Specific Process Knowledge/Characterization/XPS/Processing/ALDSandwich1: Difference between revisions
Appearance
No edit summary |
|||
| (3 intermediate revisions by the same user not shown) | |||
| Line 1: | Line 1: | ||
<!--Checked for updates on 24/8-2021. ok/ jmli--> | |||
<!--Checked for updates on 21/10-2025. ok/ jmli--> | |||
= XPS analysis of ALD deposited layers = | = XPS analysis of ALD deposited layers = | ||
| Line 49: | Line 52: | ||
==== [[Specific Process Knowledge/Characterization/XPS/Processing/ALDSandwich1/1Open|1. Open the experiment and prepare processing grids]] ==== | ==== [[Specific Process Knowledge/Characterization/XPS/Processing/ALDSandwich1/1Open|1. Open the experiment and prepare processing grids]] ==== | ||
==== [[Specific Process Knowledge/Characterization/XPS/Processing/ALDSandwich1/2Survey|2. Survey spectra | ==== [[Specific Process Knowledge/Characterization/XPS/Processing/ALDSandwich1/2Survey|2. Survey spectra processing]] ==== | ||
==== [[Specific Process Knowledge/Characterization/XPS/Processing/ALDSandwich1/3scanned|3. High resolution scan processing]]==== | |||