Specific Process Knowledge/Characterization/XPS/XPS elemental composition: Difference between revisions
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[[File:XPS survey.jpg | [[File:XPS survey.jpg|XPS spectrum of a sample consisting of the elements silicon, oxygen and carbon. {{image1}}]] | ||
With a unique set of electronic states, each element has its own "finger-print" in the XPS spectrum. The electronic states in the atoms are occupied by electrons with a specific binding energy. In the spectrum above, the dominant peaks of carbon, oxygen and silicon are labelled. More peaks are seen in this socalled survey spectrum but they are all associated to these three elements. All elements have peaks within the wide energy range (usually 0 - 1350 eV binding energy) of the survey spectrum - hence any element that is present in the sample within its detection limit (roughly 1 % depending on element and acquisition setup) will show up in the survey spectrum as peaks of intensities that are determined by the respective concentrations. | With a unique set of electronic states, each element has its own "finger-print" in the XPS spectrum. The electronic states in the atoms are occupied by electrons with a specific binding energy. In the spectrum above, the dominant peaks of carbon, oxygen and silicon are labelled. More peaks are seen in this socalled survey spectrum but they are all associated to these three elements. All elements have peaks within the wide energy range (usually 0 - 1350 eV binding energy) of the survey spectrum - hence any element that is present in the sample within its detection limit (roughly 1 % depending on element and acquisition setup) will show up in the survey spectrum as peaks of intensities that are determined by the respective concentrations. | ||