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{{cc-nanolab}}
'''Feedback to this page''': '''[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php/Specific_Process_Knowledge/Characterization/Optical_microscope click here]'''  
'''Feedback to this page''': '''[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php/Specific_Process_Knowledge/Characterization/Optical_microscope click here]'''  


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[[Category: Characterization|Optical mi]]
[[Category: Characterization|Optical mi]]


{|border="1" cellspacing="1" cellpadding="3" style="text-align:left;"
|-
|-style="background:white; color:black; vertical-align:middle; text-align:center;"
|
!Nikon SMZ 1000
!Noco IR
!Leica INM 100
!Zeiss Jenatech
!Nikon Eclipse L200 #1
!Nikon Eclipse L200 #2
!Nikon Eclipse L200N #3
!Nikon Eclipse L200N #4
!Nikon ME 600
!Leica S8 APO
!Zeiss Axiotron
|-


{| border="1" cellspacing="0" cellpadding="3"
!
! Zeiss Jenatech (strain)
! Nikon SMZ 1500
! Leica S8 APO
! Leitz Medilux
! Zeiss Axiotron 2
! Zeiss Jenatech (particles measurements)
! Noco IR microscope
! Nikon SMZ 1000
! Nikon ME 600
! Nikon Eclipse L200
! Nikon Eclipse L200 (2)
! Nikon ECLIPSE L200N 3
! Nikon ECLIPSE L200N 4
|-
|-
|-style="background:white; color:black; vertical-align:middle; text-align:center;"
|
|
|[[image:Zeiss Jenatech strain.jpg|100x100px|thumb|left]]
|[[image:Nikon SMZ 1000.jpg|100x100px|thumb|center]]
[[image:Zeiss Jenatech strain_1.jpg|100x100px|thumb|left]]
|[[image:Noco IR microscope.jpg|100x100px|thumb|center]][[image:Noco IR microscope_1.jpg|100x100px|thumb|center]]
|[[image:Nikon SMZ 1500.jpg|100x100px|thumb|left]]
|[[image:LeicaINM100.jpg|100x100px|thumb|center]]
|[[image:Leica S8 APO.jpg|100x100px|thumb|left]]
|[[image:Zeiss Jenatech strain.jpg|100x100px|thumb|center]][[image:Zeiss Jenatech strain_1.jpg|100x100px|thumb|center]]
|[[image:Leitz Medilux.jpg|100x100px|thumb|left]]
|[[image:Nikon Eclipse L200.jpg|100x100px|thumb|center]][[image:Nikon Eclipse L200_1.jpg|100x100px|thumb|center]]
|[[image:Zeiss Axiotron.jpg|100x100px|thumb|left]]
|[[image:Nikon Eclipse L200 2.jpg|100x100px|thumb|center]][[image:Nikon Eclipse L200 2_1.jpg|100x100px|thumb|center]]
[[image:Zeiss Axiotron_1.jpg|100x100px|thumb|left]]
|[[image:Nikon Eclipse L 200 3_1.jpg|100x100px|thumb|center]]
|[[image:Zeiss Jenatech particle measurement_2.jpg|100x100px|thumb|left]]
|[[image:Nikon Eclipse L 200 4_1.jpg|100x100px|thumb|center]]
[[image:Zeiss Jenatech particle measurement_1.jpg|100x100px|thumb|left]]
|[[image:Nikon ME 600.jpg|100x100px|thumb|center]][[image:Nikon ME 600_1.jpg|100x100px|thumb|center]]
|[[image:Noco IR microscope.jpg|100x100px|thumb|left]]
|[[image:Leica S8 APO.jpg|100x100px|thumb|center]]
[[image:Noco IR microscope_1.jpg|100x100px|thumb|left]]
|[[image:Zeiss Axiotron.jpg|100x100px|thumb|center]][[image:Zeiss Axiotron_1.jpg|100x100px|thumb|center]]
|[[image:Nikon SMZ 1000.jpg|100x100px|thumb|left]]
|-
||[[image:Nikon ME 600.jpg|100x100px|thumb|left]]
 
