Specific Process Knowledge/Lithography: Difference between revisions
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'''<big><div class="center">Coating</div></big>''' | '''<big><div class="center">Coating & baking</div></big>''' | ||
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'''[[Specific Process Knowledge/Lithography/Development|Manual development]]''' | '''[[Specific Process Knowledge/Lithography/Development|Manual development]]''' | ||
*[[Specific_Process_Knowledge/Lithography/Development | *[[Specific_Process_Knowledge/Lithography/Development/beaker_developer|Manual beaker development]] | ||
'''[[Specific Process Knowledge/Lithography/Development|SU-8 development]]''' | '''[[Specific Process Knowledge/Lithography/Development|SU-8 development]]''' | ||
*[[Specific_Process_Knowledge/Lithography/Development | *[[Specific_Process_Knowledge/Lithography/Development/SU8_developer|Developer: SU8 (Wetbench)]] | ||
'''[[Specific Process Knowledge/Lithography/Development|Semi-automatic puddle development]]''' | '''[[Specific Process Knowledge/Lithography/Development|Semi-automatic puddle development]]''' | ||
*[[Specific_Process_Knowledge/Lithography/Development | *[[Specific_Process_Knowledge/Lithography/Development/manualEbeam_developer|Developer: E-beam 02]] | ||
*[[Specific_Process_Knowledge/Lithography/Development | *[[Specific_Process_Knowledge/Lithography/Development/manualTMAH_developer|Developer: TMAH Manual 02]] | ||
'''[[Specific Process Knowledge/Lithography/Development|Automatic puddle development]]''' | '''[[Specific Process Knowledge/Lithography/Development|Automatic puddle development]]''' | ||
*[[Specific_Process_Knowledge/Lithography/Development | *[[Specific_Process_Knowledge/Lithography/Development/UV_developer|Developer: TMAH UV-lithography]] | ||
*[[Specific_Process_Knowledge/Lithography/ | *[[Specific_Process_Knowledge/Lithography/Development/DUV_developer|Developer: TMAH Stepper]] | ||
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