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Specific Process Knowledge/Characterization/XPS/XPS Depth profiling: Difference between revisions

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=Depth profiling=
=Depth profiling=
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* Polysilicon
* Polysilicon


[[File:profile sandwich 3.PNG|700px]]
[[File:profile sandwich 3.PNG|700px|{{photo1}}]]


In the spectra required to make such a depth profile, one can distinguish the various chemical environments of silicon depending on whether it is bonded to:
In the spectra required to make such a depth profile, one can distinguish the various chemical environments of silicon depending on whether it is bonded to: