Specific Process Knowledge/Lithography/EBeamLithography/HSQ Dose Test: Difference between revisions
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HSQ Dose Test | |||
= HSQ Dose Test = | |||
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SEM images were recorded and analyzed from the structure shown below: | SEM images were recorded and analyzed from the structure shown below: The numbers indicate the line width and pitch. | ||
[[File:design.png|frameless|left|341x341px]] | [[File:design.png|frameless|left|341x341px]] | ||
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