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__notoc__
__notoc__
[[image:Til LA forside 2024-05-03 161145.png|right|500x500px|thumb|link=|Photos: DTU Nanolab]]
[[image:Til LA forside 2024-05-03 161145.png|right|500x500px|thumb|link=|Photos: DTU Nanolab]]
{{cc-nanolab}}
LabAdviser is a Wiki owned by DTU Nanolab for users of our facilities. It was created with the main purpose of sharing knowledge. It contains information about available equipment and fabrication processes in the cleanroom facilities in building 346/347 and the electron microscopes and supporting tools in 307/314.


LabAdviser is designed to help you identify the right equipment and provide a solid starting point for your cleanroom processes or for further optimization to meet specific requirements. However, due to ongoing development of tools and processes, some information may be incomplete or not up-to-date. We make every effort to provide reliable information but we provide no warranty as to the accuracy, reliability or completeness of the information found in LabAdviser.


LabAdviser is a Wiki for users of DTU Nanolab facilities created with the main puprose of sharing knowledge. It contains information about available equipment and fabrication processes in the cleanroom facilities in 346/347 and the characterisation equipment in building 307/314.
Please note that LabAdviser is not a replacement for direct communication with DTU Nanolab staff. We strongly recommend reviewing the information on LabAdviser as preparation before reaching out to staff members.   
 
LabAdviser is designed to help you identify the right equipment and provide a solid starting point for your cleanroom processes or further optimization to meet specific requirements. However, due to ongoing development of tools and processes, some information may be incomplete or not up-to-date.
 
Please note that LabAdviser is not a replacement for direct communication with DTU Nanolab staff. We make every effort to provide reliable information but we provide no warranty as to the accuracy, reliability or completeness of the information found in LabAdviser. We strongly recommend reviewing the information on LabAdviser as preparation before reaching out to staff members.   


If in doubt, you are always welcome to contact us via [mailto:nanolabsupport@nanolab.dtu.dk nanolabsupport@nanolab.dtu.dk].   
If in doubt, you are always welcome to contact us via [mailto:nanolabsupport@nanolab.dtu.dk nanolabsupport@nanolab.dtu.dk].   
Line 14: Line 11:
[[Image:Virtual tour in the clean room.JPG|right|300px|thumb|link=https://www.nanolab.dtu.dk/capabilities/cleanroom-3d-tour|Click to Enter the Virtual Tour through DTU Nanolabs cleanroom]]
[[Image:Virtual tour in the clean room.JPG|right|300px|thumb|link=https://www.nanolab.dtu.dk/capabilities/cleanroom-3d-tour|Click to Enter the Virtual Tour through DTU Nanolabs cleanroom]]


<BR>Even if you are not a current user at our facilities, you are welcome to surf around. Please note that note that not all information might be available without login. You can take a [https://www.nanolab.dtu.dk/capabilities/cleanroom-3d-tour Virtual Tour of the DTU Nanolab cleanroom facility]. Please also take a look at our homepage [https://www.nanolab.dtu.dk/english www.nanolab.dtu.dk] for more information on how to get access and/or collaborate with us as well as our capabilities and research.  
<BR>Even if you are not a current user at our facilities, you are welcome to surf around. Please note that not all information is available without login. You can take a [https://www.nanolab.dtu.dk/capabilities/cleanroom-3d-tour Virtual Tour of the DTU Nanolab cleanroom facility]. Please also take a look at our homepage [https://www.nanolab.dtu.dk/english www.nanolab.dtu.dk] for more information on how to get access and/or collaborate with us as well as our capabilities and research.  


[[Image:YouTube.JPG|right|300px|thumb|link=https://www.youtube.com/@dtunanolab1398|Click to Visit DTU Nanolab on YouTube ]]
[[Image:YouTube.JPG|right|300px|thumb|link=https://www.youtube.com/@dtunanolab1398|Click to Visit DTU Nanolab on YouTube ]]
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*Equipment available in- and outside of the Cleanroom Facility (building 346)
*Equipment available in- and outside of the Cleanroom Facility (building 346)
*Equipment for Characterization, primarily Electron Microscopy (building 314 and 307)
*Equipment for Characterization, primarily Electron Microscopy (building 314 and 307)
*Equipment available in the PolyFabLab and PolySupLab (building 347)
*Equipment available in the PolyFabLab and SupportLab (building 347)
*Processes for Micro- and Nanofabrication available at DTU Nanolab
*Processes for Micro- and Nanofabrication available at DTU Nanolab
*Methods in Electron Microscopy available in building 314/307
*Methods in Electron Microscopy available in building 314/307
<br>
<br>
<br>
<br>
'''How Labadviser works'''
==How Labadviser works==


