Specific Process Knowledge/Characterization/XPS/Processing/ALDSandwich1/3scanned: Difference between revisions
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=Processing of high resolution scanned spectra = | =Processing of high resolution scanned spectra = | ||
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== The Ti2p peak == | == The Ti2p peak == | ||
The titanium Ti2p peak is notoriously difficult to fit. | The titanium Ti2p peak is notoriously difficult to fit. Let us first look for some clues in [[Specific Process Knowledge/Characterization/XPS/Processing/XPSknowledgeview |XPS Knowledge view]]. The section below is a copy of the content in XPS Knowledge View (Avantage version 5.986). | ||
=== XPS Knowledge on the fitting of the Ti2p peak === | |||
'''''Binding energies of common chemical states''''' | |||
{| class="wikitable" | |||
|- | |||
! ''Chemical state'' !!'' Binding energy Ti2p<sub>3/2</sub>/eV'' | |||
|- | |||
| ''Ti metal'' || ''454.1'' | |||
|- | |||
| ''TiN'' || 454.9 | |||
|- | |||
| ''TiO<sub>2</sub>'' || ''458.5'' | |||
|- | |||
| ''SrTiO<sub>2</sub>'' || ''458.4'' | |||
|- | |||
|} | |||
'''''Interpretations of XPS spectra''''' | |||
*'' Ti metal gives asymmetric Ti2p peak shapes'' | *'' Ti metal gives asymmetric Ti2p peak shapes'' | ||
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** ''Sub-oxides and/or metal may be formed during sputtering of the oxide.'' | ** ''Sub-oxides and/or metal may be formed during sputtering of the oxide.'' | ||
=== The fitting of the Ti2p peak === | |||
'''Please note that clicking on any of the two spectra above when using XPS Knowledge View in Avantage will generate a new processing grid with this particular set of data, peak table etc. It may be quite convenient to investigate what constraints have been added - obviously also for any other element.''' | |||
'''Please note that clicking on any of the two spectra above when using XPS Knowledge View will generate a new processing grid | |||
The only challenge we are missing from this cocktail of asymmetric peak shapes, differences in spin-orbit splitting, reduction of fully oxidized Ti2p to sub-oxides and satellite features is the presence of TiN. | The only challenge we are missing from this cocktail of asymmetric peak shapes, differences in spin-orbit splitting, reduction of fully oxidized Ti2p to sub-oxides and satellite features is the presence of TiN. | ||
First, let us find some reasonable parameters for the Ti2p metallic peak. For that purpose, we analyse an old data set acquired on pure Ti. | First, let us find some reasonable parameters for the Ti2p metallic peak. For that purpose, we analyse an old data set acquired on pure Ti. | ||
[[File:Ti 2p highres 1.jpg|700px]] | [[File:Ti 2p highres 1.jpg|700px]] | ||
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* The Lorentzian-to-Gaussian ratio is freed. Before, it was set to 100. | * The Lorentzian-to-Gaussian ratio is freed. Before, it was set to 100. | ||
* The three asymmetry parameters 'Tail Mix', 'Tail Height' and 'Tail Exponent' are also free to find a minimum within some restricted range on the condition that the parameters of the two peaks be the same. | * The three asymmetry parameters 'Tail Mix', 'Tail Height' and 'Tail Exponent' are also free to find a minimum within some restricted range on the condition that the parameters of the two peaks be the same. | ||
An optimum fit is produced and accepted. In this case the outcome of the fitting is irrelevant for us - the interesting part is the the Peak table. To save it, click the 'Save Peak Table' button shown in the green square and save as *.vgt file. | An optimum fit is produced and accepted. In this case the outcome of the fitting is irrelevant for us - the interesting part is the the Peak table. To save it, click the upper 'Save Peak Table' button shown in the green square and save as *.vgt file. To load the peak table into our Ti2p fitting, click the lower 'Load Peak Table' in the green square. | ||