Specific Process Knowledge/Lithography/Coaters: Difference between revisions
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**mr-DWL | **mr-DWL | ||
**other resists | **other resists | ||
OBS: this tool is in PolyFabLab | |||
|style="background:WhiteSmoke; color:black"| | |style="background:WhiteSmoke; color:black"| | ||
*Spraying imprint resist | *Spraying imprint resist | ||
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* KRF M230Y resist | * KRF M230Y resist | ||
* KRF M35G resist | * KRF M35G resist | ||
* PGMEA solvent for edge bead removal and backside rinse | |||
|style="background:WhiteSmoke; color:black"| | |style="background:WhiteSmoke; color:black"| | ||
* AR-P 6200.09 (CSAR) for 2", 4", and 6" | * AR-P 6200.09 (CSAR) for 2", 4", and 6" | ||
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* yes | * yes | ||
* pneumatic dispense for SU-8 resist and EBR solvent | * pneumatic dispense for SU-8 resist and EBR solvent <span style="color:red">OBS: disabled 2024</span> | ||
|colspan="2" style="background:WhiteSmoke; color:black"|Only manual dispense | |colspan="2" style="background:WhiteSmoke; color:black"|Only manual dispense | ||
|style="background:WhiteSmoke; color:black"|Only manual dispense | |style="background:WhiteSmoke; color:black"|Only manual dispense | ||