Among others information, Labadviser offers users new to nano- and microfabrication information on how build up a process flow, f.ex.
Among others information, Labadviser offers users nano- and microfabrication information on how to build up a process flow, f.ex.
how to create a pattern, what materials to use, what process or equipment to use, how to avoid cross contamination between machines, or how to clean samples.  
how to create a pattern, what materials to use, what process or equipment to use, how to avoid cross contamination between machines, or how to clean samples.  


Line 43: Line 40:
<br>
<br>
<br>
<br>
'''How to add Information to Labadviser'''
==How to add Information to Labadviser==


Sharing knowledge is the key for further development and all our users are encouraged to contribute. In our laboratories thousands of experiments are made. We want to make sure that the knowledge and experience acquired through these become accessible to current and future users. We are interested in any process development being done on our equipment, and even single tests of new recipes can be helpful. For the safety of our users as well as our equipment, we cannot allow LabAdviser to have an open-for-all-input structure like Wikipedia.  
Sharing knowledge is the key for further development and all our users are encouraged to contribute. In our laboratories thousands of experiments are made. We want to make sure that the knowledge and experience acquired through these become accessible to current and future users. We are interested in any process development being done on our equipment, and even single tests of new recipes can be helpful. For the safety of our users as well as our equipment, we cannot allow LabAdviser to have an open-for-all-input structure like Wikipedia.  
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We are committed to giving proper credit to all contributors. If you provide material for publication in Labadviser, you will be clearly acknowledged as the author or source. Before publishing your material, we will request your written permission to do so. This ensures transparency and respect for your rights as a creator. More information regarding copyrights can be found [[LabAdviser:Copyright | <b>here</b>]].
We are committed to giving proper credit to all contributors. If you provide material for publication in Labadviser, you will be clearly acknowledged as the author or source. Before publishing your material, we will request your written permission to do so. This ensures transparency and respect for your rights as a creator. More information regarding copyrights can be found [[LabAdviser:Copyright | <b>here</b>]].


Any feedback or input is welcome and can be send to the LabAdviser mailbox: [mailto:labadviser@nanolab.dtu.dk labadviser@nanolab.dtu.dk].  
Any feedback or input is welcome and can be send to the LabAdviser mailbox: [mailto:labadviser@nanolab.dtu.dk labadviser@nanolab.dtu.dk].
<br>
<br>


<!--''You will be credited for the material that you provide to us. We want to credit the right people for their work and be sure that we do not violate any rights or patents, etc. To publish your material in Labadviser we will ask you for a written permission to publish your work.''
== Surveys and Statistics ==
!-->
 
== Surveys and statistics ==
'''Surveys'''
'''Surveys'''


