
!Special features
|cleanroom<br>D-3
!Features
|cleanroom<br>D-3
!Camera
|cleanroom<br>A-1
!Analysis software
|cleanroom<br>D-3
|cleanroom<br>E-5
|cleanroom<br>F-1
|cleanroom<br>Cx1
|cleanroom<br>F-3
|cleanroom<br>E-4
|-
|-


|-
|-
|-style="background:LightGrey; color:black; vertical-align:middle; text-align:center;"
|-style="background:WhiteSmoke; color:black; vertical-align:middle; text-align:left;"
!Nikon SMZ 1000[[image:Nikon SMZ 1000.jpg|100x100px|thumb|center]]
!Responsible<br>group
|346-901
|Wet chemistry
|Wet chemistry
|Wet chemistry
|Zoom 0.8x - 8x
|Lithography
|10x
|Lithography
|Stereoscopic microscope
|Lithography
|Episcopic
|Lithography
|No
|Lithography
|No
|Lithography
|Lithography
|Lithography
|Lithography
|-
|-


|-
|-
|-style="background:WhiteSmoke; color:black; vertical-align:middle; text-align:center;"
|-style="background:LightGrey; color:black; vertical-align:middle; text-align:left;"
!Noco IR[[image:Noco IR microscope.jpg|100x100px|thumb|center]][[image:Noco IR microscope_1.jpg|100x100px|thumb|center]]
!Objectives
|346-901
|Wet chemistry
|
|
*2.5x
*2.5x
Line 271: Line 81:
*20x
*20x
*50x
*50x
|10x
|IR imaging
|
*Polarizer
*Episcopic
*Diascopic
*Brightfield
|IR camera
|No
|-
|-
|-style="background:LightGrey; color:black; vertical-align:middle; text-align:center;"
!Leica INM100[[image:Nikon SMZ 1000.jpg|100x100px|thumb|center]]
|346-901
|Wet chemistry
|
|
*2.5x
*2.5x
Line 293: Line 87:
*20x
*20x
*50x
*50x
|10x
|
|
*5x
*10x
*20x
*50x
*100x
|
|
*Episcopic
*2.5x
*Diascopic
*5x
*Brightfield
*10x
*Darkfield
*20x
|DS-Fi2
*50x
|NIS-D
|-
 
|-
|-style="background:WhiteSmoke; color:black; vertical-align:middle; text-align:center;"
!Nikon Eclipse L200 #2[[image:Nikon Eclipse L200 2.jpg|100x100px|thumb|center]][[image:Nikon Eclipse L200 2_1.jpg|100x100px|thumb|center]]
|C1
|Thin Film
|
|
*2.5x
*2.5x
Line 316: Line 106:
*50x
*50x
*100x
*100x
|10x
|
|
*Episcopic
*Diascopic
*Brightfield
*Darkfield
|DS-Fi1
|NIS-D
|-
|-
|-style="background:LightGrey; color:black; vertical-align:middle; text-align:center;"
!Zeiss Jenatech[[image:Zeiss Jenatech strain.jpg|100x100px|thumb|center]][[image:Zeiss Jenatech strain_1.jpg|100x100px|thumb|center]]
|C1
|Thin Film
|
|
*2.5x
*5x
*5x
*10x
*10x
Line 338: Line 113:
*50x
*50x
*100x
*100x
|10x
|
|
*Polarizer
*Episcopic
*Diascopic
*Brightfield
|No
|No
|-
|-
|-style="background:WhiteSmoke; color:black; vertical-align:middle; text-align:center;"
!Nikon Eclipse L200 #1[[image:Nikon Eclipse L200.jpg|100x100px|thumb|center]][[image:Nikon Eclipse L200_1.jpg|100x100px|thumb|center]]
|D3
|Thin Film
|
|
*2.5x
*2.5x
Line 361: Line 120:
*50x
*50x
*100x
*100x
|10x
|
|
*Motorized stage
*5x
*'''[[Specific_Process_Knowledge/Characterization/Optical microscope/Nikon Eclipse L200 auto scan guide|Auto scan guide]]'''
*10x
|
*20x
*Episcopic
*50x
*Diascopic
*100x
*Brightfield
|Zoom 1x - 8x
*Darkfield
|DS-Fi1
|NIS-BR
|-
 
