Specific Process Knowledge/Characterization/Particle Scanner Takano: Difference between revisions
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=Takano WM-7SR Wafer Surface Analyzer= | =Takano WM-7SR Wafer Surface Analyzer= | ||
<i> Unless otherwise stated, this page is written by Patama Pholprasit DTU Nanolab internal</b></i> | |||
The Takano WM-7SR wafer surface analyzer is being used to analyze unpatterned surfaces on wafers for particles. | The Takano WM-7SR wafer surface analyzer is being used to analyze unpatterned surfaces on wafers for particles. | ||
The instrument detects, counts and sizes defects on wafers with semiconductor substrate materials. The instrument uses a 405 nm laser beam which is scanning over the wafer surface to detect defect contamination, i.e. particles. When the laser beam hits a particle, it will scatter and be detected. | The instrument detects, counts and sizes defects on wafers with semiconductor substrate materials. The instrument uses a 405 nm laser beam which is scanning over the wafer surface to detect defect contamination, i.e. particles. When the laser beam hits a particle, it will scatter and be detected. | ||
The scan results are displayed in color-coded wafer maps, histograms and summaries. | The scan results are displayed in color-coded wafer maps, histograms and summaries. | ||
[[File:IMG 9822.JPG|350px|right|thumb|Takano tool at DTU Nanolab. Photo by Patama Pholprasit, DTU Nanolab.]] | |||
===Specifications=== | ===Specifications=== | ||
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- The wafer thickness should be a standard wafer thickness +/- 200 nm. Wafers that thicker than 1 mm need to get an approval from a responsible person.<br /> | - The wafer thickness should be a standard wafer thickness +/- 200 nm. Wafers that thicker than 1 mm need to get an approval from a responsible person.<br /> | ||
- Area Count software function which helps to detect the larger particles (>11um) is not currently equipped but it is available for purchase.<br /> | - Area Count software function which helps to detect the larger particles (>11um) is not currently equipped but it is available for purchase.<br /> | ||
'''The user manual, technical information and contact information can be found in LabManager:''' | |||
'''[https://labmanager.dtu.dk/function.php?module=Machine&view=view&page_id=169 Particle Scanner Takano]''' | |||
[[media:Comparing Takano and SurfScan.pptx|'''Comparing Takano and SurfScan''']] | |||