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[https://labmanager.dtu.dk/function.php?module=PeriodicDocument&view=docs&page_id=397 Tech Forum Slides]
[https://labmanager.dtu.dk/function.php?module=PeriodicDocument&view=docs&page_id=397 Tech Forum Slides]
== Contact Information for DTU Nanolab ==
In order to get the quickest response to training requests, process approvals, questions etc. please use the following mailboxes to DTU Nanolab.
<br />
{| border="2" cellspacing="0" cellpadding="10" align="left"
|-
| style="background:silver; color:black" | '''Subject'''
| align="center" style="background:silver; color:black" | '''Email'''
| align="center" style="background:silver; color:black" | '''Description'''
|-
|-
| style="background: WhiteSmoke; color:black" |  '''General Inquiries'''
| align="center" style="background: WhiteSmoke; color:black"  | [mailto:nanolabsupport@nanolab.dtu.dk nanolabsupport@nanolab.dtu.dk]
| style="background: WhiteSmoke; color:black"  | Inquiries related to machines, cleanroom access, mask review, and others.  <BR><i>Note: Requests are commonly answered within 2 work days. </i>
|-
|-
| style="background: LightGrey; color:black" | '''Equipment Training'''
| align="center" style="background: LightGrey; color:black" | [mailto:training@nanolab.dtu.dk training@nanolab.dtu.dk]
| style="background: LightGrey; color:black" | All requests regarding equipment training. <BR><i>Note: Requests are commonly answered within 2 work days. </i>
|-
|-
| style="background:WhiteSmoke; color:black" | '''E-beam Microscopy Training (314/307)'''
| align="center" style="background:WhiteSmoke; color:black" | [mailto:microscopysupport@nanolab.dtu.dk microscopysupport@nanolab.dtu.dk]
| style="background:WhiteSmoke; color:black" | All requests regarding training on electron beam microscopy equipment in 314/307.  <BR><i>Note: Requests are commonly answered within 2 workdays. </i>
|-
|-
| style="background: LightGrey; color:black" |  '''Commercial Inquiries'''
| align="center" style="background: LightGrey; color:black" |  [mailto:sales@nanolab.dtu.dk sales@nanolab.dtu.dk]
| style="background: LightGrey; color:black" |  For all inquiries regarding in-sourcing, commercial applications, rent of cleanroom space, etc
|-
|-
| style="background: WhiteSmoke; color:black" | '''E-beam lithography training'''
| align="center" style="background: WhiteSmoke; color:black"  | [mailto:e-beam@nanolab.dtu.dk e-beam@nanolab.dtu.dk]
| style="background: WhiteSmoke; color:black" | Requests regarding training on JEOL JBX-9500FSZ or Raith Eline e-beam systems. Please study the material on [[Specific Process Knowledge/Lithography/EBeamLithography|the EBL Labadviser pages]] beforehand.
|-
|-
| style="background: LightGrey; color:black" | '''E-beam Cassette loading'''
| align="center" style="background: LightGrey; color:black" |  [mailto:e-beamload@nanolab.dtu.dk e-beamload@nanolab.dtu.dk]
| style="background: LightGrey; color:black" | Requests regarding cassette loading on JEOL JBX-9500FSZ.
|-
|-
| style="background: WhiteSmoke; color:black" | '''Metal Wishes'''
| align="center" style="background: WhiteSmoke; color:black" |  [mailto:metal@nanolab.dtu.dk metal@nanolab.dtu.dk]
| style="background: WhiteSmoke; color:black"  | Requests for change of metal in Thin Film Deposition equipment. <BR> See current and future materials in statuslog of the respective machines.
<BR>
[http://labmanager.dtu.dk/function.php?module=Machine&view=log&mach=244&type=status Lesker - status log]
<BR>
[http://labmanager.dtu.dk/function.php?module=Machine&view=log&mach=429&type=status E-Beam Evaporator (Temescal) - status log]
<BR>
[https://labmanager.dtu.dk/function.php?module=Machine&view=log&mach=511&type=status E-Beam Evaporator (10-pockets) - status log]
<BR>
[https://labmanager.dtu.dk/function.php?module=Machine&view=log&mach=441&type=status Sputter-System Metal-Oxide(PC1) - status log]
<BR>
[https://labmanager.dtu.dk/function.php?module=Machine&view=log&mach=442&type=status Sputter-System Metal-Nitride(PC3) - status log]
