Specific Process Knowledge/Etch/III-V RIE: Difference between revisions
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'''''Unless otherwise stated, this page is written by DTU Nanolab internal''''' | '''''Unless otherwise stated, this page is written by DTU Nanolab internal''''' | ||
==III-V RIE Plassys== | ==III-V RIE Plassys <span style="background:#ff0000"> This tool has been decommissioned - please ask the dryetch group for alternatives.</span>== | ||
===(will be decommissioned October 2025)=== | |||
Name: MG300 RIE <br> | Name: MG300 RIE <br> | ||