[[image:Nikon ME 600_1.jpg|100x100px|thumb|left]]
|-
|[[image:Nikon Eclipse L200.jpg|100x100px|thumb|left]]
|-style="background:LightGrey; color:black; vertical-align:middle; text-align:left;"
[[image:Nikon Eclipse L200_1.jpg|100x100px|thumb|left]]
!Location
|[[image:Nikon Eclipse L200 2_1.jpg|100x100px|thumb|left]]
|346-901
[[image:Nikon Eclipse L200 2.jpg|100x100px|thumb|left]]
|346-901
|[[File:Nikon Eclipse L 200 3_1.jpg|100x100px|thumb|left]]
|346-901
|[[File:Nikon Eclipse L 200 4_1.jpg|100x100px|thumb|left]]
|cleanroom<br>D-3?
|-  
|cleanroom<br>D-3
|'''Location'''
|cleanroom<br>A-1
|Check LabManager
|cleanroom<br>D-3
|Check LabManager
|cleanroom<br>E-5
|Check LabManager
|cleanroom<br>F-1?
|Check LabManager
|cleanroom<br>Cx1
|Check LabManager
|cleanroom<br>F-3
|Check LabManager
|-
|Check LabManager
 
|Check LabManager
|-
|Check LabManager
|-style="background:WhiteSmoke; color:black; vertical-align:middle; text-align:left;"
|Check LabManager
!Responsible group
|Check LabManager
|Wet chemistry
|Check LabManager
|Wet chemistry
|Check LabManager
|Wet chemistry
|-
|Lithography
|'''Special features'''
|Lithography
|Wollastron prism
|Lithography
|Stereoscopic microscope
|Lithography
|Stereoscopic microscope
|Lithography
|Lithography
|Lithography
|Lithography
|-


|No
|-
|No
|-style="background:LightGrey; color:black; vertical-align:middle; text-align:left;"
|No
!Objectives
|Infra red (IR) camera
|Zoom 0.8x - 8x
|Stereoscopic microscope
|
|Wollastron prism
*2.5x
|Motorized stage
*10x
*20x
*50x
|
*2.5x
*5x
*10x
*20x
*50x
|
*5x
*10x
*20x
*50x
*100x
|
*2.5x
*5x
*10x
*20x
*50x
|
*2.5x
*5x
*10x
*20x
*50x
*100x
|
*2.5x
*5x
*10x
*20x
*50x
*100x
|
*2.5x
*5x
*10x
*20x
*50x
*100x
|
*5x
*10x
*20x
*50x
*100x
|Zoom 1x - 8x
|
*5x
*10x
*20x
*50x
|-


[[Specific_Process_Knowledge/Characterization/Optical microscope/Nikon Eclipse L200 auto scan guide|auto scan guide]]
|No
|No
|No
|-
|-
|'''Ocular magnification'''
|-style="background:WhiteSmoke; color:black; vertical-align:middle; text-align:left;"
!Ocular
|10x
|10x
|10x
|No
|No
|10x
|10x
|10x
|10x
|10x
|10x
|10x
|10x
|No
|10x
|10x
|10x
|10x
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|10x
|10x
|-
|-
|'''Objective magnification'''
 
|2.5x, 5x, 10x, 20x, 50x
|Zoom 100x
|Zoom 80x
|2.5x, 5x, 10x, 20x, 50x
|5x, 10x, 20x, 50x
|5x, 10x, 20x, 50x, 100x
|2.5x, 5x, 20x, 50x
|Zoom 100x
|5x, 10x, 20x, 50x, 100x
|2.5x, 5x, 10x, 20x, 50x, 100x
|2.5x, 5x, 10x, 20x, 50x, 100x
|2.5x, 5x, 10x, 20x, 50x, 100x
|2.5x, 5x, 10x, 20x, 50x, 100x
|-
|-
|'''Bright field'''
|-style="background:LightGrey; color:black; vertical-align:middle; text-align:left;"
|Yes
!Special features
|No
|Stereoscopic microscope
|No
|IR imaging
|Yes
|
|Yes
|
|Yes
|
|Yes
*Motorized stage
|No
*'''[[Specific_Process_Knowledge/Characterization/Optical microscope/Nikon Eclipse L200 auto scan guide|Auto scan guide]]'''
|Yes
|
|Yes
|
|Yes
|
|Yes
|
|Yes
|Stereoscopic microscope
|
|-
|-
|'''Dark field'''
 
