Specific Process Knowledge/Etch/DRIE-Pegasus/Isotropic: Difference between revisions

Latest revision as of 09:40, 4 September 2025

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**Mediumiso**
Recipe	Step	Temperature	Pressure	C₄F₈	SF₆	O₂	Ar	Coil	Platen	Runs	Key words
Mediumiso1	-	20	25	0	150	0	0	600	3	1	Works great. Used extensively for Ph.D. thesis of Peter Emil Larsen
Isoslow7	-	10	10	0	80	0	0	150	3	1
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-{{Birth date and age|1993|Feb|24}} returns "February 24, 1993 (age 29)"
-{{Birth date and age|1993|Feb|24|df=yes}} returns "24 February 1993 (age 29)"
-{{Birth date and age|1993|Feb|24|mf=yes}} returns "February 24, 1993 (age 29)"