Specific Process Knowledge/Thermal Process/RTP Annealsys: Difference between revisions
| (2 intermediate revisions by 2 users not shown) | |||
| Line 48: | Line 48: | ||
|- | |- | ||
|style="background:Silver; color:black"|Thermocouple Control | |style="background:Silver; color:black"|Thermocouple Control | ||
| | |style="background:LightGrey; color:black"| | ||
* RT to | * RT to 1000 <sup>o</sup>C | ||
|Recommended '''up to 800 <sup>o</sup>C''', if '''forming gas''' is used. | |style="background:WhiteSmoke; color:black;" align="left"|Recommended '''up to 800 <sup>o</sup>C''', if '''forming gas''' is used. | ||
|- | |- | ||
!style="background:silver; color:black" align="center" align="center" rowspan="4"|Process gas | !style="background:silver; color:black" align="center" align="center" rowspan="4"|Process gas | ||