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'''Feedback to this page''': '''[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php/LabAdviser/314/Microscopy_314-307/SEM/AFEG click here]'''
''This section is written by DTU Nanolab internal if nothing else is stated.''
[[index.php?title=Category:314]]
[[index.php?title=Category:314-Microscopy]]
__FORCETOC__
=AFEG 250 Analytical ESEM (FEI Quanta FEG 250) =
=AFEG 250 Analytical ESEM (FEI Quanta FEG 250) =


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*'''Electron source'''
*'''Electron source'''
Field emission gun
**Field emission gun
*'''Accelerating voltage'''
*'''Accelerating voltage'''
500 V- 30 kV
**500 V- 30 kV
*'''Resolution'''
*'''Resolution'''
2 nm at 30 kV (SE)
**2 nm at 30 kV (SE)
*'''Imaging detectors'''
*'''Imaging detectors'''
Everhart-Thornley (SE/BSE), Solid State BSE, Large Field, Gaseous SE, Gaseous BSE, Gaseous Analytical, STEM, vCD and CCD Camera
**Everhart-Thornley (SE/BSE)
**Solid State BSE
**Large Field (LVD)
**Gaseous SE (GSED)
**Gaseous BSE
**Gaseous Analytical (GAD)
**STEM
**vCD
*'''Imaging modes'''
*'''Imaging modes'''
High and low vacuum
High and low vacuum
*'''Analytical capabilities'''
*'''Analytical capabilities'''
Energy dispersive X-rays (Oxford Instruments 50 mm2 X-Max silicon drift detector, MnKα resolution at 124 eV)
**Energy dispersive X-rays (Oxford Instruments 50 mm2 X-Max silicon drift detector, MnKα resolution at 124 eV)
Wavelength Dispersive Spectrosopy
**Wavelength Dispersive Spectrosopy


==Equipment performance and process related parameters==
==Equipment performance and process related parameters==
{| border="2" cellspacing="0" cellpadding="0"  
{| border="2" cellspacing="0" cellpadding="0"  
!colspan="2" border="none" style="background:silver; color:black;" align="center |Equipment  
!colspan="2" border="none" style="background:silver; color:black;" align="center |Equipment  
|style="background:WhiteSmoke; color:black" align="center"|FEI Quanta FEG 250
|style="background:WhiteSmoke; color:black" align="center"|AFEG FEI Quanta FEG 250
|-
|-
!style="background:silver; color:black;" align="center" width="60"| Purpose  
!style="background:silver; color:black;" align="center" width="60"| Purpose  
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|style="background:LightGrey; color:black"|EDS  
|style="background:LightGrey; color:black"|EDS  
|style="background:WhiteSmoke; color:black"|
|style="background:WhiteSmoke; color:black"|
* Oxford Instruments 80 mm<sup>2</sup> X-Max silicon drift detector, MnKα resolution at 124 eV
* Oxford Instruments 50 mm<sup>2</sup> X-Max silicon drift detector, MnKα resolution at 124 eV
|-
|-
|style="background:LightGrey; color:black"|Operating pressures
|style="background:LightGrey; color:black"|Operating pressures
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* High vacuum (10<sup>-4</sup> Pa), Low vacuum (10 to 200Pa)
* High vacuum (10<sup>-4</sup> Pa), Low vacuum (10 to 200Pa)
|-
|-
!style="background:silver; color:black" align="center" valign="center" rowspan="3"|Substrates
!style="background:silver; color:black" align="center" valign="center" rowspan="3"|Samples
|style="background:LightGrey; color:black"|Sample sizes
|style="background:LightGrey; color:black"|Sample sizes
|style="background:WhiteSmoke; color:black"|
|style="background:WhiteSmoke; color:black"|
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|-  
|-  
|}
|}
'''Feedback to this page''': '''[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php/LabAdviser/314/SEM/AFEG click here]'''
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