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| = XPS data processing guide = | | <!--Checked for updates on 30/7-2018 - ok/jmli --> |
| | <!--Checked for updates on 5/10-2020 - ok/jmli --> |
| | '''Feedback to this page''': '''[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php?title=Specific_Process_Knowledge/Characterization/XPS/Processing/Basics click here]''' |
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| This section shows all actions performed with Avantage (version 5.498) during an analysis of a sample.
| | <!-- Page reviewed 8/5-2023 jmli --> |
| | {{Author-jmli1}} |
| | <!--Checked for updates on 4/9-2025 - ok/jmli --> |
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| | = XPS data processing guide = |
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| == Open data and save the processing document ==
| | This section is intended as an introduction to the analysis of XPS data. Simple examples are chosen to illustrate the procedures. All actions performed with Avantage (version 5.498) during an analysis of a sample are shown. |
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| Locate the .VGX file in the experiment data tree. Either open the experiment by selecting 'Open Experiment' in Avantage, or double click on the .VGX file. You will see something like this:
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| [[File:XPS-basics00.jpg|700px]]
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| It is a very good idea to save the processing document as you analyze the data (Avantage may crash some times) - to do so, select 'Save Processing Document' and you analysis will be saved as a .VGD file.
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| == Spectrum views ==
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| <span style="font-size: 90%; text-align: right;">[[Specific_Process_Knowledge/Characterization/XPS/Processing/Basics#top|Go to top of this page]]</span>
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| To start analysing the data we will start by looking at the survey spectrum. Open a new processing document by clicking the button in the toolbar to the left as shown below:
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| [[File:XPS-basics01.jpg|700px]]
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| Then drag the survey spectrum into one of the quadrants in the data grid as shown below:
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| [[File:XPS-basics02.jpg|700px]]
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| Use the buttons as shown to the right (or below the red square) to
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| * Maximize spectrum views
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| * Minimize spectrum views
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| * Add or remove rows/columns
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| [[File:XPS-basics03a.jpg|700px]]
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| == Different views of spectra ==
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| <span style="font-size: 90%; text-align: right;">[[Specific_Process_Knowledge/Characterization/XPS/Processing/Basics#top|Go to top of this page]]</span>
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| Maximize the view of the survey spectrum:
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| [[File:XPS-basics04.jpg|700px]]
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| As shown in the bottom of the image above, this experiment holds several levels - the reason is that the exeriment is a depth profile in which a repeated set of spectra of a sample are recorded as the surface is gradually removed by an ion bombardment. Scroll through the individual levels, either by using the 'Etch time' or 'Etch Level' scroll buttons and see how the spectra change. Level 0 is the first spectrum.
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| If more levels (such as in a depth profile) are available, one can change the display mode:
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| <gallery caption="Different views of spectra in experiments with several levels" widths="350" perrow="2">
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| Image:XPS-basics03display3.jpg | 2D Chart view
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| Image:XPS-basics03display4.jpg | Stacked Chart view
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| Image:XPS-basics03display1.jpg | 3D Chart view
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| Image:XPS-basics03display2.jpg | Image view
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| </gallery>
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| == Survey spectrum peak identification ==
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| <span style="font-size: 90%; text-align: right;">[[Specific_Process_Knowledge/Characterization/XPS/Processing/Basics#top|Go to top of this page]]</span>
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| In the top are several bottoms in the 'Analysis' toolbar. Click the leftmost one called Automatic Survey ID and a automated peak identification routine will commence. The result is shown below:
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| [[File:XPS-basics05.jpg|700px]] | | In case you want to follow along with your own analysis, you can download the data from [[Media:20150518_ZnO_CuZn_ZnO.doc| here (this file is a .zip file that has been renamed to .doc in order to be uploaded to LabAdviser, so download and rename to .zip and extract the files)]] |
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| Several things are worth noting:
| | # [[Specific Process Knowledge/Characterization/XPS/Processing/Basics/1intro|Survey spectra analysis]] |
| * A peak table pops up above the spectrum. It contains information (which elements, fitted atomic percentages etc.) obtained in the automatic fitting routine. One can still scroll through the levels (if more levels in a depth profile are available) but the elements fitted will not change.
| | ## [[Specific Process Knowledge/Characterization/XPS/Processing/Basics/1intro#Open_data_and_save_the_processing_document|Open data]] |
| * Only a fraction of the peaks in the spectrum
| | ## [[Specific Process Knowledge/Characterization/XPS/Processing/Basics/1intro#Spectrum_views|Spectrum views]] |
| | ## [[Specific Process Knowledge/Characterization/XPS/Processing/Basics/1intro#Views_of_data_with_several_etch_levels|View of data with several levels]] |
| | ## [[Specific Process Knowledge/Characterization/XPS/Processing/Basics/1intro#Zooming|Zooming]] |
| | ## [[Specific Process Knowledge/Characterization/XPS/Processing/Basics/1intro#Automatic_peak_identification_of_survey_spectra|Automatic peak ID]] |
| | ## [[Specific Process Knowledge/Characterization/XPS/Processing/Basics/1intro#Manually_add_peaks_to_identification_of_survey_spectra|Manual ID]] |
| | ## [[Specific Process Knowledge/Characterization/XPS/Processing/Basics/1intro#Make_a_depth_profile_from_survey_spectrum|Depth profile]] |
| | # [[Specific Process Knowledge/Characterization/XPS/Processing/Basics/2highres|High resolution spectra analysis]] |
| | ## [[Specific Process Knowledge/Characterization/XPS/Processing/Basics/2highres#Selecting_high_resolution_spectra_for_peak_fitting|Open spectra]] |
| | ## [[Specific Process Knowledge/Characterization/XPS/Processing/Basics/2highres#Peak_fitting|Peak fitting]] |
| | ## [[Specific Process Knowledge/Characterization/XPS/Processing/Basics/2highres#Verify_correctness_of_fitting_routine|Ensure correct fitting parameters]] |
| | ## [[Specific Process Knowledge/Characterization/XPS/Processing/Basics/2highres#Change_fitting_constraints|Apply constraints]] |
| | # [[Specific Process Knowledge/Characterization/XPS/Processing/Basics/3fitting|Complete the analysis]] |
