Specific Process Knowledge/Thermal Process/Oxidation: Difference between revisions
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The standard recipes, quality control limits and results for the Boron Drive-in + Pre-dep furnace (A1) and the Phosphorus Drive-in furnace (A3) can be found here: | The standard recipes, quality control limits and results for the Boron Drive-in + Pre-dep furnace (A1) and the Phosphorus Drive-in furnace (A3) can be found here: | ||
*[[Specific Process Knowledge/Thermal Process/A1 | *[[Specific Process Knowledge/Thermal Process/A1 Bor Drive-in furnace|Standard recipes, QC limits and results for the Boron Drive-in + Predep furnace (A1)]] | ||
*[[Specific Process Knowledge/Thermal Process/A3 Phosphor Drive-in furnace|Standard recipes, QC limits and results for the Phosphorus Drive-in furnace (A3)]] | *[[Specific Process Knowledge/Thermal Process/A3 Phosphor Drive-in furnace|Standard recipes, QC limits and results for the Phosphorus Drive-in furnace (A3)]] | ||
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</gallery> | </gallery> | ||
==Breakdown voltage measurements== | |||
In order to evaluate the quality of the oxide layers that can be grown in the oxidation furnaces, some breakdown voltage measurement have been made. | |||
The results can be found on this page: | The results can be found on this page: | ||
*[[Specific Process Knowledge/Thermal Process/Oxidation/Breakdown voltage measurements]] | *[[Specific Process Knowledge/Thermal Process/Oxidation/Breakdown voltage measurements]] | ||