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Specific Process Knowledge/Lithography/Coaters/labspin: Difference between revisions

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|-
|-
|-style="background:silver; color:black"
|-style="background:silver; color:black"
|
!Bowlset name
!Component solvent
!Component solvent
!Cleaning solvent
!Cleaning solvent
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|PGMEA/Ethyl Lactate
|PGMEA/Ethyl Lactate
|Acetone
|Acetone
|AZ 5214E, AZ 4562, AZ MiR 701, AZ nLOF 2000 series,
|
mr-I8100R?
AZ 5214E<br>
|Two sets available
AZ 4562<br>
AZ MiR 701<br>
AZ nLOF 2000 series<br>
mr-I8100R<br>
AZ 15nXT
|Two bowlsets available
|-
|-


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|Anisole
|Anisole
|Remover 1165
|Remover 1165
|AR-P 6200 series (CSAR 62), ZEP520A, mr EBL 6000, PMMA (in anisole),
|
UV5?, mr-T85L?, XNIL26?, mri8000?, mr-I 7010E?, mr-XNIL26_SF?, mrNIL210?
AR-P 6200 series (CSAR 62)<br>
ZEP520A<br>
mr EBL 6000<br>
PMMA (in anisole)<br>
UV5<br>
mr-T85L<br>
XNIL26<br>
mri8000<br>
mr-I 7010E<br>
mr-XNIL26_SF<br>
mrNIL210
|
|
|-
|-
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|-style="background:WhiteSmoke; color:black"
|-style="background:WhiteSmoke; color:black"
!HSQ/AR-N 8200
!HSQ/AR-N 8200
|MIBK/PGMEA
|MIBK/PGME/n-Butyl acetate
|Acetone
|Acetone
|HSQ (FOx series), AR-N 8200
|
HSQ (FOx series)<br>
AR-N 8200<br>
AR-N 8400
|
|
|-
|-
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|Propyl Acetate
|Propyl Acetate
|Acetone
|Acetone
|OrmoComp, OrmoStamp, OrmoPrime, OrmoClad?
|
Inkron?, mr-I-7030R?, mr-I 8020E?, mr-I-7010E?, mrNIL210?, mr-I 8500E?, mr-T85?, MRT HI01XP?, Protek B3?, mrUVCur21?, mr-I 8100E_XP?, mrNIL210?, MRT HI01XP?, mr-NIL 6000.3E?, mr-I 8100R_XP?
OrmoComp<br>
OrmoStamp<br>
OrmoPrime<br>
OrmoClad<br>
Inkron<br>
mr-I-7030R<br>
mr-I 8020E<br>
mr-I-7010E<br>
mrNIL210<br>
mr-I 8500E<br>
mr-T85<br>
MRT HI01XP<br>
Protek B3<br>
mrUVCur21<br>
mr-I 8100E_XP<br>
mrNIL210<br>
MRT HI01XP<br>
mr-NIL 6000.3E<br>
mr-I 8100R_XP
|
|
|-
|-
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|Mesitylene
|Mesitylene
|T1100
|T1100
|3022-X, 4022-X
|
3022-X<br>
4022-X
|
|
|-
|-
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|-style="background:LightGrey; color:black"
|-style="background:LightGrey; color:black"
!Epoxy/Acrylate
!Epoxy/Acrylate
|Cyclopentanone/PGMEA
|Cyclopentanone/PGMEA/PGME/GBL
|Acetone
|Acetone
|SU-8 2000 series, mr-DWL, LOR (1A, 3A, 5A)
|
mr-i 8030e?, mr-NIL200?, DELO-PRE/OM4310?, OrmoStamp?, Inkron?, mr-I 8020E?, OM4310?
SU-8 3000 series<br>
SU-8 series<br>
mr-DWL<br>
LOR (1A, 3A, 5A)<br>
mr-i 8030e<br>
mr-NIL200<br>
DELO-PRE/OM4310<br>
OrmoStamp<br>
Inkron<br>
mr-I 8020E<br>
OM4310
|
|
|-
|-
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|-
|-
|-style="background:WhiteSmoke; color:black"
|-style="background:WhiteSmoke; color:black"
!AR-P 617/AR-N 7520
!AR-P 617/AR-N 7520 New
|PGME/PGMEA
|PGME/PGMEA
|Acetone
|Acetone
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Please do NOT use substances which is not for the dedicated bowlsets  
Please do NOT use substances which is not for the dedicated bowlsets  
|-
|-
|style="background:LightGrey; color:black"|All purpose
|style="background:LightGrey; color:black"|Dirty bowlset
|style="background:WhiteSmoke; color:black"|
|style="background:WhiteSmoke; color:black"|
Spin coating of dirty substances in '''All purpose'''
Spin coating of other substances in dirty bowlset
<br>
<br>