Specific Process Knowledge/Lithography/Strip: Difference between revisions
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*O<sub>2</sub> (0-500 sccm) | *O<sub>2</sub> (0-500 sccm) | ||
*<sub>2</sub> (0-500 sccm) | *N<sub>2</sub> (0-500 sccm) | ||
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*O<sub>2</sub> (0-500 sccm) | *O<sub>2</sub> (0-500 sccm) | ||
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{| class="wikitable" | {| class="wikitable" | ||
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! !! [[Specific_Process_Knowledge/Lithography/Strip#Plasma_Asher_4|Resist stripping | ! !! [[Specific_Process_Knowledge/Lithography/Strip#Plasma_Asher_4|Resist stripping]] !! [[Specific_Process_Knowledge/Lithography/Descum#Plasma_Asher_3:_Descum|Descum]] !! [[Specific_Process_Knowledge/Lithography/Descum#Plasma_Asher_4|Descum]] !! Surface treatment !! Other ashing of organic material | ||
|- | |||
! scope=row style="text-align: left;" | Tool | |||
| Plasma asher 4 & 5 || Plasma asher 3: Descum || Plasma asher 4 & 5 || Plasma asher 4 & 5 || Plasma asher 4 & 5 | |||
|- | |- | ||
! scope=row style="text-align: left;" | Process pressure | ! scope=row style="text-align: left;" | Process pressure | ||
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! scope=row style="text-align: left;" | Substrate batch | ! scope=row style="text-align: left;" | Substrate batch | ||
| 1-25 || 1-2 || 1-25 || 1 || 1 | | 1-25 || 1-2 || 1-25 || 1-25 || 1-25 | ||
|} | |} | ||
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=Decommisioned tools= | =Decommisioned tools= | ||
<span style="color:red">Plasma asher 1 was decommissioned 2024-12-02.</span> | <span style="color:red">Plasma asher 1 was decommissioned 2024-12-02.</span> | ||
[[Specific Process Knowledge/Lithography/Strip/PlasmaAsher1|Information about decommissioned tool can be found here.]] | [[Specific Process Knowledge/Lithography/Strip/PlasmaAsher1|Information about decommissioned tool can be found here.]] | ||
<span style="color:red">Plasma asher 2 was decommissioned 2024-12-02.</span> | <span style="color:red">Plasma asher 2 was decommissioned 2024-12-02.</span> | ||
[[Specific Process Knowledge/Lithography/Strip/PlasmaAsher2|Information about decommissioned tool can be found here.]] | [[Specific Process Knowledge/Lithography/Strip/PlasmaAsher2|Information about decommissioned tool can be found here.]] | ||
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