Specific Process Knowledge/Lithography/EBeamLithography/JEOLPatternPreparation: Difference between revisions
| Line 158: | Line 158: | ||
*Use a nummerical PSF | *Use a nummerical PSF | ||
The pre-computed PSF can be loaded from either a separate file, from the local archive or from the global archive. In any case the file will probably originate from a Tracer simulation | The pre-computed PSF can be loaded from either a separate file, from the local archive or from the global archive. In any case the file will probably originate from a Tracer simulation. It can be advantageus to place your PSF in the global (network) archive such that it is available on the Beamer PC in the cleanroom as well as the Beamer PC outside the cleanroom. | ||
A guassian approximation is mostly useful if trying to replicate a result from litterature or if one has worked deliberately towards determining the gaussian constants for a particular process. | A guassian approximation is mostly useful if trying to replicate a result from litterature or if one has worked deliberately towards determining the gaussian constants for a particular process. | ||