|-
|-style="background:LightGrey; color:black; vertical-align:middle; text-align:center;"
!Leitz Medilux[[image:Leitz Medilux.jpg|100x100px|thumb|center]]
|D3
|Thin Film
|
|
*2.5x
*5x
*5x
*10x
*10x
*20x
*20x
*50x
*50x
|
*1.25x
*5xBD
*10xBD
*20xBD
*50xBD
*100xBD
|-
|-
|-style="background:WhiteSmoke; color:black; vertical-align:middle; text-align:left;"
!Ocular
|10x
|10x
|10x
|10x
|10x
|10x
|10x
|10x
|10x
|10x
|10x
|10x
|-
|-
|-style="background:LightGrey; color:black; vertical-align:middle; text-align:left;"
!Special<br>features
|IR imaging
|
|
|
<!--
*Motorized stage
*'''[[Specific_Process_Knowledge/Characterization/Optical microscope/Nikon Eclipse L200 auto scan guide|Auto scan guide]]'''
-->
|
|
|
|
|Stereoscopic
|
|
|
|
*Episcopic
*Diascopic
*Brightfield
|DX40-274FW
|Kappa Control Center
|-
|-
|-
|-
|-style="background:WhiteSmoke; color:black; vertical-align:middle; text-align:center;"
|-style="background:WhiteSmoke; color:black; vertical-align:middle; text-align:left;"
!Nikon Eclipse L200N #3[[image:Nikon Eclipse L 200 3_1.jpg|100x100px|thumb|center]]
!Contrast<br>mechanisms
|E4
|Lithography
|
|
*2.5x
*Polarizer
*5x
*Brightfield
*10x
*20x
*50x
*100x
|10x
|
|
*Brightfield
*Darkfield
|
|
*Polarizer
*Polarizer
*Episcopic
*Brightfield
*Diascopic
|
*Brightfield
*Brightfield
*Darkfield
*Darkfield
|
|
*DS-Fi2
*Brightfield
*C-mount, 0.7x relay
*Darkfield
|NIS-D
|-
 
|-
|-style="background:LightGrey; color:black; vertical-align:middle; text-align:center;"
!Nikon Eclipse L200N #4[[image:Nikon Eclipse L 200 4_1.jpg|100x100px|thumb|center]]
|E5
|Lithography
|
|
*2.5x
*Polarizer
*5x
*Brightfield
*10x
*Darkfield
*20x
*50x
*100x
|10x
|
|
*Polarizer
*Brightfield
*Darkfield
|
|
*Polarizer
*Polarizer
*Episcopic
*Diascopic
*Brightfield
*Brightfield
*Darkfield
*Darkfield
|
|
*DS-Fi2
*Brightfield
*C-mount, 0.7x relay
|NIS-D
|-
 
|-
|-style="background:WhiteSmoke; color:black; vertical-align:middle; text-align:center;"
!Nikon ME 600[[image:Nikon ME 600.jpg|100x100px|thumb|center]][[image:Nikon ME 600_1.jpg|100x100px|thumb|center]]
|F1
|Thin Film
|
*5x
*10x
*20x
*50x
*100x
|10x
|
|
*Brightfield
*Darkfield
|
|
*Polarizer
*Polarizer
*Episcopic
*Brightfield
*Brightfield
*Darkfield
*Darkfield
|DS-Fi2
|NIS-D
|-
|-


|-
|-
|-style="background:LightGrey; color:black; vertical-align:middle; text-align:center;"
|-style="background:LightGrey; color:black; vertical-align:middle; text-align:left;"
!Leica S8 APO[[image:Leica S8 APO.jpg|100x100px|thumb|center]]
!Illumination<br>modes
|F2
|
|Thin Film
*Episcopic
|Zoom 1x - 8x
*Diascopic
|10x
|
|Stereoscopic microscope
*Episcopic
|Episcopic
*Diascopic
|No
|
|No
*Episcopic
|-
*Diascopic
 
