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'''Feedback to this page''': '''[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php/Specific_Process_Knowledge/Etch/ICP_Metal_Etcher/silicon_oxide/By_Peixiong click here]'''
'''Feedback to this page''': '''[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php/Specific_Process_Knowledge/Etch/ICP_Metal_Etcher/silicon_oxide/By_Peixiong click here]'''
<br> {{CC-bghe1}} <br>
=With C4F8 and H2 chemistry (all tests done by Peixiong Shi, DTU Nanolab)=
APOX refers to a thick SiO2 grown on a silicon wafer in a wet thermal process at high temperature.


=With C4F8 and H2 chemistry (tests done by Peixiong@nanolab)=
==Part 1==
==Part 1==
{|  class=MsoNormalTable border=0 cellspacing=0 cellpadding=0 width=855 style='width:641.0pt;border-collapse:collapse'  style='height:36.0pt'
{|  class=MsoNormalTable border=0 cellspacing=0 cellpadding=0 width=855 style='width:641.0pt;border-collapse:collapse'  style='height:36.0pt'
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|  width=83 style='width:62.0pt;border-top:none;border-left:solid white 1.0pt;  border-bottom:solid white 3.0pt;border-right:solid white 1.0pt;background:  #D0D8E8;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:33.3pt' |  
|  width=83 style='width:62.0pt;border-top:none;border-left:solid white 1.0pt;  border-bottom:solid white 3.0pt;border-right:solid white 1.0pt;background:  #D0D8E8;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:33.3pt' |  
|  width=68 style='width:51.0pt;border-top:none;border-left:none;border-bottom:  solid white 3.0pt;border-right:solid white 1.0pt;background:#D0D8E8;  padding:2.25pt 2.25pt 2.25pt 2.25pt;height:33.3pt' | <p class=MsoNormal><span lang=DA>Wafer size and ID</span></p>
|  width=68 style='width:51.0pt;border-top:none;border-left:none;border-bottom:  solid white 3.0pt;border-right:solid white 1.0pt;background:#D0D8E8;  padding:2.25pt 2.25pt 2.25pt 2.25pt;height:33.3pt' | <p class=MsoNormal><span lang=DA>Wafer size and ID</span></p>
|  width=81 style='width:61.0pt;border-top:none;border-left:none;border-bottom:  solid white 3.0pt;border-right:solid white 1.0pt;background:#D0D8E8;  padding:2.25pt 2.25pt 2.25pt 2.25pt;height:33.3pt' | <p class=MsoNormal><span lang=DA>6inch,</span></p><p class=MsoNormal><span lang=DA>6A1_feb252013</span></p>
|  width=81 style='width:61.0pt;border-top:none;border-left:none;border-bottom:  solid white 3.0pt;border-right:solid white 1.0pt;background:#D0D8E8;  padding:2.25pt 2.25pt 2.25pt 2.25pt;height:33.3pt' | <p class=MsoNormal><span lang=DA>6 inch,</span></p><p class=MsoNormal><span lang=DA>6A1_feb252013</span></p>
|  width=72 style='width:54.0pt;border-top:none;border-left:none;border-bottom:  solid white 3.0pt;border-right:solid white 1.0pt;background:#D0D8E8;  padding:2.25pt 2.25pt 2.25pt 2.25pt;height:33.3pt' | <p class=MsoNormal><span lang=DA>6inch,</span></p><p class=MsoNormal><span lang=DA>6A4_feb262013</span></p>
|  width=72 style='width:54.0pt;border-top:none;border-left:none;border-bottom:  solid white 3.0pt;border-right:solid white 1.0pt;background:#D0D8E8;  padding:2.25pt 2.25pt 2.25pt 2.25pt;height:33.3pt' | <p class=MsoNormal><span lang=DA>6 inch,</span></p><p class=MsoNormal><span lang=DA>6A4_feb262013</span></p>
|  width=79 style='width:59.0pt;border-top:none;border-left:none;border-bottom:  solid white 3.0pt;border-right:solid white 1.0pt;background:#D0D8E8;  padding:2.25pt 2.25pt 2.25pt 2.25pt;height:33.3pt' | <p class=MsoNormal><span lang=DA>6inch,</span></p><p class=MsoNormal><span lang=DA>6A6_feb262013</span></p>
|  width=79 style='width:59.0pt;border-top:none;border-left:none;border-bottom:  solid white 3.0pt;border-right:solid white 1.0pt;background:#D0D8E8;  padding:2.25pt 2.25pt 2.25pt 2.25pt;height:33.3pt' | <p class=MsoNormal><span lang=DA>6 inch,</span></p><p class=MsoNormal><span lang=DA>6A6_feb262013</span></p>
