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<!-- revised 1/6-2015 by jmli -->
<!--Checked for updates on 30/7-2018 - ok/jmli -->
Short description of some process parameters on the DRIE-Pegasus
<!--Checked for updates on 5/10-2020 - ok/jmli -->
<!--Checked for updates on 28/6-2023 - ok/jmli -->
<!--Checked for updates on 4/9-2025 - ok/jmli -->
 
{{contentbydryetch}}
 
= A short description of the hardware on the Pegasus and the other dry etchers =
 
Below are short descriptions of some process parameters on the dry etchers. By default, the descriptions apply to the Pegasus but the other dry etchers are very similar.


; Hardware  
; Hardware  
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