|
|-
*Episcopic
|-style="background:WhiteSmoke; color:black; vertical-align:middle; text-align:center;"
*Diascopic
!Zeiss Axiotron[[image:Zeiss Axiotron.jpg|100x100px|thumb|center]][[image:Zeiss Axiotron_1.jpg|100x100px|thumb|center]]
|
|F3
*Episcopic
|Lithography
*Diascopic
|
*Episcopic
*Diascopic
|
*Episcopic
*Diascopic
|
*Episcopic
|
|
*5x
*Episcopic
*10x
*20x
*50x
|10x
|
|
*Episcopic
*Diascopic
|
|
*Episcopic
*Episcopic
*Diascopic
*Diascopic
*Brightfield
*Darkfield
|Infinity X
|DeltaPix
|-
|}
<br clear="all" />
=<span style="background:#FF2800">THIS PAGE IS UNDER CONSTRUCTION</span>[[image:Under_construction.png|200px]]=
{|border="1" cellspacing="1" cellpadding="3" style="text-align:left;"
|-
|-style="background:white; color:black; vertical-align:middle; text-align:center;"
!Nikon SMZ 1000
!Noco IR
!Leica INM 100
!Nikon Eclipse L200 #2
!Zeiss Jenatech
!Nikon Eclipse L200 #1
!Leitz Medilux
!Nikon Eclipse L200N #3
!Nikon Eclipse L200N #4
!Nikon ME 600
!Leica S8 APO
!Zeiss Axiotron
|-
|-


|-
|-
|-style="background:white; color:black; vertical-align:middle; text-align:center;"
|-style="background:WhiteSmoke; color:black; vertical-align:middle; text-align:left;"
|[[image:Nikon SMZ 1000.jpg|100x100px|thumb|center]]
!Camera
|[[image:Noco IR microscope.jpg|100x100px|thumb|center]][[image:Noco IR microscope_1.jpg|100x100px|thumb|center]]
|IR camera
|[[image:Nikon SMZ 1000.jpg|100x100px|thumb|center]]
|DS-Fi2
|[[image:Nikon Eclipse L200 2.jpg|100x100px|thumb|center]][[image:Nikon Eclipse L200 2_1.jpg|100x100px|thumb|center]]
|None
|[[image:Zeiss Jenatech strain.jpg|100x100px|thumb|center]][[image:Zeiss Jenatech strain_1.jpg|100x100px|thumb|center]]
|DS-Fi1
|[[image:Nikon Eclipse L200.jpg|100x100px|thumb|center]][[image:Nikon Eclipse L200_1.jpg|100x100px|thumb|center]]
|DS-Fi1
|[[image:Leitz Medilux.jpg|100x100px|thumb|center]]
|
|[[image:Nikon Eclipse L 200 3_1.jpg|100x100px|thumb|center]]
*DS-Fi2
|[[image:Nikon Eclipse L 200 4_1.jpg|100x100px|thumb|center]]
*C-mount,<br>0.7x relay
|[[image:Nikon ME 600.jpg|100x100px|thumb|center]][[image:Nikon ME 600_1.jpg|100x100px|thumb|center]]
|
|[[image:Leica S8 APO.jpg|100x100px|thumb|center]]
*DS-Fi2
|[[image:Zeiss Axiotron.jpg|100x100px|thumb|center]][[image:Zeiss Axiotron_1.jpg|100x100px|thumb|center]]
*C-mount,<br>0.7x relay
|-
|DS-Fi2
 
|None
|-
|Infinity X
|-style="background:LightGrey; color:black; vertical-align:middle; text-align:center;"
|
|
*DP23-CU
*C-mount
|-
|-


|-
|-
|-style="background:WhiteSmoke; color:black; vertical-align:middle; text-align:center;"
|-style="background:LightGrey; color:black; vertical-align:middle; text-align:left;"
|
!Analysis<br>software
|None
|NIS-D
|None
|NIS-BR
|NIS-D
|NIS-D
|NIS-D
|NIS-D
|None
|DeltaPix
|PRECiV Core
|-
|-


Line 555: Line 296:


<br clear="all" />
<br clear="all" />
There are also two optical microscopes in building 451, a stereo microscope and a transmission microscope, that were both previously located in Packlab. Please ask staff / the BioMic group for details.

