Specific Process Knowledge/Back-end processing/Wire Bonder: Difference between revisions
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=TPT HB100 Wire Bonder = | |||
Wire bonding is a method of making interconnections between a microchip and other electronics as part of semiconductor device fabrication. The TPT HB100 Wire Bonder was bought in 2025. It is an automatic desktop wire bonder and supports process guidance for the user. The bonder allows wedge- and ball-bonding, ribbon- and bump-bonding with one bond head. | |||
'''The user manual(s), user APV(s), technical information and contact information can be found in LabManager (requires login):''' | |||
[[/TPT HB 100 wire bonder: process details| TPT HB 100 wire bonder: process details]] | |||
[https://labmanager.dtu.dk/d4mb/show.php?dokId=21233&mach=533 TPT HB100 Wire Bonder] | |||
<!-- | =Ball Wire Bonder K&S 4524= | ||
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[[Image:K&S_4524_ball_wire-bonder.jpg|300x300px|thumb|The Ball Wire Bonder K&S 4524, <br/> Packlab, Building 347, 1st floor]] | |||
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[[Image:K-S 4524 wirebonder DTU.jpg|thumb|200px|K&S 4524 ball wire bonder]] | |||
[[Image:K | |||
<span style="background:#FF2800">The bonder is currently in building 346 Phoenex lab.</span> | |||
The Ball Wire Bonder K&S 4524 is for high precision ball bonding. It is a semi-automatic wire bonder with good control of bond placement and bonding parameters. | The Ball Wire Bonder K&S 4524 is for high precision ball bonding. It is a semi-automatic wire bonder with good control of bond placement and bonding parameters. | ||
'''The user manual(s), user APV(s), technical information and contact information can be found in LabManager (requires login):''' | |||
[http://labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=307 Ball Wire Bonder] | [http://labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=307 Ball Wire Bonder] | ||
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=Equipment performance and process related parameters= | |||
= | [[Image:single wire bonding.jpg|300px|thumb|left|Ball wire bond]] | ||
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{| border="2" cellspacing="0" cellpadding="2" | {| border="2" cellspacing="0" cellpadding="2" | ||
! | !border="none" style="background:silver; color:black;" align="center"|Equipment | ||
|style="background:WhiteSmoke; color:black"|<b>TPT Wire Bonder</b> | |style="background:WhiteSmoke; color:black"|<b>TPT HB100 Wire Bonder</b> | ||
|style="background:WhiteSmoke; color:black"|<b>Ball Wire Bonder</b> | |style="background:WhiteSmoke; color:black"|<b>Ball Wire Bonder K&S 4524</b> | ||
|- | |- | ||
!style="background:silver; color:black;" align="center" width="60"|Purpose | !style="background:silver; color:black;" align="center" width="60"|Purpose | ||
|style="background:WhiteSmoke; color:black"| | |style="background:WhiteSmoke; color:black"| | ||
*Al and Au 25µm wire bonding | *Al and Au 25µm wire bonding | ||
*Wedge and ball wire bonding | *Wedge and ball wire bonding | ||
* Au ribbon (100x20µm) bonding<br /> | * Au ribbon (100x20µm) bonding<br /> | ||
|style="background:WhiteSmoke; color:black"| | |style="background:WhiteSmoke; color:black"| | ||
*Au 25µm wire bonding | *Au 25µm wire bonding | ||
| Line 49: | Line 45: | ||
|- | |- | ||
!style="background:silver; color:black;" align="center" width="60"|Performance | !style="background:silver; color:black;" align="center" width="60"|Performance | ||
|style="background:WhiteSmoke; color:black"| | |style="background:WhiteSmoke; color:black"| | ||
*Manual operation | *Manual operation | ||
*Wedge bonding: | *Wedge bonding: | ||
**recommended min. bonding area 200 µm | **recommended min. bonding area 200 µm x 200 µm | ||
*Ball bonding: | *Ball bonding: | ||
**recommended min. bonding area 200 µm | **recommended min. bonding area 200 µm x 200 µm | ||
**recommended temperature 120 <sup>o</sup>C. | **recommended temperature 120 <sup>o</sup>C. | ||
|style="background:WhiteSmoke; color:black"| | |style="background:WhiteSmoke; color:black"| | ||
*Semi-automatic and manual operation | *Semi-automatic and manual operation | ||
*Bond placement laser pointer | *Bond placement laser pointer | ||
*recommended min. bonding area 100 µm | *recommended min. bonding area 100 µm x 100 µm | ||
*recommended temperature 120 <sup>o</sup>C. | *recommended temperature 120 <sup>o</sup>C. | ||
|- | |- | ||
!style="background:silver; color:black" align="center" valign="center | !style="background:silver; color:black" align="center" valign="center"|Substrates | ||
|colspan="2" style="background:WhiteSmoke; color:black"| | |colspan="2" style="background:WhiteSmoke; color:black"| | ||
*Should be able to withstand the wire bonding temperature | *Should be able to withstand the wire bonding temperature | ||