LabAdviser/314/Microscopy 314-307/SEM/AFEG: Difference between revisions
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[[index.php?title=Category:314]] | |||
[[index.php?title=Category:314-Microscopy]] | |||
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=AFEG 250 Analytical ESEM (FEI Quanta FEG 250) = | =AFEG 250 Analytical ESEM (FEI Quanta FEG 250) = | ||
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*'''Electron source''' | *'''Electron source''' | ||
Field emission gun | **Field emission gun | ||
*'''Accelerating voltage''' | *'''Accelerating voltage''' | ||
500 V- 30 kV | **500 V- 30 kV | ||
*'''Resolution''' | *'''Resolution''' | ||
2 nm at 30 kV (SE) | **2 nm at 30 kV (SE) | ||
*'''Imaging detectors''' | *'''Imaging detectors''' | ||
Everhart-Thornley (SE/BSE) | **Everhart-Thornley (SE/BSE) | ||
**Solid State BSE | |||
**Large Field (LVD) | |||
**Gaseous SE (GSED) | |||
**Gaseous BSE | |||
**Gaseous Analytical (GAD) | |||
**STEM | |||
**vCD | |||
*'''Imaging modes''' | *'''Imaging modes''' | ||
High and low vacuum | High and low vacuum | ||
*'''Analytical capabilities''' | *'''Analytical capabilities''' | ||
Energy dispersive X-rays (Oxford Instruments 50 mm2 X-Max silicon drift detector, MnKα resolution at 124 eV) | **Energy dispersive X-rays (Oxford Instruments 50 mm2 X-Max silicon drift detector, MnKα resolution at 124 eV) | ||
Wavelength Dispersive Spectrosopy | **Wavelength Dispersive Spectrosopy | ||
==Equipment performance and process related parameters== | ==Equipment performance and process related parameters== | ||
{| border="2" cellspacing="0" cellpadding="0" | {| border="2" cellspacing="0" cellpadding="0" | ||
!colspan="2" border="none" style="background:silver; color:black;" align="center |Equipment | !colspan="2" border="none" style="background:silver; color:black;" align="center |Equipment | ||
|style="background:WhiteSmoke; color:black" align="center"|FEI | |style="background:WhiteSmoke; color:black" align="center"|AFEG FEI Quanta FEG 250 | ||
|- | |- | ||
!style="background:silver; color:black;" align="center" width="60"| Purpose | !style="background:silver; color:black;" align="center" width="60"| Purpose | ||
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* 2 nm at 30 keV for Au on C sample with the ETD detector | * 2 nm at 30 keV for Au on C sample with the ETD detector | ||
|- | |- | ||
!style="background:silver; color:black" align="center" valign="center" rowspan=" | !style="background:silver; color:black" align="center" valign="center" rowspan="6"|Instrument specifics | ||
|style="background:LightGrey; color:black"|Detectors | |style="background:LightGrey; color:black"|Detectors | ||
|style="background:WhiteSmoke; color:black"| | |style="background:WhiteSmoke; color:black"| | ||
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|style="background:LightGrey; color:black"|EDS | |style="background:LightGrey; color:black"|EDS | ||
|style="background:WhiteSmoke; color:black"| | |style="background:WhiteSmoke; color:black"| | ||
* Oxford Instruments | * Oxford Instruments 50 mm<sup>2</sup> X-Max silicon drift detector, MnKα resolution at 124 eV | ||
|- | |- | ||
|style="background:LightGrey; color:black"|Operating pressures | |style="background:LightGrey; color:black"|Operating pressures | ||
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* High vacuum (10<sup>-4</sup> Pa), Low vacuum (10 to 200Pa) | * High vacuum (10<sup>-4</sup> Pa), Low vacuum (10 to 200Pa) | ||
|- | |- | ||
!style="background:silver; color:black" align="center" valign="center" rowspan="3"| | !style="background:silver; color:black" align="center" valign="center" rowspan="3"|Samples | ||
|style="background:LightGrey; color:black"|Sample sizes | |style="background:LightGrey; color:black"|Sample sizes | ||
|style="background:WhiteSmoke; color:black"| | |style="background:WhiteSmoke; color:black"| | ||
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| style="background:LightGrey; color:black"|Allowed materials | | style="background:LightGrey; color:black"|Allowed materials | ||
|style="background:WhiteSmoke; color:black"| | |style="background:WhiteSmoke; color:black"| | ||
* Conductors, Semiconductors,Insulators, Prepared Biological | * Conductors, Semiconductors,Insulators, Prepared Biological ((not pathogents!) | ||
|- | |- | ||
|} | |} | ||