Latest revision as of 09:52, 1 April 2026

The content on this page, including all images and pictures, was created by DTU Nanolab staff, unless otherwise stated.

Feedback to this page: click here

Noco IR Leica
INM 100 		Zeiss
Jenatech 		Nikon Eclipse
L200 #1 		Nikon Eclipse
L200 #2 		Nikon Eclipse
L200N #3 		Nikon Eclipse
L200N #4 		Nikon
ME 600 		Leica
S8 APO 		Zeiss
Axiotron 		Olympus
MX63
Location 346-901 346-901 cleanroom
D-3 		cleanroom
D-3 		cleanroom
A-1 		cleanroom
D-3 		cleanroom
E-5 		cleanroom
F-1 		cleanroom
Cx1 		cleanroom
F-3 		cleanroom
E-4
Responsible
group 		Wet chemistry Wet chemistry Lithography Lithography Lithography Lithography Lithography Lithography Lithography Lithography Lithography
Objectives
  • 2.5x
  • 10x
  • 20x
  • 50x
  • 2.5x
  • 5x
  • 10x
  • 20x
  • 50x
  • 5x
  • 10x
  • 20x
  • 50x
  • 100x
  • 2.5x
  • 5x
  • 10x
  • 20x
  • 50x
  • 2.5x
  • 5x
  • 10x
  • 20x
  • 50x
  • 100x
  • 2.5x
  • 5x
  • 10x
  • 20x
  • 50x
  • 100x
  • 2.5x
  • 5x
  • 10x
  • 20x
  • 50x
  • 100x
  • 5x
  • 10x
  • 20x
  • 50x
  • 100x
 Zoom 1x - 8x
  • 5x
  • 10x
  • 20x
  • 50x
  • 1.25x
  • 5xBD
  • 10xBD
  • 20xBD
  • 50xBD
  • 100xBD
Ocular 10x 10x 10x 10x 10x 10x 10x 10x 10x 10x 10x
Special
features 		IR imaging


Stereoscopic
Contrast
mechanisms
  • Polarizer
  • Brightfield
  • Brightfield
  • Darkfield
  • Polarizer
  • Brightfield
  • Brightfield
  • Darkfield
  • Brightfield
  • Darkfield
  • Polarizer
  • Brightfield
  • Darkfield
  • Polarizer
  • Brightfield
  • Darkfield
  • Polarizer
  • Brightfield
  • Darkfield
  • Brightfield
  • Brightfield
  • Darkfield
  • Polarizer
  • Brightfield
  • Darkfield
Illumination
modes
  • Episcopic
  • Diascopic
  • Episcopic
  • Diascopic
  • Episcopic
  • Diascopic
  • Episcopic
  • Diascopic
  • Episcopic
  • Diascopic
  • Episcopic
  • Diascopic
  • Episcopic
  • Diascopic
  • Episcopic
  • Episcopic
  • Episcopic
  • Diascopic
  • Episcopic
  • Diascopic
Camera IR camera DS-Fi2 None DS-Fi1 DS-Fi1
  • DS-Fi2
  • C-mount,
    0.7x relay
  • DS-Fi2
  • C-mount,
    0.7x relay
 DS-Fi2 None Infinity X
  • DP23-CU
  • C-mount
Analysis
software 		None NIS-D None NIS-BR NIS-D NIS-D NIS-D NIS-D None DeltaPix PRECiV Core


There are also two optical microscopes in building 451, a stereo microscope and a transmission microscope, that were both previously located in Packlab. Please ask staff / the BioMic group for details.

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