|  width=79 style='width:59.0pt;border-top:none;border-left:none;border-bottom:  solid white 3.0pt;border-right:solid white 1.0pt;background:#D0D8E8;  padding:2.25pt 2.25pt 2.25pt 2.25pt;height:33.3pt' | <p class=MsoNormal><span lang=DA>6inch,</span></p><p class=MsoNormal><span lang=DA>6A2_feb272013</span></p>
|  width=79 style='width:59.0pt;border-top:none;border-left:none;border-bottom:  solid white 3.0pt;border-right:solid white 1.0pt;background:#D0D8E8;  padding:2.25pt 2.25pt 2.25pt 2.25pt;height:33.3pt' | <p class=MsoNormal><span lang=DA>6 inch,</span></p><p class=MsoNormal><span lang=DA>6A2_feb272013</span></p>
|  width=79 style='width:59.0pt;border-top:none;border-left:none;border-bottom:  solid white 3.0pt;border-right:solid white 1.0pt;background:#D0D8E8;  padding:2.25pt 2.25pt 2.25pt 2.25pt;height:33.3pt' | <p class=MsoNormal><span lang=DA>6inch,</span></p><p class=MsoNormal><span lang=DA>6A3_feb272013</span></p>
|  width=79 style='width:59.0pt;border-top:none;border-left:none;border-bottom:  solid white 3.0pt;border-right:solid white 1.0pt;background:#D0D8E8;  padding:2.25pt 2.25pt 2.25pt 2.25pt;height:33.3pt' | <p class=MsoNormal><span lang=DA>6 inch,</span></p><p class=MsoNormal><span lang=DA>6A3_feb272013</span></p>
|  width=79 style='width:59.0pt;border-top:none;border-left:none;border-bottom:  solid white 3.0pt;border-right:solid white 1.0pt;background:#D0D8E8;  padding:2.25pt 2.25pt 2.25pt 2.25pt;height:33.3pt' | <p class=MsoNormal><span lang=DA>6inch,</span></p><p class=MsoNormal><span lang=DA>6A4_feb272013</span></p>
|  width=79 style='width:59.0pt;border-top:none;border-left:none;border-bottom:  solid white 3.0pt;border-right:solid white 1.0pt;background:#D0D8E8;  padding:2.25pt 2.25pt 2.25pt 2.25pt;height:33.3pt' | <p class=MsoNormal><span lang=DA>6 inch,</span></p><p class=MsoNormal><span lang=DA>6A4_feb272013</span></p>
|  width=79 style='width:59.0pt;border-top:none;border-left:none;border-bottom:  solid white 3.0pt;border-right:solid white 1.0pt;background:#D0D8E8;  padding:2.25pt 2.25pt 2.25pt 2.25pt;height:33.3pt' | <p class=MsoNormal><span lang=DA>6inch,</span></p><p class=MsoNormal><span lang=DA>6A5_feb272013</span></p>
|  width=79 style='width:59.0pt;border-top:none;border-left:none;border-bottom:  solid white 3.0pt;border-right:solid white 1.0pt;background:#D0D8E8;  padding:2.25pt 2.25pt 2.25pt 2.25pt;height:33.3pt' | <p class=MsoNormal><span lang=DA>6 inch,</span></p><p class=MsoNormal><span lang=DA>6A5_feb272013</span></p>
|  width=79 style='width:59.0pt;border-top:none;border-left:none;border-bottom:  solid white 3.0pt;border-right:solid white 1.0pt;background:#D0D8E8;  padding:2.25pt 2.25pt 2.25pt 2.25pt;height:33.3pt' | <p class=MsoNormal><span lang=DA>6inch,</span></p><p class=MsoNormal><span lang=DA>6A5_feb272013</span></p>
|  width=79 style='width:59.0pt;border-top:none;border-left:none;border-bottom:  solid white 3.0pt;border-right:solid white 1.0pt;background:#D0D8E8;  padding:2.25pt 2.25pt 2.25pt 2.25pt;height:33.3pt' | <p class=MsoNormal><span lang=DA>6 inch,</span></p><p class=MsoNormal><span lang=DA>6A5_feb272013</span></p>
|  width=79 style='width:59.0pt;border-top:none;border-left:none;border-bottom:  solid white 3.0pt;border-right:solid white 1.0pt;background:#D0D8E8;  padding:2.25pt 2.25pt 2.25pt 2.25pt;height:33.3pt' | <p class=MsoNormal><span lang=DA>6inch,</span></p><p class=MsoNormal><span lang=DA>6A6_feb272013</span></p>
|  width=79 style='width:59.0pt;border-top:none;border-left:none;border-bottom:  solid white 3.0pt;border-right:solid white 1.0pt;background:#D0D8E8;  padding:2.25pt 2.25pt 2.25pt 2.25pt;height:33.3pt' | <p class=MsoNormal><span lang=DA>6 inch,</span></p><p class=MsoNormal><span lang=DA>6A6_feb272013</span></p>
