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The standard recipes, quality control limits and results for the Boron Drive-in + Pre-dep furnace (A1) and the Phosphorus Drive-in furnace (A3) can be found here:  
The standard recipes, quality control limits and results for the Boron Drive-in + Pre-dep furnace (A1) and the Phosphorus Drive-in furnace (A3) can be found here:  


*[[Specific Process Knowledge/Thermal Process/A1 Furnace Boron drive-in|Standard recipes, QC limits and results for the Boron Drive-in + Predep furnace (A1)]]
*[[Specific Process Knowledge/Thermal Process/A1 Bor Drive-in furnace|Standard recipes, QC limits and results for the Boron Drive-in + Predep furnace (A1)]]
*[[Specific Process Knowledge/Thermal Process/A3 Phosphor Drive-in furnace|Standard recipes, QC limits and results for the Phosphorus Drive-in furnace (A3)]]
*[[Specific Process Knowledge/Thermal Process/A3 Phosphor Drive-in furnace|Standard recipes, QC limits and results for the Phosphorus Drive-in furnace (A3)]]


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!Generel description
!Generel description
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*Dry and wet oxidation
*Dry and wet oxidation  
*Boron pre-deposition and boron drive-in are also done in the furnace
*Boron pre-deposition and boron drive-in are also done in the furnace
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*Dry and wet oxidation of 100 mm and 150 mm wafers  
*Dry and wet oxidation of 100 mm and 150 mm wafers  
*Oxidation and annealing of wafers from the LPCVD furnaces and PECVD4.
*Oxidation and annealing of wafers from the LPCVD furnaces and PECVD4  
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*Dry and wet oxidation and annealing of wafers from the wafer bonders and from PECVD4 and PECVD3
*Dry and wet oxidation and annealing of wafers from the wafer bonders and from PECVD4 and PECVD3
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</gallery>
</gallery>


==Breakdown voltage measurements==


===Breakdown voltage measurements===
In order to evaluate the quality of the oxide layers that can be grown in the oxidation furnaces, some breakdown voltage measurement have been made.


Breakdown measurements have been done for A1 Boron Drive-in/Pre-dep furnace, A2 Gate Oxide furnace and A3 Phosphorus drive-in furnaces in November 2021.
For E1  Oxidation (8") furnace, it has been done in Febuary 2022.
The results can be found on this page:
The results can be found on this page:


*[[Specific Process Knowledge/Thermal Process/Oxidation/Breakdown voltage measurements]]
*[[Specific Process Knowledge/Thermal Process/Oxidation/Breakdown voltage measurements]]
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