|-
|-
| style="background: LightGrey; color:black" |  '''Gas-related Requests'''
| align="center" style="background: LightGrey; color:black" |    [mailto:DCH-Gas@nanolab.dtu.dk DCH-Gas@nanolab.dtu.dk]
| style="background: LightGrey; color:black" |    All topics gas-related (issues, information regarding ordering, delivery, changing etc). Mostly for internal DTU Nanolab use.
|-
|-
| style="background: WhiteSmoke; color:black" |  '''LabAdviser Mailbox'''
| align="center" style="background: WhiteSmoke; color:black" | [mailto:labadviser@nanolab.dtu.dk?Subject=Feedback%20to%20Labadviser labadviser@nanolab.dtu.dk]
| style="background: WhiteSmoke; color:black" | Any questions or feedback to LabAdviser.
|-
|}
<br clear="all"/>
<br>
== Fabrication (B346/347) - Layout and Contacts ==
===Cleanroom (building 346)===
{| style="color: black;" width="100%"
| colspan="2" |
|-
| style="width: 50%"|
{| style="color: black;" width="100%"
| colspan="2" |
|-
| style="width: 40%"|
[[image:Cleanroom_naming_2017.jpg|500px|thumb|link=|Drawing: DTU CAS Digital]]
|}
| style="width: 50%"|
{|border="1" cellspacing="1" cellpadding="1" style="text-align:left;"
|-
|-
|-style="background:silver; color:black"
!Room number
!Location
!Phone number
|-
|-
|-style="background:WhiteSmoke; color:black"
!A-1
|At III-V RIE
|55 804
|-
|-
|-style="background:LightGrey; color:black"
!Ax2
|At the Lesker
|55 815
|-
|-
|-style="background:WhiteSmoke; color:black"
!A-5
|In the corner near the furnace/plasma asher
|55 803
|-
|-
|-style="background:LightGrey; color:black"
!B-1
|In the corridor, on the wall
|55 806
|-
|-
|-style="background:WhiteSmoke; color:black"
!C-1
|In the corridor, on the wall
|55 808
|-
|-
|-style="background:LightGrey; color:black"
!D-1
|In the gowning area (entrance room)
|55 703
|-
|-
|-style="background:WhiteSmoke; color:black"
!D-3
|At the KOH
|55 940
|-
|-
|-style="background:LightGrey; color:black"
!E-1
|By the e-beam computers
|55 943
|-
|-
|-style="background:WhiteSmoke; color:black"
!E-5/E-4
|By the MLAs in E-5, by mask aligner in E-4
|55 946
|-
|-
|-style="background:LightGrey; color:black"
!E-6
|Furnace 6"
|55 948
|-
|-
|-style="background:WhiteSmoke; color:black"
!F-1
|III-V growth
|55 949
|-
|-
|-style="background:LightGrey; color:black"
!F-2
|To the right of the XRD and Ellipsometer
|55 941
|-
|-
|-style="background:WhiteSmoke; color:black"
!F-3
|DUV Stepper
|55 947
|-
|-
|-style="background:LightGrey; color:black"
!Basement 901
|Hot Embosser, XRD RotAnode, Laser Micromachining Tool
|55 812
|-
|-style="background:WhiteSmoke; color:black"
!Basement 904
|To the right of the AFM
|55 813
|-
|}
|}
===Basement (building 346, phase 1)===
[[file:Basement 346 phase 1.jpg|left|700px|thumb|link=|Drawing: DTU CAS Digital]]
<br clear="all"/>
<br>
<br>
<br>
<br>
== Characterization (B314/307) - Layout and Contacts ==
{| style="color: black;" width="100%";
| colspan="2" |
|-
| style="width: 50%"|
{| style="color: black;" width="100%"
| colspan="2" |
|-
| style="width: 40%"|
[[image:CEN building.jpg|600px|thumb|link=|Drawing: DTU CAS Digital]]
|}
| style="width: 50%"|
{|border="1" cellspacing="1" cellpadding="1" style="text-align:left;"
|-
|-
|-style="background:silver; color:black"
!Room number
!Location
!Phone number
|-
|-
|-style="background:WhiteSmoke; color:black"
!314-011
|QFEG 200 Cryo ESEM
|56 406
|-
|-
|-style="background:LightGrey; color:black"
!314-014
|Tecnai T20
|56 407
|-
|-
|-style="background:WhiteSmoke; color:black"
!314-032
|Prep room 1
|No phone
|-
|-
|-style="background:LightGrey; color:black"
!314-034
|AFEG 250 ESEM
|56 414
|-
|-
|-style="background:WhiteSmoke; color:black"
!314-037
|Titan ETEM
|56 418
|-
|-
|-style="background:LightGrey; color:black"
!314-040
|Prep room 2 (Bio)
|56 413
|-
|-
|-style="background:WhiteSmoke; color:black"
!314-042
|Titan ATEM
|56 409
|-
|-
|-style="background:LightGrey; color:black"
!314-060
|Nova NanoSEM 600
|56 412
|-
|-
|-style="background:WhiteSmoke; color:black"
!314-061
|Helios Nanolab
|56 411
|-
|}
|}
<br clear="all" />

