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DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers
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'''Feedback to this page''': '''[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php/Specific_Process_Knowledge/Etch/DRIE-Pegasus/Isotropic/mediumiso1 click here]'''
<!--Checked for updates on 30/7-2018 - ok/jmli -->
<!--Checked for updates on 2/10-2020 - ok/jmli -->
<!--Checked for updates on 28/6-2023 - ok/jmli -->
<!--Checked for updates on 4/9-2025 - ok/jmli -->
{{contentbydryetch}}


{| border="2" cellpadding="0" cellspacing="0" style="text-align:center;"
{| border="2" cellpadding="0" cellspacing="0" style="text-align:center;"
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|-
| 6/6-2016
| 6"
| travka35 wafer 1.5 µm AZ
| Si / 35 %
| Pegasus/jmli
|
| standard/danchip/mediumiso1 2:00 minutes
| S006534
|
|
[[file:S006534 064.jpg |120px|frameless ]]
[[file:S006534 065.jpg |120px|frameless ]]
[[file:S006534 067.jpg |120px|frameless ]]
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|-
| 6/6-2016
| 6"
| travka35 wafer 1.5 µm AZ
| Si / 35 %
| Pegasus/jmli
|
| standard/danchip/mediumiso1 4:00 minutes
| S006535
|
|
[[file:S006535 066.jpg |120px|frameless ]]
[[file:S006535069.jpg |120px|frameless ]]
[[file:S006534 067.jpg |120px|frameless ]]
[[file:S006534 068.jpg |120px|frameless ]]
|-
|-
|}
|}
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