|Yes
|No
|No
|No
|Yes
|Yes
|No
|No
|Yes
|Yes
|Yes
|Yes
|Yes
|-
|-
|'''Polarizer'''
|-style="background:WhiteSmoke; color:black; vertical-align:middle; text-align:left;"
|Yes
!Contrast mechanisms
|No
|
|No
*Brightfield
|No
|
|No
*Polarizer
|Yes
*Brightfield
|No
|
|No
*Brightfield
|Yes
*Darkfield
|No
|
|No
*Polarizer
|No
*Brightfield
|No
|
*Brightfield
*Darkfield
|
*Brightfield
*Darkfield
|
*Polarizer
*Brightfield
*Darkfield
|
*Polarizer
*Brightfield
*Darkfield
|
*Polarizer
*Brightfield
*Darkfield
|
*Brightfield
|
*Brightfield
*Darkfield
|-
|-
|'''Episcopic light (reflected light)'''
 
|Yes
|Yes
|Yes
|Yes
|Yes
|Yes
|Yes
|Yes
|Yes
|Yes
|Yes
|Yes
|Yes
|-
|-
|'''Diascopic light (transmitted light)'''
|-style="background:LightGrey; color:black; vertical-align:middle; text-align:left;"
|No
!Illumination modes
|Yes
|
|No
*Episcopic
|Yes
|
|Yes
*Episcopic
|No
*Diascopic
|Yes
|
|No
*Episcopic
|No
*Diascopic
|Yes
|
|Yes
*Episcopic
|Yes
*Diascopic
|Yes
|
*Episcopic
*Diascopic
|
*Episcopic
*Diascopic
|
*Episcopic
*Diascopic
|
*Episcopic
*Diascopic
|
*Episcopic
|
*Episcopic
|
*Episcopic
*Diascopic
|-
 
|-
|-
|'''View with eye'''
|-style="background:WhiteSmoke; color:black; vertical-align:middle; text-align:left;"
|Yes
!Camera
|Yes
|None
|Yes
|IR camera
|Yes
|DS-Fi2
|Yes
|None
|Yes
|DS-Fi1
|Yes
|DS-Fi1
|Yes
|
|Yes
*DS-Fi2
|Yes
*C-mount, 0.7x relay
|Yes
|
|Yes
*DS-Fi2
|Yes
*C-mount, 0.7x relay
|DS-Fi2
|None
|Infinity X
|-
|-
|'''View on screen (camera)'''
 
|Yes
|No
|No
|Yes
|Yes
|No
|Yes (IR)
|No
|Yes
|Yes
|Yes
|Yes
|Yes
|-
|-
|'''Measurement option'''
|-style="background:LightGrey; color:black; vertical-align:middle; text-align:left;"
|No
!Analysis software
|No
|None
|No
|None
|No
|NIS-D
|Yes
|None
|No
|NIS-BR
|No
|NIS-D
|No
|NIS-D
|No
|NIS-D
|Yes
|NIS-D
|Yes
|None
|Yes
|DeltaPix
|Yes
|-
|-
|}
|}


<br clear="all" />


It is possible to make an automated scanning of a full wafer on the Nikon Eclipse L200 with motorized stage '''[[Specific_Process_Knowledge/Characterization/Optical microscope/Nikon Eclipse L200 auto scan guide|Nikon Eclipse L200 auto scan guide]]'''
There are also two optical microscopes in building 451, a stereo microscope and a transmission microscope, that were both previously located in Packlab. Please ask staff / the BioMic group for details.
Retrieved from "https://labadviser.nanolab.dtu.dk//index.php?title=Specific_Process_Knowledge/Characterization/Optical_microscope"