Latest revision as of 11:33, 29 September 2025

Photos: DTU Nanolab

LabAdviser is a Wiki owned by DTU Nanolab for users of our facilities. It was created with the main purpose of sharing knowledge. It contains information about available equipment and fabrication processes in the cleanroom facilities in building 346/347 and the electron microscopes and supporting tools in 307/314.

LabAdviser is designed to help you identify the right equipment and provide a solid starting point for your cleanroom processes or for further optimization to meet specific requirements. However, due to ongoing development of tools and processes, some information may be incomplete or not up-to-date. We make every effort to provide reliable information but we provide no warranty as to the accuracy, reliability or completeness of the information found in LabAdviser.

Please note that LabAdviser is not a replacement for direct communication with DTU Nanolab staff. We strongly recommend reviewing the information on LabAdviser as preparation before reaching out to staff members.

If in doubt, you are always welcome to contact us via nanolabsupport@nanolab.dtu.dk.

Click to Enter the Virtual Tour through DTU Nanolabs cleanroom


Even if you are not a current user at our facilities, you are welcome to surf around. Please note that not all information is available without login. You can take a Virtual Tour of the DTU Nanolab cleanroom facility. Please also take a look at our homepage www.nanolab.dtu.dk for more information on how to get access and/or collaborate with us as well as our capabilities and research.

Click to Visit DTU Nanolab on YouTube

You are also welcome to explore our YouTube channel with a selection of training videos.


LabAdviser contains information about

  • Equipment available in- and outside of the Cleanroom Facility (building 346)
  • Equipment for Characterization, primarily Electron Microscopy (building 314 and 307)
  • Equipment available in the PolyFabLab and SupportLab (building 347)
  • Processes for Micro- and Nanofabrication available at DTU Nanolab
  • Methods in Electron Microscopy available in building 314/307



How Labadviser works

Among others information, Labadviser offers users nano- and microfabrication information on how to build up a process flow, f.ex. how to create a pattern, what materials to use, what process or equipment to use, how to avoid cross contamination between machines, or how to clean samples.

The structure of LabAdviser allows users to begin their search either from a known process. For example, if your process involves depositing a gold layer, you would start with the "Thin Film Deposition" section. There, you will find two tables:

  • Overview of Materials, such semiconductors, oxides, nitrides, metals, etc.
  • Overview over Thin Film Deposition Equipment, such as thermal evaporator, e-beam evaporator, sputter coater, etc.

If you know the material you want to deposit but are unsure which tool to use or how different deposition methods compare, you can select the material (e.g. gold). You will then be directed to a subpage listing all equipment capable of depositing that material and, if available, with some additional material-specific process information.

Alternatively, if you're more interested in a specific piece of equipment, or wish to explore which materials it can process, selecting that equipment will lead you to a dedicated page with detailed process information, including compatible materials.


How to add Information to Labadviser

Sharing knowledge is the key for further development and all our users are encouraged to contribute. In our laboratories thousands of experiments are made. We want to make sure that the knowledge and experience acquired through these become accessible to current and future users. We are interested in any process development being done on our equipment, and even single tests of new recipes can be helpful. For the safety of our users as well as our equipment, we cannot allow LabAdviser to have an open-for-all-input structure like Wikipedia.

We are committed to giving proper credit to all contributors. If you provide material for publication in Labadviser, you will be clearly acknowledged as the author or source. Before publishing your material, we will request your written permission to do so. This ensures transparency and respect for your rights as a creator. More information regarding copyrights can be found here.

Any feedback or input is welcome and can be send to the LabAdviser mailbox: labadviser@nanolab.dtu.dk.

Surveys and Statistics

Surveys

DTU Nanolab performs regular customer surveys which are available on LabManager. Access to LabManager requires a DTU account and access to DTU Nanolab facilities.

Bld.314/307
Bld.346/347


Tech Forum slides

The purpose of the Nanolab Technology Forum is to discuss the current and future technological possibilities at Nanolab, including user requirements, current equipment status, equipment acquisition, funding, etc.

Tech Forum slides are available on LabManager. Access to LabManager requires a DTU account and access to DTU Nanolab facilities.

Tech Forum Slides

Retrieved from "https://labadviser.nanolab.dtu.dk//index.php?title=LabAdviser&oldid=54739"