|-  style='height:71.7pt'
|-  style='height:71.7pt'
|  width=83 style='width:62.0pt;border:solid white 1.0pt;border-top:none;  background:#D0D8E8;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:71.7pt' |  
|  width=83 style='width:62.0pt;border:solid white 1.0pt;border-top:none;  background:#D0D8E8;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:71.7pt' |  
|  width=68 style='width:51.0pt;border-top:none;border-left:none;border-bottom:  solid white 1.0pt;border-right:solid white 1.0pt;background:#D0D8E8;  padding:2.25pt 2.25pt 2.25pt 2.25pt;height:71.7pt' | <p class=MsoNormal><span lang=DA>Mask</span></p>
|  width=68 style='width:51.0pt;border-top:none;border-left:none;border-bottom:  solid white 1.0pt;border-right:solid white 1.0pt;background:#D0D8E8;  padding:2.25pt 2.25pt 2.25pt 2.25pt;height:71.7pt' | <p class=MsoNormal><span lang=DA>Mask</span></p>
|  width=81 style='width:61.0pt;border-top:none;border-left:none;border-bottom:  solid white 1.0pt;border-right:solid white 1.0pt;background:#D0D8E8;  padding:2.25pt 2.25pt 2.25pt 2.25pt;height:71.7pt' | <p class=MsoNormal>440nm resist on 62nmBarc on 1800nm apox, first etch barc
|  width=81 style='width:61.0pt;border-top:none;border-left:none;border-bottom:  solid white 1.0pt;border-right:solid white 1.0pt;background:#D0D8E8;  padding:2.25pt 2.25pt 2.25pt 2.25pt;height:71.7pt' | <p class=MsoNormal>440 nm resist on 62 nm Barc on 1800 nm apox, first etch barc
20sec by Ox plasma</p>
20 sec by Ox plasma</p>
|  width=72 style='width:54.0pt;border-top:none;border-left:none;border-bottom:  solid white 1.0pt;border-right:solid white 1.0pt;background:#D0D8E8;  padding:2.25pt 2.25pt 2.25pt 2.25pt;height:71.7pt' | <p class=MsoNormal>440nm resist on 62nmBarc on 1800nm apox, first etch barc
|  width=72 style='width:54.0pt;border-top:none;border-left:none;border-bottom:  solid white 1.0pt;border-right:solid white 1.0pt;background:#D0D8E8;  padding:2.25pt 2.25pt 2.25pt 2.25pt;height:71.7pt' | <p class=MsoNormal>440 nm resist on 62 nm Barc on 1800 nm apox, first etch barc
20sec by Ox plasma</p>
20 sec by Ox plasma</p>
|  width=79 style='width:59.0pt;border-top:none;border-left:none;border-bottom:  solid white 1.0pt;border-right:solid white 1.0pt;background:#D0D8E8;  padding:2.25pt 2.25pt 2.25pt 2.25pt;height:71.7pt' | <p class=MsoNormal>780nm resist on 62nmBarc on 1800nm apox, first etch barc
|  width=79 style='width:59.0pt;border-top:none;border-left:none;border-bottom:  solid white 1.0pt;border-right:solid white 1.0pt;background:#D0D8E8;  padding:2.25pt 2.25pt 2.25pt 2.25pt;height:71.7pt' | <p class=MsoNormal>780 nm resist on 62 nm Barc on 1800 nm apox, first etch barc
20sec by Ox plasma</p>
20 sec by Ox plasma</p>
|  width=79 style='width:59.0pt;border-top:none;border-left:none;border-bottom:  solid white 1.0pt;border-right:solid white 1.0pt;background:#D0D8E8;  padding:2.25pt 2.25pt 2.25pt 2.25pt;height:71.7pt' | <p class=MsoNormal>780nm resist on 62nmBarc on 800nm apox, first etch barc
|  width=79 style='width:59.0pt;border-top:none;border-left:none;border-bottom:  solid white 1.0pt;border-right:solid white 1.0pt;background:#D0D8E8;  padding:2.25pt 2.25pt 2.25pt 2.25pt;height:71.7pt' | <p class=MsoNormal>780nm resist on 62nmBarc on 800nm apox, first etch barc
20sec by Ox plasma</p>
20sec by Ox plasma</p>
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|}<p class=MsoNormal><span lang=DA>&nbsp;</span></p>
|}<p class=MsoNormal><span lang=DA>&nbsp;</span></p>


=With CF4 and H2 chemistry by ''Peixiong@nanolab''=
=With CF4 and H2 chemistry by ''Peixiong Shi, DTU Nanolab''=


==Part 1==
==Part 1==
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