Specific Process Knowledge/Characterization/XPS/Processing/ALDSandwich1/3scanned: Difference between revisions
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=Processing of high resolution scanned spectra = | =Processing of high resolution scanned spectra = | ||
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== The Ti2p peak == | == The Ti2p peak == | ||
The titanium Ti2p peak is notoriously difficult to fit. | The titanium Ti2p peak is notoriously difficult to fit. Let us first look for some clues in [[Specific Process Knowledge/Characterization/XPS/Processing/XPSknowledgeview |XPS Knowledge view]]. The section below is a copy of the content in XPS Knowledge View (Avantage version 5.986). | ||
=== XPS Knowledge on the fitting of the Ti2p peak === | |||
'''''Binding energies of common chemical states''''' | '''''Binding energies of common chemical states''''' | ||
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** ''Sub-oxides and/or metal may be formed during sputtering of the oxide.'' | ** ''Sub-oxides and/or metal may be formed during sputtering of the oxide.'' | ||
=== The fitting of the Ti2p peak === | |||
'''Please note that clicking on any of the two spectra above when using XPS Knowledge View in Avantage will generate a new processing grid with this particular set of data, peak table etc. It may be quite convenient to investigate what constraints have been added - obviously also for any other element.''' | |||
'''Please note that clicking on any of the two spectra above when using XPS Knowledge View will generate a new processing grid | |||
The only challenge we are missing from this cocktail of asymmetric peak shapes, differences in spin-orbit splitting, reduction of fully oxidized Ti2p to sub-oxides and satellite features is the presence of TiN. | The only challenge we are missing from this cocktail of asymmetric peak shapes, differences in spin-orbit splitting, reduction of fully oxidized Ti2p to sub-oxides and satellite features is the presence of TiN. | ||